APA (7th ed.) Citation

Franz, G. (2009). Low pressure plasmas and microstructuring technology. Springer.

Chicago Style (17th ed.) Citation

Franz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. Berlin [u.a.]: Springer, 2009.

MLA (9th ed.) Citation

Franz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. Springer, 2009.

Warning: These citations may not always be 100% accurate.