Metallization: performance and reliability issues for VLSI and ULSI: 12 - 13 September 1991, San Jose, California
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
1991
|
| Schriftenreihe: | Proceedings / SPIE
1596 |
| Schlagworte: | |
| Beschreibung: | VII, 159 S. Ill., graph. Darst. |
| ISBN: | 0819407275 |
Internformat
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift 1991 San Jose Calif. |
| id | DE-604.BV024375891 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:18Z |
| institution | BVB |
| isbn | 0819407275 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018356077 |
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| physical | VII, 159 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
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| series2 | Proceedings / SPIE |
| spelling | Metallization: performance and reliability issues for VLSI and ULSI 12 - 13 September 1991, San Jose, California Gennady S. Gildenblat ... chairs/ed. Bellingham, Wash. 1991 VII, 159 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings / SPIE 1596 Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Metallisieren (DE-588)4169599-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 San Jose Calif. gnd-content Metallisieren (DE-588)4169599-9 s Halbleitertechnologie (DE-588)4158814-9 s DE-604 Gildenblat, Gennady S. edt SPIE Proceedings 1596 (DE-604)BV000010887 1596 |
| spellingShingle | Metallization: performance and reliability issues for VLSI and ULSI 12 - 13 September 1991, San Jose, California Halbleitertechnologie (DE-588)4158814-9 gnd Metallisieren (DE-588)4169599-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4169599-9 (DE-588)1071861417 |
| title | Metallization: performance and reliability issues for VLSI and ULSI 12 - 13 September 1991, San Jose, California |
| title_auth | Metallization: performance and reliability issues for VLSI and ULSI 12 - 13 September 1991, San Jose, California |
| title_exact_search | Metallization: performance and reliability issues for VLSI and ULSI 12 - 13 September 1991, San Jose, California |
| title_full | Metallization: performance and reliability issues for VLSI and ULSI 12 - 13 September 1991, San Jose, California Gennady S. Gildenblat ... chairs/ed. |
| title_fullStr | Metallization: performance and reliability issues for VLSI and ULSI 12 - 13 September 1991, San Jose, California Gennady S. Gildenblat ... chairs/ed. |
| title_full_unstemmed | Metallization: performance and reliability issues for VLSI and ULSI 12 - 13 September 1991, San Jose, California Gennady S. Gildenblat ... chairs/ed. |
| title_short | Metallization: performance and reliability issues for VLSI and ULSI |
| title_sort | metallization performance and reliability issues for vlsi and ulsi 12 13 september 1991 san jose california |
| title_sub | 12 - 13 September 1991, San Jose, California |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd Metallisieren (DE-588)4169599-9 gnd |
| topic_facet | Halbleitertechnologie Metallisieren Konferenzschrift 1991 San Jose Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT gildenblatgennadys metallizationperformanceandreliabilityissuesforvlsiandulsi1213september1991sanjosecalifornia |