Optical microlithographyg: technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif.
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | Undetermined |
| Published: |
Bellingham, Wash.
SPIE
1982
|
| Series: | Proceedings of the SPIE
334 |
| Subjects: | |
| Physical Description: | VI, 265 S. Ill. |
| ISBN: | 0892523697 |
Staff View
MARC
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Record in the Search Index
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| id | DE-604.BV025243225 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:29:34Z |
| institution | BVB |
| isbn | 0892523697 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019881308 |
| oclc_num | 917018314 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | VI, 265 S. Ill. |
| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of the SPIE |
| spelling | Optical microlithographyg technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif. Ed.: Harry L. Stover Bellingham, Wash. SPIE 1982 VI, 265 S. Ill. txt rdacontent n rdamedia nc rdacarrier Proceedings of the SPIE 334 Mustererkennung (DE-588)4040936-3 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Photowiderstand (DE-588)4136944-0 gnd rswk-swf Optik (DE-588)4043650-0 gnd rswk-swf Optik (DE-588)4043650-0 s DE-604 Lithografie Halbleitertechnologie (DE-588)4191584-7 s Mustererkennung (DE-588)4040936-3 s Photowiderstand (DE-588)4136944-0 s VLSI (DE-588)4117388-0 s Stover, Harry L. edt Society of Photo-Optical Instrumentation Engineers Proceedings of the SPIE 334 (DE-604)BV000010887 334 |
| spellingShingle | Optical microlithographyg technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif. Mustererkennung (DE-588)4040936-3 gnd VLSI (DE-588)4117388-0 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Photowiderstand (DE-588)4136944-0 gnd Optik (DE-588)4043650-0 gnd |
| subject_GND | (DE-588)4040936-3 (DE-588)4117388-0 (DE-588)4191584-7 (DE-588)4136944-0 (DE-588)4043650-0 |
| title | Optical microlithographyg technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif. |
| title_auth | Optical microlithographyg technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif. |
| title_exact_search | Optical microlithographyg technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif. |
| title_full | Optical microlithographyg technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif. Ed.: Harry L. Stover |
| title_fullStr | Optical microlithographyg technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif. Ed.: Harry L. Stover |
| title_full_unstemmed | Optical microlithographyg technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif. Ed.: Harry L. Stover |
| title_short | Optical microlithographyg |
| title_sort | optical microlithographyg technology for the mid 1980s march 31 april 1 1982 santa clara calif |
| title_sub | technology for the mid-1980s ; march 31-april 1, 1982, Santa Clara, Calif. |
| topic | Mustererkennung (DE-588)4040936-3 gnd VLSI (DE-588)4117388-0 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Photowiderstand (DE-588)4136944-0 gnd Optik (DE-588)4043650-0 gnd |
| topic_facet | Mustererkennung VLSI Lithografie Halbleitertechnologie Photowiderstand Optik |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT stoverharryl opticalmicrolithographygtechnologyforthemid1980smarch31april11982santaclaracalif |