Low pressure plasmas and microstructuring technology:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin [u.a.]
Springer
2009
|
| Subjects: | |
| Physical Description: | XXIV, 732 S. Ill., graph. Darst. |
| ISBN: | 9783540858485 |
Staff View
MARC
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| 245 | 1 | 0 | |a Low pressure plasmas and microstructuring technology |c Gerhard Franz |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 2009 | |
| 300 | |a XXIV, 732 S. |b Ill., graph. Darst. | ||
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Record in the Search Index
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| any_adam_object | |
| author | Franz, Gerhard |
| author_facet | Franz, Gerhard |
| author_role | aut |
| author_sort | Franz, Gerhard |
| author_variant | g f gf |
| building | Verbundindex |
| bvnumber | BV025524573 |
| classification_rvk | UR 8000 ZM 7680 |
| ctrlnum | (OCoLC)432306695 (DE-599)BVBBV025524573 |
| dewey-full | 530.44 621.044 |
| dewey-hundreds | 500 - Natural sciences and mathematics 600 - Technology (Applied sciences) |
| dewey-ones | 530 - Physics 621 - Applied physics |
| dewey-raw | 530.44 621.044 |
| dewey-search | 530.44 621.044 |
| dewey-sort | 3530.44 |
| dewey-tens | 530 - Physics 620 - Engineering and allied operations |
| discipline | Physik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| id | DE-604.BV025524573 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:35:57Z |
| institution | BVB |
| isbn | 9783540858485 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020132340 |
| oclc_num | 432306695 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | XXIV, 732 S. Ill., graph. Darst. |
| publishDate | 2009 |
| publishDateSearch | 2009 |
| publishDateSort | 2009 |
| publisher | Springer |
| record_format | marc |
| spelling | Franz, Gerhard Verfasser aut Low pressure plasmas and microstructuring technology Gerhard Franz Berlin [u.a.] Springer 2009 XXIV, 732 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Hochfrequenzentladung (DE-588)4298594-8 gnd rswk-swf PECVD-Verfahren (DE-588)4267316-1 gnd rswk-swf Niederdruckplasma (DE-588)4274388-6 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Plasmadiagnostik (DE-588)4260997-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Ionenstrahlbearbeitung (DE-588)4277034-8 gnd rswk-swf Niederdruckplasma (DE-588)4274388-6 s Hochfrequenzentladung (DE-588)4298594-8 s DE-604 Ionenstrahlbearbeitung (DE-588)4277034-8 s Plasmadiagnostik (DE-588)4260997-5 s PECVD-Verfahren (DE-588)4267316-1 s Sputtern (DE-588)4182614-0 s Plasmaätzen (DE-588)4174821-9 s |
| spellingShingle | Franz, Gerhard Low pressure plasmas and microstructuring technology Hochfrequenzentladung (DE-588)4298594-8 gnd PECVD-Verfahren (DE-588)4267316-1 gnd Niederdruckplasma (DE-588)4274388-6 gnd Plasmaätzen (DE-588)4174821-9 gnd Plasmadiagnostik (DE-588)4260997-5 gnd Sputtern (DE-588)4182614-0 gnd Ionenstrahlbearbeitung (DE-588)4277034-8 gnd |
| subject_GND | (DE-588)4298594-8 (DE-588)4267316-1 (DE-588)4274388-6 (DE-588)4174821-9 (DE-588)4260997-5 (DE-588)4182614-0 (DE-588)4277034-8 |
| title | Low pressure plasmas and microstructuring technology |
| title_auth | Low pressure plasmas and microstructuring technology |
| title_exact_search | Low pressure plasmas and microstructuring technology |
| title_full | Low pressure plasmas and microstructuring technology Gerhard Franz |
| title_fullStr | Low pressure plasmas and microstructuring technology Gerhard Franz |
| title_full_unstemmed | Low pressure plasmas and microstructuring technology Gerhard Franz |
| title_short | Low pressure plasmas and microstructuring technology |
| title_sort | low pressure plasmas and microstructuring technology |
| topic | Hochfrequenzentladung (DE-588)4298594-8 gnd PECVD-Verfahren (DE-588)4267316-1 gnd Niederdruckplasma (DE-588)4274388-6 gnd Plasmaätzen (DE-588)4174821-9 gnd Plasmadiagnostik (DE-588)4260997-5 gnd Sputtern (DE-588)4182614-0 gnd Ionenstrahlbearbeitung (DE-588)4277034-8 gnd |
| topic_facet | Hochfrequenzentladung PECVD-Verfahren Niederdruckplasma Plasmaätzen Plasmadiagnostik Sputtern Ionenstrahlbearbeitung |
| work_keys_str_mv | AT franzgerhard lowpressureplasmasandmicrostructuringtechnology |