Precision manufacturing:
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| Main Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
New York
Springer
2008
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| Subjects: | |
| Online Access: | Inhaltstext Inhaltsverzeichnis |
| Physical Description: | XX, 775 S. Ill., graph. Darst. |
| ISBN: | 0387324674 9780387324678 |
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| adam_text | PRECISION MANUFACTURING DAVID DORNFELD UNIVERSITY OF CALIFORNIA AT
BERKELEY MECHANICAL ENGINEERING 6195 ETCHEVERRY HALL BERKELEY,
CALIFORNIA 94720 DAE-EUN LEE LAWRENCE BERKELEY NATIONAL LABORATORY
MECHANICAL ENGINEERING 1 CYCLOTRON ROAD BERKELEY, CALIFORNIA 94720 }
SPRIN GER TABLE OF CONTENTS PREFACE & ACKNOWLEDGEMENTS I. INTRODUCTION
TO PRECISION MANUFACTURING 1.1 PRECISION ENGINEERING 1.2 PRECISION
MANUFACTURING 1.3 COMPETITIVE DRIVERS OF PRECISION MANUFACTURING 1.4
HISTORICAL DEVELOPMENTS IN MANUFACTURING 1.4.1 BACKGROUND 1.4.2 KEY
DRIVERS 1.4.3 HISTORICAL EXAMPLES 1.5 ORGANIZATION OF THIS BOOK II.
MACHINE DESIGN FOR PRECISION MANUFACTURING 2.1 BACKGROUND ON MACHINE
DESIGN FOR MANUFACTURIN 2.2 PHILOSOPHY OF PRECISION MACHINE DESIGN 2.3
SOURCES OF ERROR - OVERVIEW HI. PRINCIPLES OF MEASUREMENT 3.1 DEFINITION
OF TERMS - ACCURACY, REPEATIBILITY, AND RESOLUTION 3.1.1 ACCURACY 3.1.2
REPEATABILITY (OR PRECISION) 3.1.3 RESOLUTION 3.1.4 PROBABILISTIC
MEASURE OF ACCURACY 3.2 METROLOGY AND MEASUREMENT VIA PRECISION
MANUFACTURING 3.3 ABBE S PRINCIPLE 64 3.4 METROLOGY TECHNIQUES 67 3.4.1
MEASUREMENT OF DIMENSION AND ANGLE 67 3.4.2 MEASUREMENT OF FORM 73
3.4.2.1 STRAIGHTNESS 73 3.4.2.2 FLATNESS 84 3.4.2.3 ROUNDNESS 88 3.4.2.4
OTHER FORM ERRORS 99 3.4.3 MEASUREMENT OF SURFACE ROUGHNESS 99 3.4.4
KINEMATIC PRECISION 110 3.5 SUBSURFACE DAMAGE 112 IV. MECHANICAL ERRORS
121 4.1 INTRODUCTION 121 4.2 ERRORS DUE TO MACHINE ELEMENTS (EXCLUDING
BEARINGS) 123 4.3 KINEMATIC DESIGN 128 4.3.1 CONNECTIVITY 128 4.3.2
KINEMATIC ELEMENTS 129 4.3.3 CONTACT AND COMPLEX SUPPORT 13 3 4.3.4
SUMMARY OF KINEMATIC DESIGN 142 4.4 STRUCTURAL COMPLIANCE 143 4.4.1
MICROSCALE COMPLIANCE 143 4.4.2 MACROSCALE COMPLIANCE 145 4.5 BEARINGS
AND SPINDLES 153 4.5.1 BEARINGS 153 4.5.2 AEROSTATIC BEARINGS AND
SPINDLES 163 V. THERMAL ERRORS 167 5.1 BACKGROUND ON THE THERMAL ERROR
PROBLEM 167 5.2 THERMAL EFFECTS IN PRECISION ENGINEERING 171 5.3
DETERMINING THE EFFECT OF TEMPERATURE OTHER THAN 20C 180 5.3.1 FREE AND
CONSTRAINED BODIES 181 5.3.2 EFFECT OF SPATIAL TEMPERATURE GRADIENTS 184
5.3.3 EFFECT OF TEMPERATURE TRANSIENTS: SOAK-OUT TIME AND SINUSOIDAL
RESPONSE 187 TABLE OF CONTENTS IX 5.4 CONDUCTIVE, CONVECTIVE, AND
RADIATIVE HEAT TRANSFER PARAMETERS 193 5.5 SPECIFIC HEAT SOURCES AND
EXAMPLES OF THERMAL PROBLEMS 196 5.6 ENVIRONMENTAL CONTROL OF PRECISION
MACHINERY 202 5.6.1 MACHINE ENCLOSURES 203 5.6.2 FACTORY AND ROOM
ENCLOSURES 204 5.6.3 MACHINE TREATMENT WITHOUT ENCLOSURES 206 5.7
