3-dimensional process simulation:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Wien [u.a.]
Springer
1995
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VIII, 196 S. Ill., graph. Darst. |
| ISBN: | 3211827412 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV023401633 | ||
| 003 | DE-604 | ||
| 005 | 20080730 | ||
| 007 | t | ||
| 008 | 080717s1995 ad|| |||| 10||| eng d | ||
| 020 | |a 3211827412 |9 3-211-82741-2 | ||
| 035 | |a (OCoLC)33839647 | ||
| 035 | |a (DE-599)BVBBV023401633 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-29T |a DE-83 | ||
| 050 | 0 | |a TS156.8 | |
| 084 | |a ST 340 |0 (DE-625)143665: |2 rvk | ||
| 245 | 1 | 0 | |a 3-dimensional process simulation |c J. Lorenz (ed.) |
| 246 | 1 | 3 | |a Three-dimensional process simulation |
| 264 | 1 | |a Wien [u.a.] |b Springer |c 1995 | |
| 300 | |a VIII, 196 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Process control |x Computer simulation | |
| 650 | 0 | 7 | |a Prozesssimulation |0 (DE-588)4176077-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dreidimensionale Bearbeitung |0 (DE-588)4390696-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Prozesssimulation |0 (DE-588)4176077-3 |D s |
| 689 | 0 | 1 | |a Dreidimensionale Bearbeitung |0 (DE-588)4390696-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Lorenz, Jürgen |e Sonstige |4 oth | |
| 856 | 4 | 2 | |m OEBV Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016584409&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-016584409 | ||
Datensatz im Suchindex
| _version_ | 1804137784736219136 |
|---|---|
| adam_text | IMAGE 1
TABLE OF CONTENTS
THREE-DIMENSIONAL TOPOGRAPHY SIMULATOR: 3D-MULSS AND ITS APPLICATIONS .
