Mikromechanik: Mikrofertigung mit Methoden d. Halbleitertechnologie
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | Undetermined |
| Published: |
Berlin ; Heidelberg ; New York ; London ; Paris ; Tokyo
Springer
1989
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| Subjects: | |
| Physical Description: | XVII, 501 S. 285 Ill. u. graph. Darst. |
| ISBN: | 3540187219 0387187219 |
Staff View
MARC
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Record in the Search Index
| _version_ | 1804140095425478656 |
|---|---|
| any_adam_object | |
| author2 | Heuberger, Anton |
| author2_role | edt |
| author2_variant | a h ah |
| author_facet | Heuberger, Anton |
| building | Verbundindex |
| bvnumber | BV024682736 |
| classification_rvk | ZN 3600 ZN 3700 ZN 4100 ZN 4980 |
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| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV024682736 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:54:32Z |
| institution | BVB |
| isbn | 3540187219 0387187219 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018093656 |
| oclc_num | 246822790 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | XVII, 501 S. 285 Ill. u. graph. Darst. |
| psigel | TUB-nse |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Springer |
| record_format | marc |
| spelling | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Anton Heuberger (Hrsg.) Berlin ; Heidelberg ; New York ; London ; Paris ; Tokyo Springer 1989 XVII, 501 S. 285 Ill. u. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s DE-604 Heuberger, Anton edt |
| spellingShingle | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4205811-9 |
| title | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie |
| title_auth | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie |
| title_exact_search | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie |
| title_full | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Anton Heuberger (Hrsg.) |
| title_fullStr | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Anton Heuberger (Hrsg.) |
| title_full_unstemmed | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Anton Heuberger (Hrsg.) |
| title_short | Mikromechanik |
| title_sort | mikromechanik mikrofertigung mit methoden d halbleitertechnologie |
| title_sub | Mikrofertigung mit Methoden d. Halbleitertechnologie |
| topic | Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Mikromechanik |
| work_keys_str_mv | AT heubergeranton mikromechanikmikrofertigungmitmethodendhalbleitertechnologie |