THERMAL EFFECTS AND METROLOGY 208 5.8 OBSERVATIONS 215 VI. ERROR MAPPING
AND ERROR BUDGETS 217 6.1 INTRODUCTION 217 6.2 ERROR MAPPING 218 6.3
ERROR BUDGET 232 6.3.1 DEFINITION OF ERROR BUDGET 232 6.3.2 ERROR BUDGET
FLOW CHART 233 6.3.3 COMBINATIONAL RULES FOR ERRORS 234 VII. ERROR DUE
TO COMPLIANCE AND VIBRATION 239 7.1 INTRODUCTION 239 7.2 EXCITATIONS IN
MACHINE TOOLS 243 7.3 WEIGHT DEFORMATION 246 7.4 CUTTING FORCE
DEFORMATION 249 7.4.1 TYPE A DEFORMATION: DEFORMATION DUE TO THE
VARIATION OF THE CUTTING FORCE 250 7.4.1.1 INTRODUCTION AND BACKGROUND
250 7.4.1.2 EXAMPLES FOR SINGLE EDGE CUTTING 254 7.4.1.3 MACHINE
STIFFNESS AND DIRECTIONAL ORIENTATION 256 7.4.2 TYPE * DEFORMATION:
DEFORMATION DUE TO THE VARIATION OF THE STIFFNESS ALONG THE TOOL PATH
263 7.4.3 COMPARISON OF THE ERRORS FROM DEFORMATION TYPES A AND * 267
7.5 FORCED VIBRATIONS 272 7.6 SELF-EXCITED VIBRATIONS (CHATTER) 273
7.6.1 INTRODUCTION 273 7.6.2 BASIC STABILITY; EFFECT OF STRUCTURAL
DYNAMICS 278 X PRECISION MANUFACTURING 7.6.3 VARIATION OF SPINDLE SPEED
AND STABILITY LOBES 7.7 ADVANCED ANALYSIS VIII. SENSORS FOR PRECISION
MANUFACTURING 8.1 INTRODUCTION 288 292 295 295 8.1.1 THE RELEVANCE OF
PRECISION MANUFACTURING AND THE NEED FOR IN-PROCESS MONITORING AND
CONTROL 295 8.1.2 REQUIREMENTS FOR SENSOR TECHNOLOGY FOR PRECISION
MANUFACTURING 297 8.2 OVERVIEW OF SENSORS IN MANUFACTURING 300 8.2.1
INTRODUCTION 300 8.2.2 SENSOR SYSTEMS FOR PROCESS MONITORING 303 8.3 NEW
DEVELOPMENTS IN SIGNAL AND INFORMATION PROCESSING FOR TOOL CONDITION
MONITORING 308 8.3.1 INTRODUCTION 308 8.3.2 INTELLIGENT SENSORS 311
8.3.3 IMPLEMENTATION STRATEGIES 314 8.3.4 MULTISENSOR APPROACHES 316
8.3.5 SENSORS FOR HIGH SPEED MACHINING 317 8.4 ACOUSTIC EMISSION IN
MANUFACTURING 320 8.4.1 BACKGROUND 320 8.4.2 ACOUSTIC EMISSION
SOURCES-DIAGNOSTICS 322 8.4.3 ACOUSTIC EMISSION SOURCES-PROCESS
MONITORING 323 8.4.4 ACOUSTIC EMISSION IN MACHINING 325 8.5 SIGNAL
PROCESSING, FEATURE EXTRACTION AND SENSOR FUSION 334 8.5.1 INTRODUCTION
334 8.5.2 INTELLIGENT SENSOR DEFINED 337 8.5.3 SENSOR FUSION DEFINED 338
8.5.4 FUSION METHODOLOGIES 339 8.5.5 NEURAL NETWORKS 341 8.6
APPLICATIONS OF SIGNAL PROCESSING AND SENSOR FUSION 349 8.6.1
INTRODUCTION 349 8.6.2 TOOL WEAR DETECTION USING TIME SERIES ANALYSIS OF
ACOUSTIC EMISSION 350 TABLE OF CONTENTS XI 8.6.2.1 TIME SERIES ANALYSIS
351 8.6.2.2 EXPERIMENTAL EVALUATION 355 8.7 SENSOR INTEGRATION USING
NEURAL NETWORKS FOR INTELLIGENT TOOL CONDITION MONITORING 358 8.7.1 USE
OF MULTIPLE SENSORS 360 8.7.2 EXPERIMENTAL EVALUATION 363 8.8. THE NEED
FOR ENGINEERING MODELS TO DESIGN AND PREDICT THE PERFORMANCE OF
IN-PROCESS SENSORS 369 8.9 BASIC SENSOR CLASSIFICATION AND NEW SENSING
TECHNOLOGIES 372 8.9.1 INTRODUCTION 372 8.9.2 BASIC SENSOR TYPES 377
8.9.2.1 MECHANICAL SENSORS 377 8.9.2.2 THERMAL SENSORS 380 8.9.2.3
ELECTRICAL SENSORS 382 8.9.2.4 MAGNETIC SENSORS 382 8.9.2.5 RADIANT
