Papers from the 20th International Vacuum Nanoelectronics Conference: 8 - 12 July 2007, Chicago, Illinois
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York, NY
American Inst. of Physics
2008
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| Series: | Journal of vacuum science & technology : B : an international journal devoted to microelectronics and nanometer structures
processing, measurement and phenomena 26,2 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | S. 688 - 900 Ill., graph. Darst. |
Staff View
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| index_date | 2024-07-02T20:47:55Z |
| indexdate | 2024-07-09T21:15:25Z |
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| language | English |
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| physical | S. 688 - 900 Ill., graph. Darst. |
| publishDate | 2008 |
| publishDateSearch | 2008 |
| publishDateSort | 2008 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology : B : an international journal devoted to microelectronics and nanometer structures |
| spelling | International Vacuum Nanoelectronics Conference 20 2007 Chicago, Ill. Verfasser (DE-588)10202798-5 aut Papers from the 20th International Vacuum Nanoelectronics Conference 8 - 12 July 2007, Chicago, Illinois Conference chair: Heinz Busta New York, NY American Inst. of Physics 2008 S. 688 - 900 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B : an international journal devoted to microelectronics and nanometer structures processing, measurement and phenomena 26,2 Einzelaufnahme eines Zeitschr.-Heftes Vakuum (DE-588)4062266-6 gnd rswk-swf Nanoelektronik (DE-588)4732034-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2007 Chicago Ill. gnd-content Nanoelektronik (DE-588)4732034-5 s Vakuum (DE-588)4062266-6 s DE-604 Busta, Heinz edt |
| spellingShingle | Papers from the 20th International Vacuum Nanoelectronics Conference 8 - 12 July 2007, Chicago, Illinois Vakuum (DE-588)4062266-6 gnd Nanoelektronik (DE-588)4732034-5 gnd |
| subject_GND | (DE-588)4062266-6 (DE-588)4732034-5 (DE-588)1071861417 |
| title | Papers from the 20th International Vacuum Nanoelectronics Conference 8 - 12 July 2007, Chicago, Illinois |
| title_auth | Papers from the 20th International Vacuum Nanoelectronics Conference 8 - 12 July 2007, Chicago, Illinois |
| title_exact_search | Papers from the 20th International Vacuum Nanoelectronics Conference 8 - 12 July 2007, Chicago, Illinois |
| title_exact_search_txtP | Papers from the 20th International Vacuum Nanoelectronics Conference 8 - 12 July 2007, Chicago, Illinois |
| title_full | Papers from the 20th International Vacuum Nanoelectronics Conference 8 - 12 July 2007, Chicago, Illinois Conference chair: Heinz Busta |
| title_fullStr | Papers from the 20th International Vacuum Nanoelectronics Conference 8 - 12 July 2007, Chicago, Illinois Conference chair: Heinz Busta |
| title_full_unstemmed | Papers from the 20th International Vacuum Nanoelectronics Conference 8 - 12 July 2007, Chicago, Illinois Conference chair: Heinz Busta |
| title_short | Papers from the 20th International Vacuum Nanoelectronics Conference |
| title_sort | papers from the 20th international vacuum nanoelectronics conference 8 12 july 2007 chicago illinois |
| title_sub | 8 - 12 July 2007, Chicago, Illinois |
| topic | Vakuum (DE-588)4062266-6 gnd Nanoelektronik (DE-588)4732034-5 gnd |
| topic_facet | Vakuum Nanoelektronik Konferenzschrift 2007 Chicago Ill. |
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