LIGA and its applications:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH-Verl.
2009
|
| Schriftenreihe: | Advanced micro & nanosystems
7 |
| Schlagworte: | |
| Online-Zugang: | Inhaltstext Inhaltsverzeichnis |
| Beschreibung: | X, 479 S. Ill., graph. Darst. 25 cm |
| ISBN: | 9783527316984 3527316981 |
Internformat
MARC
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| 490 | 1 | |a Advanced micro & nanosystems |v 7 | |
| 650 | 4 | |a Microelectromechanical systems | |
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Datensatz im Suchindex
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| adam_text |
Titel: LIGA and its applications
Autor: Saile, Volker
Jahr: 2009
I V
Contents
List of Contributors VII
1 Introduction: LICA and Its Applications 1
Volker Saile
2 X-ray Masks for LICA Microfabrication 11
Yohannes Desta andjost Coettert
3 Innovative Exposure Techniques for 3D Microfabrication 51
Naoki Matsuzuka and Osamu Tabata
4 Hot Embossing of LICA Microstructures 69
Mathias Heckele and Matthias Worgull
5 Exposure and Development Simulation for Deep X-ray LIGA 103
Jan C. Korvink, Sadik Hafizovic, Yoshikazu Hirai, and Pascal Meyer
6 Design for LICA and Safe Manufacturing 143
Ulrich Gengenbach, Ingo Sieber, and Ulrike Wallrabe
7 Commercialization of LIGA 189
Ron A. Lawes
8 Polymer Optics and Optical MEMS 205
Jiirgen Mohr
9 Refractive X-ray Lenses Produced by X-ray Lithography 233
Arndt Last
10 RF Applications 243
Sven Achenbach and David M. Klymyshyn
11 Evolution of the Microspectrometer 281
Reiner Wechsung, Sven Schonfelder, and Andreas Decker
VI Contents
12 Actuator Manufacture with LICA Processes 297
Todd Christenson
13 Development of Microfluidic Devices Created via the LICA Process 323
Masaya Kurokawa
14 Application of Inspection Devices 337
Yoshihiro Hirata
15 The Micro Harmonic Drive Gear 351
Reinhard Degen and RolfSlatter
16 Microinjection Molding Machines 395
Christian Cornik
17 Filled Resist Systems 415
Thomas Hanemann, Claas Muller, and Michael Schulz
18 Dramatic Downsizing of Soft X-ray Synchrotron Light Source from
Compact to Tabletop 443
Hironari Yamada, Norio Toyosugi, Dorian Minkov, and Yoshiko Okazaki
19 PTFE Photo-fabrication by Synchrotron Radiation 453
Takanori Katoh and Yanping Zhang
Index 469 |
| any_adam_object | 1 |
| author2 | Saile, Volker |
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| building | Verbundindex |
| bvnumber | BV023805481 |
| callnumber-first | T - Technology |
| callnumber-label | TK7875 |
| callnumber-raw | TK7875 |
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| callnumber-sort | TK 47875 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 3750 |
| ctrlnum | (OCoLC)294998391 (DE-599)BVBBV023805481 |
| dewey-full | 621 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621 621.381 |
| dewey-search | 621 621.381 |
| dewey-sort | 3621 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| isbn | 9783527316984 3527316981 |
| language | English |
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| physical | X, 479 S. Ill., graph. Darst. 25 cm |
| publishDate | 2009 |
| publishDateSearch | 2009 |
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| publisher | Wiley-VCH-Verl. |
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| series | Advanced micro & nanosystems |
| series2 | Advanced micro & nanosystems |
| spelling | LIGA and its applications ed. by Volker Saile ... Weinheim Wiley-VCH-Verl. 2009 X, 479 S. Ill., graph. Darst. 25 cm txt rdacontent n rdamedia nc rdacarrier Advanced micro & nanosystems 7 Microelectromechanical systems Microtechnology LIGA-Verfahren (DE-588)4274347-3 gnd rswk-swf LIGA-Verfahren (DE-588)4274347-3 s DE-604 Saile, Volker (DE-588)109547268 edt Advanced micro & nanosystems 7 (DE-604)BV019371555 7 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=2973542&prov=M&dok_var=1&dok_ext=htm Inhaltstext HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=017447656&sequence=000004&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | LIGA and its applications Advanced micro & nanosystems Microelectromechanical systems Microtechnology LIGA-Verfahren (DE-588)4274347-3 gnd |
| subject_GND | (DE-588)4274347-3 |
| title | LIGA and its applications |
| title_auth | LIGA and its applications |
| title_exact_search | LIGA and its applications |
| title_full | LIGA and its applications ed. by Volker Saile ... |
| title_fullStr | LIGA and its applications ed. by Volker Saile ... |
| title_full_unstemmed | LIGA and its applications ed. by Volker Saile ... |
| title_short | LIGA and its applications |
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| topic | Microelectromechanical systems Microtechnology LIGA-Verfahren (DE-588)4274347-3 gnd |
| topic_facet | Microelectromechanical systems Microtechnology LIGA-Verfahren |
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