SENSORS 383 8.9.2.6 CHEMICAL SENSORS 383 8.10 APPLICATIONS OF SENSORS IN
PRECISION MANUFACTURING 384 8.10.1 AE-BASED MONITORING OF GRINDING WHEEL
DRESSING 384 8.10.1.1 FAST AE RMS ANALYSIS FOR WHEEL CONDITION
MONITORING 385 8.10.1.2 GRINDING WHEEL TOPOGRAPHICAL MAPPING 387
8.10.1.3 WHEEL WEAR MECHANISM 389 8.10.1.4 AE-BASED MONITORING OF FACE
MILLING 390 8.10.2 AE-BASED MONITORING OF CHEMICAL MECHANICAL
PLANARIZATION 393 8.10.2.1 MONITORING OF ABRASIVE PROCESS PARAMETERS 395
8.10.2.2 PRECISION SCRIBING OF CMP-TREATED WAFERS 398 8.10.2.3 AE-BASED
ENDPOINT DETECTION FOR CMP 401 8.10.2.4 AE MONITORING OF SURFACE
CHEMICAL REACTIONS FOR COPPER CMP 403 XII PRECISION MANUFACTURING
8.10.2.5 AE CHARACTERISTICS OF OXIDATION AND DISSOLUTION IN COPPER CMP
411 8.10.2.6 MONITORING OF PRECISION SCRIBING 416 8.10.2.7 MONITORING OF
ULTRAPRECISION TURNING OF SINGLE CRYSTAL COPPER 418 8.10.2.8 MONITORING
OF ULTRAPRECISION TURNING OF POLY CRYSTALLINE COPPER 421 8.11 SUMMARY
422 IX. PROCESS PLANNING FOR PRECISION MANUFACTURING 425 9.1
MANUFACTURING SYSTEM CHARACTERISTICS 425 9.2 PROCESS PLANNING BASICS 435
9.3 PROCESS CAPABILITY 438 9.3.1 BACKGROUND 438 9.3.2 PROCESS CAPABILITY
DEFINED 440 9.4 C P AS A PLANNING METRIC 444 9.5 LEGACY-SYSTEM
INTEGRATION FOR PRECISION MANUFACTURING 451 9.6 FUTURE INTEGRATION FOR
PRECISION MANUFACTURING PROCESS PLANNING 452 X. PRECISION MACHINING
PROCESSES 455 10.1 INTRODUCTION 455 10.2 INFLUENCE OF MACHINING
PARAMETERS, WORK MATERIAL, AND TOOL GEOMETRY 462 10.2.1 INFLUENCE OF
UNCUT CHIP THICKNESS 462 10.2.2 MACHINING BRITTLE MATERIALS 465 10.2.3
EFFECTS OF WORK MATERIAL CRYSTALLOGRAPHY/ DIRECTIONALITY 472 10.3
PROCESS OPERATING CONDITIONS 478 10.4 PRECISION MFG. PROCESSES-DIAMOND
TURNING/MILLING 482 10.4.1 INTRODUCTION 482 10.4.2 MACHINE TOOL DESIGN
484 10.4.3 TOOL DESIGN AND ALIGNMENT 491 10.4.4 CHIP FORMATION AND
PROCESS MECHANICS 496 10.5 ABRASIVE PROCESSES - FIXED AND LOOSE 505
10.5.1 FIXED ABRASIVE PROCESSES 505 TABLE OF CONTENTS XIII 10.5.1.1
MATERIAL REMOVAL MECHANISMS 505 10.5.1.2 GRINDING FORCES, POWER AND
SPECIFIC ENERGY 512 10.5.1.3 GRINDING STIFFNESS, CONTACT STIFFNESS AND
PROCESS TIME CONSTANT 517 10.5.1.4 NANOGRINDING 520 10.5.2 LOOSE
ABRASIVE PROCESSES 521 10.5.2.1 POLISHING AND LAPPING 522 10.5.2.2
CHEMICAL MECHANICAL PLANARIZATION (CMP) 532 10.5.2.3 PROCESS MODELING IN
CMP 540 10.6 NON-TRADITIONAL PROCESSES 5 51 XI. PRECISION MANUFACTURING
APPLICATIONS AND CHALLENGES 555 11.1 INTRODUCTION 555 11.2 BASIC
SEMICONDUCTOR DEVICE MANUFACTURING 559 11.2.1 INTRODUCTION 559 11.2.2
SO, WHAT ARE THEY ANYWAY AND HOW ARE THEY MADE? 561 11.2.2.1
MICROFABRICATION: BACKGROUND AND OVERVIEW 561 11.2.2.2 LITHOGRAPHY 564
11.3 APPLICATIONS OF SEMICONDUCTOR MANUFACTURING - MEMS 570 11.4
NANOTECHNOLOGY 572 11.4.1 BACKGROUND AND DEFINITIONS 572 11.4.2
NANOSTRUCTURED MATERIALS 5 76 11.4.3 NANOFABRICATION TECHNIQUES 578
