APA (7th ed.) Citation

Morgan, R. A. (1985). Plasma etching in semiconductor fabrication. Elsevier.

Chicago Style (17th ed.) Citation

Morgan, Russ A. Plasma Etching in Semiconductor Fabrication. Amsterdam <<[u.a.]>>: Elsevier, 1985.

MLA (9th ed.) Citation

Morgan, Russ A. Plasma Etching in Semiconductor Fabrication. Elsevier, 1985.