Hsu, T. (2008). MEMS and microsystems: Design, manufacture, and nanoscale engineering (2. ed.). Wiley.
Chicago Style (17th ed.) CitationHsu, Tai-Ran. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering. 2. ed. Hoboken, NJ: Wiley, 2008.
MLA (9th ed.) CitationHsu, Tai-Ran. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering. 2. ed. Wiley, 2008.
Warning: These citations may not always be 100% accurate.