11.4.3.1 E-BEAM AND NANO-IMPRINT FABRICATION 582 11.4.3.2 EPITAXY AND
STRAIN ENGINEERING 585 11.4.3.2.1 QUANTUM STRUCTURE NANOFABRICATION
USING EPITAXY ON PATTERNED SUBSTRATES 585 11.4.3.2.2 QUANTUM STRUCTURE
NANOFABRICATION USING STRAIN-INDUCED SELF-ASSEMBLY 587 XIV PRECISION
MANUFACTURING 11.4.3.3 SCANNED PROBE TECHNIQUES 589 11.4.4 SELF-ASSEMBLY
595 11.5 MEMS AND NANOTECHNOLOGY APPLICATIONS 600 11.5.1 NANOTECHNOLOGY
APPLICATIONS 601 11.6 MICRO-MACHINING AND SMALL SCALE DEFECTS 604 11.6.1
INTRODUCTION 604 11.6.2 SURFACE AND EDGE FINISH 607 11.6.3 MODELING 611
11.6.3.1 FINITE ELEMENT MODELING 613 11.6.3.2 MOLECULAR DYNAMICS 615
11.6.3.3 MULTISCALE MODELING 619 11.6.3.4 MECHANISTIC MODELING 620
11.6.4 WORKPIECE AND DESIGN ISSUES 622 11.6.4.1 MICROMOLDING 622
11.6.4.2 CREATION OF MICROPATTERN AND MICROSTRUCTURE 625 11.6.4.3
CREATION OF 3-DIMENSIONAL SHAPES 630 11.6.4.4 ULTRASONIC VIBRATION
ASSISTED MICROMACHINING 631 11.6.5 MICRO-TOOLS 633 11.6.6 CUTTING FLUID
638 11.6.7 METROLOGY IN MICROMACHINING 640 11.6.8 CONCLUSION AND OUTLOOK
644 11.7 BURRS - PREVENTING AND MINIMIZING BURR FORMATION IN PRECISION
COMPONENTS 646 11.7.1 INTRODUCTION AND BACKGROUND 647 11.7.2
PROCESS-BASED SOLUTIONS 651 11.7.2.1 MILLING 652 11.7.2.2 DRILLING 654
11.7.3 EXAMPLES OF APPLICATION OF BUN- MINIMIZATION STRATEGIES 657
11.7.3.1 TOOL PATH PLANNING IN MILLING 657 11.7.3.2 BURR CONTROL CHART
660 11.7.3.3 INTEGRATED PROCESS PLANNING AND BURR MINIMIZATION 661
11.7.4 SUMMARY AND CONCLUSIONS 662 TABLE OF CONTENTS XV XII. FUTURE OF
PRECISION MANUFACTURING 665 12.1 INTRODUCTION 665 12.2 THE MANUFACTURING
PIPELINE 666 12.3 SUSTAINABLE DESIGN/ENVIRONMENTALLY CONSCIOUS DESIGN
AND MANUFACTURING 669 12.3.1 TECHNOLOGIES FOR SUSTAINABLE MANUFACTURING
670 12.3.2 GREEN MANUFACTURING PIPELINE 671 12.3.3 SUSTAINABLE
MANUFACTURING OR DOES GREEN = SUSTAINABLE? 676 12.3.4 MANUFACTURING
TECHNOLOGY WEDGES 678 12.3.5 EXAMPLES OF WEDGE TECHNOLOGY APPLICATION
AREAS FOR MANUFACTURING 680 12.3.5.1 CONSUMABLE USE IN MACHINING 681
12.3.5.2 ENERGY USE IN NANOSCALE MANUFACTURING 685 12.4 ENVIRONMENTALLY
CONSCIOUS DESIGN OF PRECISION MACHINES 693 12.4.1 SUSTAINABILITY BUDGETS
694 12.4.2 CONSTRUCTING THE SUSTAINABILITY BUDGET 696 12.5 SUMMARY
COMMENTS/CONCLUSION 701 REFERENCES 705 INDEX 765
|
| adam_txt |
PRECISION MANUFACTURING DAVID DORNFELD UNIVERSITY OF CALIFORNIA AT
BERKELEY MECHANICAL ENGINEERING 6195 ETCHEVERRY HALL BERKELEY,
CALIFORNIA 94720 DAE-EUN LEE LAWRENCE BERKELEY NATIONAL LABORATORY
MECHANICAL ENGINEERING 1 CYCLOTRON ROAD BERKELEY, CALIFORNIA 94720 }
SPRIN GER TABLE OF CONTENTS PREFACE & ACKNOWLEDGEMENTS I. INTRODUCTION
TO PRECISION MANUFACTURING 1.1 PRECISION ENGINEERING 1.2 PRECISION
MANUFACTURING 1.3 COMPETITIVE DRIVERS OF PRECISION MANUFACTURING 1.4
HISTORICAL DEVELOPMENTS IN MANUFACTURING 1.4.1 BACKGROUND 1.4.2 KEY
DRIVERS 1.4.3 HISTORICAL EXAMPLES 1.5 ORGANIZATION OF THIS BOOK II.
