Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | German |
| Published: |
1996
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| Subjects: | |
| Physical Description: | III, 138 S. graph. Darst. |
Staff View
MARC
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| 245 | 1 | 0 | |a Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten |c Matthias Hierlemann |
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| 502 | |a München, Techn. Univ., Diss., 1997 | ||
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Record in the Search Index
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| any_adam_object | |
| author | Hierlemann, Matthias 1966- |
| author_GND | (DE-588)115868224 |
| author_facet | Hierlemann, Matthias 1966- |
| author_role | aut |
| author_sort | Hierlemann, Matthias 1966- |
| author_variant | m h mh |
| building | Verbundindex |
| bvnumber | BV024846025 |
| ctrlnum | (OCoLC)916976187 (DE-599)BVBBV024846025 |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV024846025 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:22:20Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019523107 |
| oclc_num | 916976187 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | III, 138 S. graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| record_format | marc |
| spelling | Hierlemann, Matthias 1966- Verfasser (DE-588)115868224 aut Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten Matthias Hierlemann 1996 III, 138 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier München, Techn. Univ., Diss., 1997 Silicium (DE-588)4077445-4 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Simulation (DE-588)4055072-2 gnd rswk-swf Prozesssimulation (DE-588)4176077-3 gnd rswk-swf Germanium (DE-588)4135644-5 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content CVD-Verfahren (DE-588)4009846-1 s Silicium (DE-588)4077445-4 s Germanium (DE-588)4135644-5 s Simulation (DE-588)4055072-2 s DE-604 Dünne Schicht (DE-588)4136925-7 s Prozesssimulation (DE-588)4176077-3 s |
| spellingShingle | Hierlemann, Matthias 1966- Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten Silicium (DE-588)4077445-4 gnd Dünne Schicht (DE-588)4136925-7 gnd Simulation (DE-588)4055072-2 gnd Prozesssimulation (DE-588)4176077-3 gnd Germanium (DE-588)4135644-5 gnd CVD-Verfahren (DE-588)4009846-1 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4136925-7 (DE-588)4055072-2 (DE-588)4176077-3 (DE-588)4135644-5 (DE-588)4009846-1 (DE-588)4113937-9 |
| title | Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten |
| title_auth | Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten |
| title_exact_search | Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten |
| title_full | Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten Matthias Hierlemann |
| title_fullStr | Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten Matthias Hierlemann |
| title_full_unstemmed | Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten Matthias Hierlemann |
| title_short | Simulation der Abscheidung von Silizium- und Silizium- Germanium-Schichten |
| title_sort | simulation der abscheidung von silizium und silizium germanium schichten |
| topic | Silicium (DE-588)4077445-4 gnd Dünne Schicht (DE-588)4136925-7 gnd Simulation (DE-588)4055072-2 gnd Prozesssimulation (DE-588)4176077-3 gnd Germanium (DE-588)4135644-5 gnd CVD-Verfahren (DE-588)4009846-1 gnd |
| topic_facet | Silicium Dünne Schicht Simulation Prozesssimulation Germanium CVD-Verfahren Hochschulschrift |
| work_keys_str_mv | AT hierlemannmatthias simulationderabscheidungvonsiliziumundsiliziumgermaniumschichten |