Micro electro mechanical systems: the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems 11. Micro electro mechanical systems : the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems ; MEMS 98 ; january 25 - 29, 1998, Heidelberg
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Heidelberg
IEEE
1998
|
| Schriftenreihe: | Proceedings
Proceedings |
| Beschreibung: | XXX, 666 S. Ill. |
| ISBN: | 078034412X |
Internformat
MARC
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Datensatz im Suchindex
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| id | DE-604.BV023685762 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:33:42Z |
| institution | BVB |
| isbn | 078034412X |
| language | Undetermined |
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| physical | XXX, 666 S. Ill. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | IEEE |
| record_format | marc |
| series2 | Proceedings |
| spelling | Micro electro mechanical systems the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems 11. Micro electro mechanical systems : the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems ; MEMS 98 ; january 25 - 29, 1998, Heidelberg Inst. of Electrical and Electronics Engineers Heidelberg IEEE 1998 XXX, 666 S. Ill. txt rdacontent n rdamedia nc rdacarrier Proceedings (DE-604)BV023670934 11 |
| spellingShingle | Micro electro mechanical systems the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems |
| title | Micro electro mechanical systems the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems |
| title_auth | Micro electro mechanical systems the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems |
| title_exact_search | Micro electro mechanical systems the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems |
| title_full | Micro electro mechanical systems the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems 11. Micro electro mechanical systems : the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems ; MEMS 98 ; january 25 - 29, 1998, Heidelberg Inst. of Electrical and Electronics Engineers |
| title_fullStr | Micro electro mechanical systems the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems 11. Micro electro mechanical systems : the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems ; MEMS 98 ; january 25 - 29, 1998, Heidelberg Inst. of Electrical and Electronics Engineers |
| title_full_unstemmed | Micro electro mechanical systems the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems 11. Micro electro mechanical systems : the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems ; MEMS 98 ; january 25 - 29, 1998, Heidelberg Inst. of Electrical and Electronics Engineers |
| title_short | Micro electro mechanical systems |
| title_sort | micro electro mechanical systems the annual international workshop on micro electro mechanical systems an investigation of micro structures sensors actuators machines and systems micro electro mechanical systems the annual international workshop on micro electro mechanical systems an investigation of micro structures sensors actuators machines and systems mems 98 january 25 29 1998 heidelberg |
| title_sub | the ... annual international workshop on micro electro mechanical systems ; an investigation of micro structures, sensors, actuators, machines and systems |
| volume_link | (DE-604)BV023670934 |