APA (7th ed.) Citation

Moreau, W. M. (1988). Semiconductor Lithography: Principles, practices, and materials. Plenum Pr.

Chicago Style (17th ed.) Citation

Moreau, Wayne M. Semiconductor Lithography: Principles, Practices, and Materials. New York <<[u.a.]>>: Plenum Pr, 1988.

MLA (9th ed.) Citation

Moreau, Wayne M. Semiconductor Lithography: Principles, Practices, and Materials. Plenum Pr, 1988.