APA (7th ed.) Citation

Hsu, T. (2008). MEMS and microsystems: Design, manufacture, and nanoscale engineering (2. ed.). Wiley.

Chicago Style (17th ed.) Citation

Hsu, Tai-Ran. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering. 2. ed. Hoboken, NJ: Wiley, 2008.

MLA (9th ed.) Citation

Hsu, Tai-Ran. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering. 2. ed. Wiley, 2008.

Warning: These citations may not always be 100% accurate.