Handbook of thin film process technology:
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Bibliographic Details
Other Authors: Glocker, David A. (Editor)
Format: Book
Language:Undetermined
Published: Bristol ; Philadelphia, Pa. Institute of Physics Publ. 1995
Subjects:
Physical Description:Losebl.-Ausg. Ill., graph. Darst.
ISBN:0750303115

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!