MACHINE DESIGN FOR PRECISION MANUFACTURING 2.1 BACKGROUND ON MACHINE
DESIGN FOR MANUFACTURIN 2.2 PHILOSOPHY OF PRECISION MACHINE DESIGN 2.3
SOURCES OF ERROR - OVERVIEW HI. PRINCIPLES OF MEASUREMENT 3.1 DEFINITION
OF TERMS - ACCURACY, REPEATIBILITY, AND RESOLUTION 3.1.1 ACCURACY 3.1.2
REPEATABILITY (OR PRECISION) 3.1.3 RESOLUTION 3.1.4 PROBABILISTIC
MEASURE OF ACCURACY 3.2 METROLOGY AND MEASUREMENT VIA PRECISION
MANUFACTURING 3.3 ABBE'S PRINCIPLE 64 3.4 METROLOGY TECHNIQUES 67 3.4.1
MEASUREMENT OF DIMENSION AND ANGLE 67 3.4.2 MEASUREMENT OF FORM 73
3.4.2.1 STRAIGHTNESS 73 3.4.2.2 FLATNESS 84 3.4.2.3 ROUNDNESS 88 3.4.2.4
OTHER FORM ERRORS 99 3.4.3 MEASUREMENT OF SURFACE ROUGHNESS 99 3.4.4
KINEMATIC PRECISION 110 3.5 SUBSURFACE DAMAGE 112 IV. MECHANICAL ERRORS
121 4.1 INTRODUCTION 121 4.2 ERRORS DUE TO MACHINE ELEMENTS (EXCLUDING
BEARINGS) 123 4.3 KINEMATIC DESIGN 128 4.3.1 CONNECTIVITY 128 4.3.2
KINEMATIC ELEMENTS 129 4.3.3 CONTACT AND COMPLEX SUPPORT 13 3 4.3.4
SUMMARY OF KINEMATIC DESIGN 142 4.4 STRUCTURAL COMPLIANCE 143 4.4.1
MICROSCALE COMPLIANCE 143 4.4.2 MACROSCALE COMPLIANCE 145 4.5 BEARINGS
AND SPINDLES 153 4.5.1 BEARINGS 153 4.5.2 AEROSTATIC BEARINGS AND
SPINDLES 163 V. THERMAL ERRORS 167 5.1 BACKGROUND ON THE THERMAL ERROR
PROBLEM 167 5.2 THERMAL EFFECTS IN PRECISION ENGINEERING 171 5.3
DETERMINING THE EFFECT OF TEMPERATURE OTHER THAN 20C 180 5.3.1 FREE AND
CONSTRAINED BODIES 181 5.3.2 EFFECT OF SPATIAL TEMPERATURE GRADIENTS 184
5.3.3 EFFECT OF TEMPERATURE TRANSIENTS: SOAK-OUT TIME AND SINUSOIDAL
RESPONSE 187 TABLE OF CONTENTS IX 5.4 CONDUCTIVE, CONVECTIVE, AND
RADIATIVE HEAT TRANSFER PARAMETERS 193 5.5 SPECIFIC HEAT SOURCES AND
EXAMPLES OF THERMAL PROBLEMS 196 5.6 ENVIRONMENTAL CONTROL OF PRECISION
MACHINERY 202 5.6.1 MACHINE ENCLOSURES 203 5.6.2 FACTORY AND ROOM
ENCLOSURES 204 5.6.3 MACHINE TREATMENT WITHOUT ENCLOSURES 206 5.7
THERMAL EFFECTS AND METROLOGY 208 5.8 OBSERVATIONS 215 VI. ERROR MAPPING
AND ERROR BUDGETS 217 6.1 INTRODUCTION 217 6.2 ERROR MAPPING 218 6.3
ERROR BUDGET 232 6.3.1 DEFINITION OF ERROR BUDGET 232 6.3.2 ERROR BUDGET
FLOW CHART 233 6.3.3 COMBINATIONAL RULES FOR ERRORS 234 VII. ERROR DUE
TO COMPLIANCE AND VIBRATION 239 7.1 INTRODUCTION 239 7.2 EXCITATIONS IN
MACHINE TOOLS 243 7.3 WEIGHT DEFORMATION 246 7.4 CUTTING FORCE
DEFORMATION 249 7.4.1 TYPE A DEFORMATION: DEFORMATION DUE TO THE
VARIATION OF THE CUTTING FORCE 250 7.4.1.1 INTRODUCTION AND BACKGROUND
250 7.4.1.2 EXAMPLES FOR SINGLE EDGE CUTTING 254 7.4.1.3 MACHINE
STIFFNESS AND DIRECTIONAL ORIENTATION 256 7.4.2 TYPE * DEFORMATION:
DEFORMATION DUE TO THE VARIATION OF THE STIFFNESS ALONG THE TOOL PATH
263 7.4.3 COMPARISON OF THE ERRORS FROM DEFORMATION TYPES A AND * 267
7.5 FORCED VIBRATIONS 272 7.6 SELF-EXCITED VIBRATIONS (CHATTER) 273
7.6.1 INTRODUCTION 273 7.6.2 BASIC STABILITY; EFFECT OF STRUCTURAL