1 M. FUJINAGA AND N. KOTANI
ULSI LABORATORY, MITSUBISHI ELECTRIC CORPORATION, HYOGO 664, JAPAN
A THREE-DIMENSIONAL PROCESS SIMULATION USING ADVANCED SMART-P PROGRAM 30
H. UMIMOTO, S. ODANAKA, AND A. GOHDA SEMICONDUCTOR RESEARCH CENTER,
MATSUSHITA ELECTRIC INDUSTRIAL CO., OSAKA 570, JAPAN
3-D TOPOGRAPHY SIMULATION USING SURFACE REPRESENTATION AND CENTRAL
UTILITIES 57 A. R. NEUREUTHER, R. H. WANG, J. J. HELMSEN, J. F. SEFLER,
E. W. SCHECKLER, R. GUNTURI, AND R. WINTERBOTTOM DEPT. OF ELECTRICAL
ENGINEERING AND COMPUTER SCIENCES, UC BERKELEY, USA
THREE-DIMENSIONAL SIMULATION OF THERMAL PROCESSES 77
M. E. LAW AND S. CEA DEPT. OF ELECTRICAL ENGINEERING, UNIVERSITY OF
FLORIDA, GAINESVILLE, USA
3D PROCESS SIMULATION AT IEMN/ISEN 95
B. BACCUS, S. BOZEK, V. SENEZ, AND Z. Z. WANG IEMN DEPARTMENT ISEN,
LILLE CEDEX, FRANCE
3D SIMULATION OF TOPOGRAPHY AND DOPING PROCESSES AT FHG 109
J. LORENZ A, E. BARA, A. BOURENKOVA, W. HENKEB, K. TIETZELA, AND M.
WEISSB A FRAUNHOFER-INSTITUT FUER INTEGRIERTE SCHALTUNGEN, ERLANGEN,
GERMANY
BFRAUNHOFER-INSTITUT FUER SILICIUMTECHNOLOGIE, ITZEHOE, GERMANY
3D TCAD AT TU VIENNA 136
E. LEITNER, W. BOHMAYR, P. FLEISCHMANN, E. STRASSER, AND S. SELBERHERR
INSTITUTE FOR MICROELECTRONICS, TU VIENNA, AUSTRIA
MULTI-DIMENSIONAL TCAD: THE PROMPT/DESSIS APPROACH 162
M. WESTERMANN A, T. FEUDELH, N. STRECKERB, S. GAPPISCHB, A. HOEFLERB, AND
W. FICHTNERA B A I SE INTEGRATED SYSTEMS ENGINEERING AG, ZURICH,
SWITZERLAND
BSWISS FEDERAL INSTITUTE OF TECHNOLOGY, INTEGRATED SYSTEMS LABORATORY,
ZUERICH, SWITZERLAND
IMAGE 2
3D PROCESS SIMULATION REQUIREMENTS AND TRADEOFFS FROM INDUSTRIAL
PERSPECTIVE 178
M. ORLOWSKI ADVANCED PRODUCTS AND DEVELOPMENT LABORATORY, MOTOROLA INC.,
AUSTIN, TEXAS, USA
AUTHOR INDEX 196
|
| adam_txt |
IMAGE 1
TABLE OF CONTENTS
THREE-DIMENSIONAL TOPOGRAPHY SIMULATOR: 3D-MULSS AND ITS APPLICATIONS .
1 M. FUJINAGA AND N. KOTANI
ULSI LABORATORY, MITSUBISHI ELECTRIC CORPORATION, HYOGO 664, JAPAN
A THREE-DIMENSIONAL PROCESS SIMULATION USING ADVANCED SMART-P PROGRAM 30
H. UMIMOTO, S. ODANAKA, AND A. GOHDA SEMICONDUCTOR RESEARCH CENTER,
MATSUSHITA ELECTRIC INDUSTRIAL CO., OSAKA 570, JAPAN
3-D TOPOGRAPHY SIMULATION USING SURFACE REPRESENTATION AND CENTRAL
UTILITIES 57 A. R. NEUREUTHER, R. H. WANG, J. J. HELMSEN, J. F. SEFLER,
E. W. SCHECKLER, R. GUNTURI, AND R. WINTERBOTTOM DEPT. OF ELECTRICAL
ENGINEERING AND COMPUTER SCIENCES, UC BERKELEY, USA
THREE-DIMENSIONAL SIMULATION OF THERMAL PROCESSES 77
M. E. LAW AND S. CEA DEPT. OF ELECTRICAL ENGINEERING, UNIVERSITY OF
FLORIDA, GAINESVILLE, USA
3D PROCESS SIMULATION AT IEMN/ISEN 95
B. BACCUS, S. BOZEK, V. SENEZ, AND Z. Z. WANG IEMN DEPARTMENT ISEN,
LILLE CEDEX, FRANCE
3D SIMULATION OF TOPOGRAPHY AND DOPING PROCESSES AT FHG 109
J. LORENZ A, E. BARA, A. BOURENKOVA, W. HENKEB, K. TIETZELA, AND M.
WEISSB A FRAUNHOFER-INSTITUT FUER INTEGRIERTE SCHALTUNGEN, ERLANGEN,
GERMANY
BFRAUNHOFER-INSTITUT FUER SILICIUMTECHNOLOGIE, ITZEHOE, GERMANY
3D TCAD AT TU VIENNA 136
E. LEITNER, W. BOHMAYR, P. FLEISCHMANN, E. STRASSER, AND S. SELBERHERR
INSTITUTE FOR MICROELECTRONICS, TU VIENNA, AUSTRIA
MULTI-DIMENSIONAL TCAD: THE PROMPT/DESSIS APPROACH 162
M. WESTERMANN A, T. FEUDELH, N. STRECKERB, S. GAPPISCHB, A. HOEFLERB, AND
W. FICHTNERA'B A I SE INTEGRATED SYSTEMS ENGINEERING AG, ZURICH,
SWITZERLAND
BSWISS FEDERAL INSTITUTE OF TECHNOLOGY, INTEGRATED SYSTEMS LABORATORY,
ZUERICH, SWITZERLAND
IMAGE 2
3D PROCESS SIMULATION REQUIREMENTS AND TRADEOFFS FROM INDUSTRIAL
PERSPECTIVE 178
M. ORLOWSKI ADVANCED PRODUCTS AND DEVELOPMENT LABORATORY, MOTOROLA INC.,
AUSTIN, TEXAS, USA
AUTHOR INDEX 196 |
| any_adam_object | 1 |
| any_adam_object_boolean | 1 |
| building | Verbundindex |
| bvnumber | BV023401633 |
| callnumber-first | T - Technology |
| callnumber-label | TS156 |
| callnumber-raw | TS156.8 |
| callnumber-search | TS156.8 |
| callnumber-sort | TS 3156.8 |
| callnumber-subject | TS - Manufactures |
| classification_rvk | ST 340 |
| ctrlnum | (OCoLC)33839647 (DE-599)BVBBV023401633 |
| discipline | Informatik |
