Gate dielectric integrity : material process, and tool qualification:
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
West Conshohocken, Pa.
ASTM
2000
|
| Series: | STP / ASTM
1382 |
| Subjects: | |
| Physical Description: | XI, 169 S. Ill., graph. Darst. |
| ISBN: | 0803126158 |
Staff View
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Record in the Search Index
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|---|---|
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre_facet | Konferenzschrift |
| id | DE-604.BV024457099 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:59:59Z |
| institution | BVB |
| isbn | 0803126158 |
| language | English |
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| physical | XI, 169 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | ASTM |
| record_format | marc |
| series2 | STP / ASTM |
| spelling | Gate dielectric integrity : material process, and tool qualification Dinesh C. Gupta ... ed. West Conshohocken, Pa. ASTM 2000 XI, 169 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier STP / ASTM 1382 (DE-588)1071861417 Konferenzschrift gnd-content Gupta, Dinesh C. edt ASTM STP 1382 (DE-604)BV035417629 1382 |
| spellingShingle | Gate dielectric integrity : material process, and tool qualification |
| subject_GND | (DE-588)1071861417 |
| title | Gate dielectric integrity : material process, and tool qualification |
| title_auth | Gate dielectric integrity : material process, and tool qualification |
| title_exact_search | Gate dielectric integrity : material process, and tool qualification |
| title_full | Gate dielectric integrity : material process, and tool qualification Dinesh C. Gupta ... ed. |
| title_fullStr | Gate dielectric integrity : material process, and tool qualification Dinesh C. Gupta ... ed. |
| title_full_unstemmed | Gate dielectric integrity : material process, and tool qualification Dinesh C. Gupta ... ed. |
| title_short | Gate dielectric integrity : material process, and tool qualification |
| title_sort | gate dielectric integrity material process and tool qualification |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV035417629 |
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