Nanofabrication: fundamentals and applications
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New Jersey [u.a.]
World Scientific
2008
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | VIII, 574 S. zahlr. Ill., graph. Darst. |
| ISBN: | 9789812700766 9812700765 9789812705426 9812705422 |
Staff View
MARC
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| 245 | 1 | 0 | |a Nanofabrication |b fundamentals and applications |c ed. Ampere A. Tseng |
| 264 | 1 | |a New Jersey [u.a.] |b World Scientific |c 2008 | |
| 300 | |a VIII, 574 S. |b zahlr. Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Nanostructures | |
| 650 | 7 | |a Biomolécules |2 ram | |
| 650 | 7 | |a Nanotechnologie |2 ram | |
| 650 | 7 | |a Systèmes microélectromécaniques |2 ram | |
| 650 | 4 | |a Lithography, Electron beam | |
| 650 | 4 | |a Nanostructured materials | |
| 650 | 4 | |a Nanostructures | |
| 650 | 4 | |a Scanning probe microscopy | |
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Record in the Search Index
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|---|---|
| adam_text | ihifr •ff-nter
__-Ä
! *r% i
X % ell
: _ ^i i jti
lofabrication
damentals and Applications
Editor
Ampere A Tseng
Arizona State University, USA
S World Scientific
NEW JERSEY • LONDON • SINGAPORE • BEIJING • SHANGHAI HONG KONG • TAIPEI • CHENNAI
CONTENTS
Preface vii
Chapter 1 Atom, Molecule, and Nanocluster Manipulations
for Nanostructure Fabrication Using Scanning
Probe Microscopy 1
A A Tseng, S D Sartale, M F Luo, and C C Kuo
Chapter 2 Atomic Force Microscope Lithography 33
/ / Kuwasegi, D W Lee, N Morita, and J W Park
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
Sensing, and Modification 65
C Santschi, J Polesel-Maris, J Brugger,
and H Heinzelmann
Chapter 4 Using Biomolecules for Self-Assembly of Engineered
Nano-Scale Structures and Devices 127
R Mehta, J Lund, and B A Parviz
Chapter 5 Nanofabrication Based on Self-Assembled
Alumina Templates 159
S Sen and N A Kouklin
Chapter 6 Nanowire Assembly and Integration 187
Z Gu and D H Gracias
V
VI
Contents
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
L Tong and E Mazur
Chapter 8 Extreme Ultraviolet Lithography 235
H Kinoshita
Chapter 9 Electron Projection Lithography 285
T Miura, K Suzuki, H Arimoto, and S Kawata
Chapter 10 Electron Beam Direct Writing 341
K Yamazaki
Chapter 11 Electron Beam Induced Depositior 377
K Mitsuishi
Chapter 12 High-Resolution Electron-Beam- i ■ ccrt -position 399
P A Crozier and C W Hagen
Chapter 13 Focused Ion Beams and Interaction with Solids 431
T Ishüani, T Ohnishi, and T Yaguchi
Chapter 14 Nano/Microstructuring of Ceramic Surfaces
by Unconventional Lithographic Methods 471
R C Salvarezza and 0 Azzaroni
Chapter 15 Alternative Nanofabrication Approaches
for Non-CMOS Applications 499
C V Cojocaru, F Cicoira, and F Rosei
Chapter 16 Nanofabrication of Nanoelectromechanical Systems
(NEMS): Emerging Techniques 543
K L Ekinci and J Brugger
Index
|
| adam_txt |
ihifr •ff-nter
_-Ä
\\! *r% i
X'% ell
: _ ^i i jti
lofabrication
damentals and Applications
Editor
Ampere A Tseng
Arizona State University, USA
\\S World Scientific
NEW JERSEY • LONDON • SINGAPORE • BEIJING • SHANGHAI HONG KONG • TAIPEI • CHENNAI
CONTENTS
Preface vii
Chapter 1 Atom, Molecule, and Nanocluster Manipulations
for Nanostructure Fabrication Using Scanning
Probe Microscopy 1
A A Tseng, S D Sartale, M F Luo, and C C Kuo
Chapter 2 Atomic Force Microscope Lithography 33
/'/ Kuwasegi, D W Lee, N Morita, and J W Park
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
Sensing, and Modification 65
C Santschi, J Polesel-Maris, J Brugger,
and H Heinzelmann
Chapter 4 Using Biomolecules for Self-Assembly of Engineered
Nano-Scale Structures and Devices 127
R Mehta, J Lund, and B A Parviz
Chapter 5 Nanofabrication Based on Self-Assembled
Alumina Templates 159
S Sen and N A Kouklin
Chapter 6 Nanowire Assembly and Integration 187
Z Gu and D H Gracias
V
VI
Contents