| discipline_str_mv | Informatik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01558nam a2200397 c 4500</leader><controlfield tag="001">BV023401633</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20080730 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">080717s1995 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3211827412</subfield><subfield code="9">3-211-82741-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)33839647</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV023401633</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TS156.8</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ST 340</subfield><subfield code="0">(DE-625)143665:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">3-dimensional process simulation</subfield><subfield code="c">J. Lorenz (ed.)</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Three-dimensional process simulation</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Wien [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VIII, 196 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Process control</subfield><subfield code="x">Computer simulation</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Prozesssimulation</subfield><subfield code="0">(DE-588)4176077-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dreidimensionale Bearbeitung</subfield><subfield code="0">(DE-588)4390696-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Prozesssimulation</subfield><subfield code="0">(DE-588)4176077-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Dreidimensionale Bearbeitung</subfield><subfield code="0">(DE-588)4390696-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Lorenz, Jürgen</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">OEBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016584409&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-016584409</subfield></datafield></record></collection> |
| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Aufsatzsammlung Konferenzschrift |
| id | DE-604.BV023401633 |
| illustrated | Illustrated |
| index_date | 2024-07-02T21:23:58Z |
| indexdate | 2024-07-09T21:17:48Z |
| institution | BVB |
| isbn | 3211827412 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016584409 |
| oclc_num | 33839647 |
| open_access_boolean | |
| owner | DE-29T DE-83 |
| owner_facet | DE-29T DE-83 |
| physical | VIII, 196 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Springer |
| record_format | marc |
| spelling | 3-dimensional process simulation J. Lorenz (ed.) Three-dimensional process simulation Wien [u.a.] Springer 1995 VIII, 196 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Process control Computer simulation Prozesssimulation (DE-588)4176077-3 gnd rswk-swf Dreidimensionale Bearbeitung (DE-588)4390696-5 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content (DE-588)1071861417 Konferenzschrift gnd-content Prozesssimulation (DE-588)4176077-3 s Dreidimensionale Bearbeitung (DE-588)4390696-5 s DE-604 Lorenz, Jürgen Sonstige oth OEBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016584409&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | 3-dimensional process simulation Process control Computer simulation Prozesssimulation (DE-588)4176077-3 gnd Dreidimensionale Bearbeitung (DE-588)4390696-5 gnd |
| subject_GND | (DE-588)4176077-3 (DE-588)4390696-5 (DE-588)4143413-4 (DE-588)1071861417 |
| title | 3-dimensional process simulation |
| title_alt | Three-dimensional process simulation |
| title_auth | 3-dimensional process simulation |
| title_exact_search | 3-dimensional process simulation |
| title_exact_search_txtP | 3-dimensional process simulation |
| title_full | 3-dimensional process simulation J. Lorenz (ed.) |
| title_fullStr | 3-dimensional process simulation J. Lorenz (ed.) |
| title_full_unstemmed | 3-dimensional process simulation J. Lorenz (ed.) |
| title_short | 3-dimensional process simulation |
| title_sort | 3 dimensional process simulation |
| topic | Process control Computer simulation Prozesssimulation (DE-588)4176077-3 gnd Dreidimensionale Bearbeitung (DE-588)4390696-5 gnd |
| topic_facet | Process control Computer simulation Prozesssimulation Dreidimensionale Bearbeitung Aufsatzsammlung Konferenzschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016584409&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT lorenzjurgen 3dimensionalprocesssimulation AT lorenzjurgen threedimensionalprocesssimulation |