APA-Zitierstil (7. Ausg.)

Jaeger, R. C. (1993). Introduction to microelectronic fabrication (Repr. with corr.). Addison-Wesley.

Chicago-Zitierstil (17. Ausg.)

Jaeger, Richard C. Introduction to Microelectronic Fabrication. Repr. with corr. Reading, Mass. <<[u.a.]>>: Addison-Wesley, 1993.

MLA-Zitierstil (9. Ausg.)

Jaeger, Richard C. Introduction to Microelectronic Fabrication. Repr. with corr. Addison-Wesley, 1993.