Fast simulation of electro-thermal MEMS: efficient dynamic compact models
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Bibliographic Details
Format: Electronic eBook
Language:English
Published: Berlin ; Heidelberg ; New York Springer 2007
Series:Microtechnology and MEMS
Subjects:
Online Access:BTU01
FHR01
Volltext
Physical Description:1 Online-Ressource (XI, 180 S.) Ill., graph. Darst.
ISBN:9783540346128
9783540346135
DOI:10.1007/978-3-540-34613-5

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