Symposium: held April 24 - 27, 2000, San Francisco, California, USA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2001
|
| Schriftenreihe: | Materials Research Society symposium proceedings
610 |
| Schlagworte: | |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
| ISBN: | 1558995188 |
Internformat
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Datensatz im Suchindex
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| author_sort | Symposium on Si Front End Processing - Physics and Technology of Dopant Defect Interactions San Francisco, Calif |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T22:00:39Z |
| institution | BVB |
| institution_GND | (DE-588)10030329-8 |
| isbn | 1558995188 |
| language | English |
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| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Symposium on Si Front End Processing - Physics and Technology of Dopant Defect Interactions 2 2000 San Francisco, Calif. Verfasser (DE-588)10030329-8 aut Symposium held April 24 - 27, 2000, San Francisco, California, USA [Symposium Si Front End Processing - Physics and Technology of Dopant Defect Interactions] ; ed.: Aditya Agarwal ... Warrendale, Pa. Materials Research Soc. 2001 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 610 : Si front end processing - physics and technology of dopant defect interactions 2 Materials Research Society symposium proceedings 610 (DE-588)1071861417 Konferenzschrift gnd-content Agarwal, Aditya edt Materials Research Society symposium proceedings Si front end processing - physics and technology of dopant defect interactions 2 (DE-604)BV024487580 2 Materials Research Society symposium proceedings 610 (DE-604)BV001899105 610 |
| spellingShingle | Symposium held April 24 - 27, 2000, San Francisco, California, USA Materials Research Society symposium proceedings |
| subject_GND | (DE-588)1071861417 |
| title | Symposium held April 24 - 27, 2000, San Francisco, California, USA |
| title_auth | Symposium held April 24 - 27, 2000, San Francisco, California, USA |
| title_exact_search | Symposium held April 24 - 27, 2000, San Francisco, California, USA |
| title_full | Symposium held April 24 - 27, 2000, San Francisco, California, USA [Symposium Si Front End Processing - Physics and Technology of Dopant Defect Interactions] ; ed.: Aditya Agarwal ... |
| title_fullStr | Symposium held April 24 - 27, 2000, San Francisco, California, USA [Symposium Si Front End Processing - Physics and Technology of Dopant Defect Interactions] ; ed.: Aditya Agarwal ... |
| title_full_unstemmed | Symposium held April 24 - 27, 2000, San Francisco, California, USA [Symposium Si Front End Processing - Physics and Technology of Dopant Defect Interactions] ; ed.: Aditya Agarwal ... |
| title_short | Symposium |
| title_sort | symposium held april 24 27 2000 san francisco california usa |
| title_sub | held April 24 - 27, 2000, San Francisco, California, USA |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV024487580 (DE-604)BV001899105 |
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