Microsystems metrology and inspection: 15 - 16 June 1999, Munich, Germany
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| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE Optical Engineering Pr.
1999
|
| Series: | EUROOPTO series
3825 |
| Subjects: | |
| Physical Description: | V, 186 S. graph. Darst. |
| ISBN: | 081943311X |
Staff View
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| illustrated | Illustrated |
| indexdate | 2024-07-09T21:32:44Z |
| institution | BVB |
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| isbn | 081943311X |
| language | English |
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| physical | V, 186 S. graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | SPIE Optical Engineering Pr. |
| record_format | marc |
| series | EUROOPTO series |
| series2 | EUROOPTO series SPIE proceedings series |
| spelling | Microsystems metrology and inspection 15 - 16 June 1999, Munich, Germany sponsored by EOS, European Optical Society ... Christophe Gorecki, chair/ed. Bellingham, Wash. SPIE Optical Engineering Pr. 1999 V, 186 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier EUROOPTO series SPIE proceedings series 3825 Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Metrologie (DE-588)4169749-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikrosystemtechnik (DE-588)4221617-5 s DE-604 Metrologie (DE-588)4169749-2 s Gorecki, Christophe Sonstige oth European Optical Society Sonstige (DE-588)5039453-8 oth Conference on Microsystems Metrology and Inspection 1999 München Sonstige (DE-588)5350146-9 oth EUROOPTO series 3825 (DE-604)BV000010887 3825 |
| spellingShingle | Microsystems metrology and inspection 15 - 16 June 1999, Munich, Germany EUROOPTO series Mikrosystemtechnik (DE-588)4221617-5 gnd Metrologie (DE-588)4169749-2 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4169749-2 (DE-588)1071861417 |
| title | Microsystems metrology and inspection 15 - 16 June 1999, Munich, Germany |
| title_auth | Microsystems metrology and inspection 15 - 16 June 1999, Munich, Germany |
| title_exact_search | Microsystems metrology and inspection 15 - 16 June 1999, Munich, Germany |
| title_full | Microsystems metrology and inspection 15 - 16 June 1999, Munich, Germany sponsored by EOS, European Optical Society ... Christophe Gorecki, chair/ed. |
| title_fullStr | Microsystems metrology and inspection 15 - 16 June 1999, Munich, Germany sponsored by EOS, European Optical Society ... Christophe Gorecki, chair/ed. |
| title_full_unstemmed | Microsystems metrology and inspection 15 - 16 June 1999, Munich, Germany sponsored by EOS, European Optical Society ... Christophe Gorecki, chair/ed. |
| title_short | Microsystems metrology and inspection |
| title_sort | microsystems metrology and inspection 15 16 june 1999 munich germany |
| title_sub | 15 - 16 June 1999, Munich, Germany |
| topic | Mikrosystemtechnik (DE-588)4221617-5 gnd Metrologie (DE-588)4169749-2 gnd |
| topic_facet | Mikrosystemtechnik Metrologie Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
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