(2007). Fundamental principles of optical lithography: The science of microfabrication. Wiley.
Chicago Style (17th ed.) CitationFundamental Principles of Optical Lithography: The Science of Microfabrication. Chichester [u.a.]: Wiley, 2007.
MLA (9th ed.) CitationFundamental Principles of Optical Lithography: The Science of Microfabrication. Wiley, 2007.
Warning: These citations may not always be 100% accurate.