DYNAMICS 278 X PRECISION MANUFACTURING 7.6.3 VARIATION OF SPINDLE SPEED
AND STABILITY LOBES 7.7 ADVANCED ANALYSIS VIII. SENSORS FOR PRECISION
MANUFACTURING 8.1 INTRODUCTION 288 292 295 295 8.1.1 THE RELEVANCE OF
PRECISION MANUFACTURING AND THE NEED FOR IN-PROCESS MONITORING AND
CONTROL 295 8.1.2 REQUIREMENTS FOR SENSOR TECHNOLOGY FOR PRECISION
MANUFACTURING 297 8.2 OVERVIEW OF SENSORS IN MANUFACTURING 300 8.2.1
INTRODUCTION 300 8.2.2 SENSOR SYSTEMS FOR PROCESS MONITORING 303 8.3 NEW
DEVELOPMENTS IN SIGNAL AND INFORMATION PROCESSING FOR TOOL CONDITION
MONITORING 308 8.3.1 INTRODUCTION 308 8.3.2 INTELLIGENT SENSORS 311
8.3.3 IMPLEMENTATION STRATEGIES 314 8.3.4 MULTISENSOR APPROACHES 316
8.3.5 SENSORS FOR HIGH SPEED MACHINING 317 8.4 ACOUSTIC EMISSION IN
MANUFACTURING 320 8.4.1 BACKGROUND 320 8.4.2 ACOUSTIC EMISSION
SOURCES-DIAGNOSTICS 322 8.4.3 ACOUSTIC EMISSION SOURCES-PROCESS
MONITORING 323 8.4.4 ACOUSTIC EMISSION IN MACHINING 325 8.5 SIGNAL
PROCESSING, FEATURE EXTRACTION AND SENSOR FUSION 334 8.5.1 INTRODUCTION
334 8.5.2 INTELLIGENT SENSOR DEFINED 337 8.5.3 SENSOR FUSION DEFINED 338
8.5.4 FUSION METHODOLOGIES 339 8.5.5 NEURAL NETWORKS 341 8.6
APPLICATIONS OF SIGNAL PROCESSING AND SENSOR FUSION 349 8.6.1
INTRODUCTION 349 8.6.2 TOOL WEAR DETECTION USING TIME SERIES ANALYSIS OF
ACOUSTIC EMISSION 350 TABLE OF CONTENTS XI 8.6.2.1 TIME SERIES ANALYSIS
351 8.6.2.2 EXPERIMENTAL EVALUATION 355 8.7 SENSOR INTEGRATION USING
NEURAL NETWORKS FOR INTELLIGENT TOOL CONDITION MONITORING 358 8.7.1 USE
OF MULTIPLE SENSORS 360 8.7.2 EXPERIMENTAL EVALUATION 363 8.8. THE NEED
FOR ENGINEERING MODELS TO DESIGN AND PREDICT THE PERFORMANCE OF
IN-PROCESS SENSORS 369 8.9 BASIC SENSOR CLASSIFICATION AND NEW SENSING
TECHNOLOGIES 372 8.9.1 INTRODUCTION 372 8.9.2 BASIC SENSOR TYPES 377
8.9.2.1 MECHANICAL SENSORS 377 8.9.2.2 THERMAL SENSORS 380 8.9.2.3
ELECTRICAL SENSORS 382 8.9.2.4 MAGNETIC SENSORS 382 8.9.2.5 RADIANT
SENSORS 383 8.9.2.6 CHEMICAL SENSORS 383 8.10 APPLICATIONS OF SENSORS IN
PRECISION MANUFACTURING 384 8.10.1 AE-BASED MONITORING OF GRINDING WHEEL
DRESSING 384 8.10.1.1 FAST AE RMS ANALYSIS FOR WHEEL CONDITION
MONITORING 385 8.10.1.2 GRINDING WHEEL TOPOGRAPHICAL MAPPING 387
8.10.1.3 WHEEL WEAR MECHANISM 389 8.10.1.4 AE-BASED MONITORING OF FACE
MILLING 390 8.10.2 AE-BASED MONITORING OF CHEMICAL MECHANICAL
PLANARIZATION 393 8.10.2.1 MONITORING OF ABRASIVE PROCESS PARAMETERS 395
8.10.2.2 PRECISION SCRIBING OF CMP-TREATED WAFERS 398 8.10.2.3 AE-BASED
ENDPOINT DETECTION FOR CMP 401 8.10.2.4 AE MONITORING OF SURFACE
CHEMICAL REACTIONS FOR COPPER CMP 403 XII PRECISION MANUFACTURING
8.10.2.5 AE CHARACTERISTICS OF OXIDATION AND DISSOLUTION IN COPPER CMP
411 8.10.2.6 MONITORING OF PRECISION SCRIBING 416 8.10.2.7 MONITORING OF
ULTRAPRECISION TURNING OF SINGLE CRYSTAL COPPER 418 8.10.2.8 MONITORING
