Handbook of plasma immersion ion implantation and deposition:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Weinheim
Wiley-VCH Verl.
2004
|
| Edition: | [Nachdr.] |
| Subjects: | |
| Physical Description: | XXIII, 736 S. Ill., graph. Darst. |
| ISBN: | 9780471246985 |
Staff View
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Record in the Search Index
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| discipline | Physik |
| discipline_str_mv | Physik |
| edition | [Nachdr.] |
| format | Book |
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| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV023185600 |
| illustrated | Illustrated |
| index_date | 2024-07-02T20:03:02Z |
| indexdate | 2024-07-09T21:12:33Z |
| institution | BVB |
| isbn | 9780471246985 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016372070 |
| oclc_num | 634942008 |
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| owner_facet | DE-19 DE-BY-UBM |
| physical | XXIII, 736 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Wiley-VCH Verl. |
| record_format | marc |
| spelling | Handbook of plasma immersion ion implantation and deposition ed. by André Anders [Nachdr.] Weinheim Wiley-VCH Verl. 2004 XXIII, 736 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Plasma-Immersions-Implantation (DE-588)4555810-3 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Plasma-Immersions-Implantation (DE-588)4555810-3 s DE-604 Anders, André Sonstige oth |
| spellingShingle | Handbook of plasma immersion ion implantation and deposition Plasma-Immersions-Implantation (DE-588)4555810-3 gnd |
| subject_GND | (DE-588)4555810-3 (DE-588)4143413-4 |
| title | Handbook of plasma immersion ion implantation and deposition |
| title_auth | Handbook of plasma immersion ion implantation and deposition |
| title_exact_search | Handbook of plasma immersion ion implantation and deposition |
| title_exact_search_txtP | Handbook of plasma immersion ion implantation and deposition |
| title_full | Handbook of plasma immersion ion implantation and deposition ed. by André Anders |
| title_fullStr | Handbook of plasma immersion ion implantation and deposition ed. by André Anders |
| title_full_unstemmed | Handbook of plasma immersion ion implantation and deposition ed. by André Anders |
| title_short | Handbook of plasma immersion ion implantation and deposition |
| title_sort | handbook of plasma immersion ion implantation and deposition |
| topic | Plasma-Immersions-Implantation (DE-588)4555810-3 gnd |
| topic_facet | Plasma-Immersions-Implantation Aufsatzsammlung |
| work_keys_str_mv | AT andersandre handbookofplasmaimmersionionimplantationanddeposition |