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
L Tong and E Mazur
Chapter 8 Extreme Ultraviolet Lithography 235
H Kinoshita
Chapter 9 Electron Projection Lithography 285
T Miura, K Suzuki, H Arimoto, and S Kawata
Chapter 10 Electron Beam Direct Writing 341
K Yamazaki
Chapter 11 Electron Beam Induced Depositior 377
K Mitsuishi
Chapter 12 High-Resolution Electron-Beam- i ■ ccrt ' -position 399
P A Crozier and C W Hagen
Chapter 13 Focused Ion Beams and Interaction with Solids 431
T Ishüani, T Ohnishi, and T Yaguchi
Chapter 14 Nano/Microstructuring of Ceramic Surfaces
by Unconventional Lithographic Methods 471
R C Salvarezza and 0 Azzaroni
Chapter 15 Alternative Nanofabrication Approaches
for Non-CMOS Applications 499
C V Cojocaru, F Cicoira, and F Rosei
Chapter 16 Nanofabrication of Nanoelectromechanical Systems
(NEMS): Emerging Techniques 543
K L Ekinci and J Brugger
Index |
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| callnumber-search | QC176.8.N35 TA418.9.N35 |
| callnumber-sort | QC 3176.8 N35 |
| callnumber-subject | QC - Physics |
| classification_rvk | ZN 3700 |
| ctrlnum | (OCoLC)173721197 (DE-599)BVBBV023108374 |
| dewey-full | 620.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.5 |
| dewey-search | 620.5 |
| dewey-sort | 3620.5 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| illustrated | Illustrated |
| index_date | 2024-07-02T19:47:25Z |
| indexdate | 2024-07-09T21:11:12Z |
| institution | BVB |
| isbn | 9789812700766 9812700765 9789812705426 9812705422 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016311015 |
| oclc_num | 173721197 |
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| owner_facet | DE-20 DE-526 DE-11 DE-83 DE-19 DE-BY-UBM |
| physical | VIII, 574 S. zahlr. Ill., graph. Darst. |
| publishDate | 2008 |
| publishDateSearch | 2008 |
| publishDateSort | 2008 |
| publisher | World Scientific |
| record_format | marc |
| spelling | Nanofabrication fundamentals and applications ed. Ampere A. Tseng New Jersey [u.a.] World Scientific 2008 VIII, 574 S. zahlr. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nanostructures Biomolécules ram Nanotechnologie ram Systèmes microélectromécaniques ram Lithography, Electron beam Nanostructured materials Scanning probe microscopy Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Tseng, Ampere A. Sonstige oth HEBIS Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016311015&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Nanofabrication fundamentals and applications Nanostructures Biomolécules ram Nanotechnologie ram Systèmes microélectromécaniques ram Lithography, Electron beam Nanostructured materials Scanning probe microscopy Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4327470-5 |
| title | Nanofabrication fundamentals and applications |
| title_auth | Nanofabrication fundamentals and applications |
| title_exact_search | Nanofabrication fundamentals and applications |
| title_exact_search_txtP | Nanofabrication fundamentals and applications |
| title_full | Nanofabrication fundamentals and applications ed. Ampere A. Tseng |
| title_fullStr | Nanofabrication fundamentals and applications ed. Ampere A. Tseng |
| title_full_unstemmed | Nanofabrication fundamentals and applications ed. Ampere A. Tseng |
| title_short | Nanofabrication |
| title_sort | nanofabrication fundamentals and applications |
| title_sub | fundamentals and applications |
| topic | Nanostructures Biomolécules ram Nanotechnologie ram Systèmes microélectromécaniques ram Lithography, Electron beam Nanostructured materials Scanning probe microscopy Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Nanostructures Biomolécules Nanotechnologie Systèmes microélectromécaniques Lithography, Electron beam Nanostructured materials Scanning probe microscopy |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016311015&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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