OF ULTRAPRECISION TURNING OF POLY CRYSTALLINE COPPER 421 8.11 SUMMARY
422 IX. PROCESS PLANNING FOR PRECISION MANUFACTURING 425 9.1
MANUFACTURING SYSTEM CHARACTERISTICS 425 9.2 PROCESS PLANNING BASICS 435
9.3 PROCESS CAPABILITY 438 9.3.1 BACKGROUND 438 9.3.2 PROCESS CAPABILITY
DEFINED 440 9.4 C P AS A PLANNING METRIC 444 9.5 LEGACY-SYSTEM
INTEGRATION FOR PRECISION MANUFACTURING 451 9.6 FUTURE INTEGRATION FOR
PRECISION MANUFACTURING PROCESS PLANNING 452 X. PRECISION MACHINING
PROCESSES 455 10.1 INTRODUCTION 455 10.2 INFLUENCE OF MACHINING
PARAMETERS, WORK MATERIAL, AND TOOL GEOMETRY 462 10.2.1 INFLUENCE OF
UNCUT CHIP THICKNESS 462 10.2.2 MACHINING BRITTLE MATERIALS 465 10.2.3
EFFECTS OF WORK MATERIAL CRYSTALLOGRAPHY/ DIRECTIONALITY 472 10.3
PROCESS OPERATING CONDITIONS 478 10.4 PRECISION MFG. PROCESSES-DIAMOND
TURNING/MILLING 482 10.4.1 INTRODUCTION 482 10.4.2 MACHINE TOOL DESIGN
484 10.4.3 TOOL DESIGN AND ALIGNMENT 491 10.4.4 CHIP FORMATION AND
PROCESS MECHANICS 496 10.5 ABRASIVE PROCESSES - FIXED AND LOOSE 505
10.5.1 FIXED ABRASIVE PROCESSES 505 TABLE OF CONTENTS XIII 10.5.1.1
MATERIAL REMOVAL MECHANISMS 505 10.5.1.2 GRINDING FORCES, POWER AND
SPECIFIC ENERGY 512 10.5.1.3 GRINDING STIFFNESS, CONTACT STIFFNESS AND
PROCESS TIME CONSTANT 517 10.5.1.4 NANOGRINDING 520 10.5.2 LOOSE
ABRASIVE PROCESSES 521 10.5.2.1 POLISHING AND LAPPING 522 10.5.2.2
CHEMICAL MECHANICAL PLANARIZATION (CMP) 532 10.5.2.3 PROCESS MODELING IN
CMP 540 10.6 NON-TRADITIONAL PROCESSES 5 51 XI. PRECISION MANUFACTURING
APPLICATIONS AND CHALLENGES 555 11.1 INTRODUCTION 555 11.2 BASIC
SEMICONDUCTOR DEVICE MANUFACTURING 559 11.2.1 INTRODUCTION 559 11.2.2
SO, WHAT ARE THEY ANYWAY AND HOW ARE THEY MADE? 561 11.2.2.1
MICROFABRICATION: BACKGROUND AND OVERVIEW 561 11.2.2.2 LITHOGRAPHY 564
11.3 APPLICATIONS OF SEMICONDUCTOR MANUFACTURING - MEMS 570 11.4
NANOTECHNOLOGY 572 11.4.1 BACKGROUND AND DEFINITIONS 572 11.4.2
NANOSTRUCTURED MATERIALS 5 76 11.4.3 NANOFABRICATION TECHNIQUES 578
11.4.3.1 E-BEAM AND NANO-IMPRINT FABRICATION 582 11.4.3.2 EPITAXY AND
STRAIN ENGINEERING 585 11.4.3.2.1 QUANTUM STRUCTURE NANOFABRICATION
USING EPITAXY ON PATTERNED SUBSTRATES 585 11.4.3.2.2 QUANTUM STRUCTURE
NANOFABRICATION USING STRAIN-INDUCED SELF-ASSEMBLY 587 XIV PRECISION
MANUFACTURING 11.4.3.3 SCANNED PROBE TECHNIQUES 589 11.4.4 SELF-ASSEMBLY
595 11.5 MEMS AND NANOTECHNOLOGY APPLICATIONS 600 11.5.1 NANOTECHNOLOGY
APPLICATIONS 601 11.6 MICRO-MACHINING AND SMALL SCALE DEFECTS 604 11.6.1
INTRODUCTION 604 11.6.2 SURFACE AND EDGE FINISH 607 11.6.3 MODELING 611
11.6.3.1 FINITE ELEMENT MODELING 613 11.6.3.2 MOLECULAR DYNAMICS 615
11.6.3.3 MULTISCALE MODELING 619 11.6.3.4 MECHANISTIC MODELING 620
11.6.4 WORKPIECE AND DESIGN ISSUES 622 11.6.4.1 MICROMOLDING 622
11.6.4.2 CREATION OF MICROPATTERN AND MICROSTRUCTURE 625 11.6.4.3
