Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Thesis Book |
| Language: | German |
| Published: |
Karlsruhe
Kernforschungszentrum
1991
|
| Edition: | Als Ms. gedr. |
| Subjects: | |
| Physical Description: | 64 S. Ill., graph. Darst. |
Staff View
MARC
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| 245 | 1 | 0 | |a Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik |c C. Burbaum ; J. Mohr |
| 250 | |a Als Ms. gedr. | ||
| 264 | 1 | |a Karlsruhe |b Kernforschungszentrum |c 1991 | |
| 300 | |a 64 S. |b Ill., graph. Darst. | ||
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| 502 | |a Zugl.: Karlsruhe, Univ., Diss., 1991 | ||
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Record in the Search Index
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| author | Burbaum, Christoph Mohr, Jürgen |
| author_facet | Burbaum, Christoph Mohr, Jürgen |
| author_role | aut aut |
| author_sort | Burbaum, Christoph |
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| building | Verbundindex |
| bvnumber | BV024513614 |
| ctrlnum | (OCoLC)75204717 (DE-599)BVBBV024513614 |
| edition | Als Ms. gedr. |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV024513614 |
| illustrated | Illustrated |
| indexdate | 2024-07-20T05:48:13Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018487791 |
| oclc_num | 75204717 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | 64 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Kernforschungszentrum |
| record_format | marc |
| spelling | Burbaum, Christoph Verfasser aut Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik C. Burbaum ; J. Mohr Als Ms. gedr. Karlsruhe Kernforschungszentrum 1991 64 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zugl.: Karlsruhe, Univ., Diss., 1991 Beschleunigungssensor (DE-588)4144872-8 gnd rswk-swf Herstellung (DE-588)4159653-5 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Röntgenlithografie (DE-588)4178314-1 gnd rswk-swf LIGA-Verfahren (DE-588)4274347-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content LIGA-Verfahren (DE-588)4274347-3 s Beschleunigungssensor (DE-588)4144872-8 s Herstellung (DE-588)4159653-5 s 1\p DE-604 Röntgenlithografie (DE-588)4178314-1 s 2\p DE-604 Mikromechanik (DE-588)4205811-9 s 3\p DE-604 Mohr, Jürgen Verfasser aut 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Burbaum, Christoph Mohr, Jürgen Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik Beschleunigungssensor (DE-588)4144872-8 gnd Herstellung (DE-588)4159653-5 gnd Mikromechanik (DE-588)4205811-9 gnd Röntgenlithografie (DE-588)4178314-1 gnd LIGA-Verfahren (DE-588)4274347-3 gnd |
| subject_GND | (DE-588)4144872-8 (DE-588)4159653-5 (DE-588)4205811-9 (DE-588)4178314-1 (DE-588)4274347-3 (DE-588)4113937-9 |
| title | Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik |
| title_auth | Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik |
| title_exact_search | Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik |
| title_full | Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik C. Burbaum ; J. Mohr |
| title_fullStr | Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik C. Burbaum ; J. Mohr |
| title_full_unstemmed | Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik C. Burbaum ; J. Mohr |
| title_short | Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik |
| title_sort | herstellung von mikromechanischen beschleunigungssensoren in liga technik |
| topic | Beschleunigungssensor (DE-588)4144872-8 gnd Herstellung (DE-588)4159653-5 gnd Mikromechanik (DE-588)4205811-9 gnd Röntgenlithografie (DE-588)4178314-1 gnd LIGA-Verfahren (DE-588)4274347-3 gnd |
| topic_facet | Beschleunigungssensor Herstellung Mikromechanik Röntgenlithografie LIGA-Verfahren Hochschulschrift |
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