Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Karlsruhe
Kernforschungszentrum
1988
|
| Edition: | Als Ms. vervielfältigt |
| Physical Description: | 9 S. graph. Darst. |
Staff View
MARC
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| 100 | 1 | |a Haase, Ernst L. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering |c E. L. Haase and J. Ruzicka |
| 250 | |a Als Ms. vervielfältigt | ||
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Record in the Search Index
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| any_adam_object | |
| author | Haase, Ernst L. Ruzicka, J. |
| author_facet | Haase, Ernst L. Ruzicka, J. |
| author_role | aut aut |
| author_sort | Haase, Ernst L. |
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| building | Verbundindex |
| bvnumber | BV024515036 |
| ctrlnum | (OCoLC)256186392 (DE-599)BVBBV024515036 |
| edition | Als Ms. vervielfältigt |
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| id | DE-604.BV024515036 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:01:13Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018489167 |
| oclc_num | 256186392 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | 9 S. graph. Darst. |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| publisher | Kernforschungszentrum |
| record_format | marc |
| spelling | Haase, Ernst L. Verfasser aut Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering E. L. Haase and J. Ruzicka Als Ms. vervielfältigt Karlsruhe Kernforschungszentrum 1988 9 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Ruzicka, J. Verfasser aut |
| spellingShingle | Haase, Ernst L. Ruzicka, J. Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering |
| title | Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering |
| title_auth | Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering |
| title_exact_search | Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering |
| title_full | Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering E. L. Haase and J. Ruzicka |
| title_fullStr | Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering E. L. Haase and J. Ruzicka |
| title_full_unstemmed | Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering E. L. Haase and J. Ruzicka |
| title_short | Improvements in the properties of NbN layers through the presence of small amounts of aluminum during sputtering |
| title_sort | improvements in the properties of nbn layers through the presence of small amounts of aluminum during sputtering |
| work_keys_str_mv | AT haaseernstl improvementsinthepropertiesofnbnlayersthroughthepresenceofsmallamountsofaluminumduringsputtering AT ruzickaj improvementsinthepropertiesofnbnlayersthroughthepresenceofsmallamountsofaluminumduringsputtering |