Laser Processing of thin films and microstructures: oxidation, deposition and etching of insulators
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | Undetermined |
| Published: |
Berlin ; Heidelberg <<[u.a.]>>
Springer
1987
|
| Series: | Springer series in materials science
3 |
| Subjects: | |
| Physical Description: | VIII, 320 S. |
| ISBN: | 3540179518 0387179518 |
Staff View
MARC
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| 264 | 1 | |a Berlin ; Heidelberg <<[u.a.]>> |b Springer |c 1987 | |
| 300 | |a VIII, 320 S. | ||
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| 650 | 0 | 7 | |a Laserbearbeitung |0 (DE-588)4139080-5 |2 gnd |9 rswk-swf |
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Record in the Search Index
| _version_ | 1804140075197399040 |
|---|---|
| any_adam_object | |
| author | Boyd, Ian W. |
| author_facet | Boyd, Ian W. |
| author_role | aut |
| author_sort | Boyd, Ian W. |
| author_variant | i w b iw iwb |
| building | Verbundindex |
| bvnumber | BV024662181 |
| classification_rvk | UH 5750 UQ 8100 |
| ctrlnum | (OCoLC)246790944 (DE-599)BVBBV024662181 |
| discipline | Physik |
| format | Book |
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| id | DE-604.BV024662181 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T21:54:12Z |
| institution | BVB |
| isbn | 3540179518 0387179518 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018073243 |
| oclc_num | 246790944 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | VIII, 320 S. |
| psigel | TUB-nve |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Springer |
| record_format | marc |
| series2 | Springer series in materials science |
| spelling | Boyd, Ian W. Verfasser aut Laser Processing of thin films and microstructures oxidation, deposition and etching of insulators Berlin ; Heidelberg <<[u.a.]>> Springer 1987 VIII, 320 S. txt rdacontent n rdamedia nc rdacarrier Springer series in materials science 3 Mikrostruktur (DE-588)4131028-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Halbleiterwerkstoff (DE-588)4158817-4 gnd rswk-swf Laserbearbeitung (DE-588)4139080-5 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s Laserbearbeitung (DE-588)4139080-5 s DE-604 Mikrostruktur (DE-588)4131028-7 s Dünnschichttechnik (DE-588)4136339-5 s Halbleiterwerkstoff (DE-588)4158817-4 s |
| spellingShingle | Boyd, Ian W. Laser Processing of thin films and microstructures oxidation, deposition and etching of insulators Mikrostruktur (DE-588)4131028-7 gnd Dünne Schicht (DE-588)4136925-7 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Laserbearbeitung (DE-588)4139080-5 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| subject_GND | (DE-588)4131028-7 (DE-588)4136925-7 (DE-588)4158817-4 (DE-588)4139080-5 (DE-588)4136339-5 |
| title | Laser Processing of thin films and microstructures oxidation, deposition and etching of insulators |
| title_auth | Laser Processing of thin films and microstructures oxidation, deposition and etching of insulators |
| title_exact_search | Laser Processing of thin films and microstructures oxidation, deposition and etching of insulators |
| title_full | Laser Processing of thin films and microstructures oxidation, deposition and etching of insulators |
| title_fullStr | Laser Processing of thin films and microstructures oxidation, deposition and etching of insulators |
| title_full_unstemmed | Laser Processing of thin films and microstructures oxidation, deposition and etching of insulators |
| title_short | Laser Processing of thin films and microstructures |
| title_sort | laser processing of thin films and microstructures oxidation deposition and etching of insulators |
| title_sub | oxidation, deposition and etching of insulators |
| topic | Mikrostruktur (DE-588)4131028-7 gnd Dünne Schicht (DE-588)4136925-7 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Laserbearbeitung (DE-588)4139080-5 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| topic_facet | Mikrostruktur Dünne Schicht Halbleiterwerkstoff Laserbearbeitung Dünnschichttechnik |
| work_keys_str_mv | AT boydianw laserprocessingofthinfilmsandmicrostructuresoxidationdepositionandetchingofinsulators |