CREATION OF 3-DIMENSIONAL SHAPES 630 11.6.4.4 ULTRASONIC VIBRATION
ASSISTED MICROMACHINING 631 11.6.5 MICRO-TOOLS 633 11.6.6 CUTTING FLUID
638 11.6.7 METROLOGY IN MICROMACHINING 640 11.6.8 CONCLUSION AND OUTLOOK
644 11.7 BURRS - PREVENTING AND MINIMIZING BURR FORMATION IN PRECISION
COMPONENTS 646 11.7.1 INTRODUCTION AND BACKGROUND 647 11.7.2
PROCESS-BASED SOLUTIONS 651 11.7.2.1 MILLING 652 11.7.2.2 DRILLING 654
11.7.3 EXAMPLES OF APPLICATION OF BUN- MINIMIZATION STRATEGIES 657
11.7.3.1 TOOL PATH PLANNING IN MILLING 657 11.7.3.2 BURR CONTROL CHART
660 11.7.3.3 INTEGRATED PROCESS PLANNING AND BURR MINIMIZATION 661
11.7.4 SUMMARY AND CONCLUSIONS 662 TABLE OF CONTENTS XV XII. FUTURE OF
PRECISION MANUFACTURING 665 12.1 INTRODUCTION 665 12.2 THE MANUFACTURING
PIPELINE 666 12.3 SUSTAINABLE DESIGN/ENVIRONMENTALLY CONSCIOUS DESIGN
AND MANUFACTURING 669 12.3.1 TECHNOLOGIES FOR SUSTAINABLE MANUFACTURING
670 12.3.2 GREEN MANUFACTURING PIPELINE 671 12.3.3 SUSTAINABLE
MANUFACTURING OR "DOES GREEN = SUSTAINABLE?" 676 12.3.4 MANUFACTURING
TECHNOLOGY WEDGES 678 12.3.5 EXAMPLES OF WEDGE TECHNOLOGY APPLICATION
AREAS FOR MANUFACTURING 680 12.3.5.1 CONSUMABLE USE IN MACHINING 681
12.3.5.2 ENERGY USE IN NANOSCALE MANUFACTURING 685 12.4 ENVIRONMENTALLY
CONSCIOUS DESIGN OF PRECISION MACHINES 693 12.4.1 SUSTAINABILITY BUDGETS
694 12.4.2 CONSTRUCTING THE SUSTAINABILITY BUDGET 696 12.5 SUMMARY
COMMENTS/CONCLUSION 701 REFERENCES 705 INDEX 765 |
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| author | Dornfeld, David Lee, Dae-Eun |
| author_facet | Dornfeld, David Lee, Dae-Eun |
| author_role | aut aut |
| author_sort | Dornfeld, David |
| author_variant | d d dd d e l del |
| building | Verbundindex |
| bvnumber | BV023065430 |
| classification_rvk | ZM 8000 ZM 8370 |
| ctrlnum | (OCoLC)255370811 (DE-599)BVBBV023065430 |
| dewey-full | 670.42 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 670 - Manufacturing |
| dewey-raw | 670.42 |
| dewey-search | 670.42 |
| dewey-sort | 3670.42 |
| dewey-tens | 670 - Manufacturing |
| discipline | Physik Werkstoffwissenschaften / Fertigungstechnik |
| discipline_str_mv | Physik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| illustrated | Illustrated |
| index_date | 2024-07-02T19:30:30Z |
| indexdate | 2024-07-09T21:10:11Z |
| institution | BVB |
| isbn | 0387324674 9780387324678 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016268637 |
| oclc_num | 255370811 |
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| physical | XX, 775 S. Ill., graph. Darst. |
| publishDate | 2008 |
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| spelling | Dornfeld, David Verfasser aut Precision manufacturing David Dornfeld ; Dae-Eun Lee New York Springer 2008 XX, 775 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Feinstbearbeitung Mechanical engineering Mikrobearbeitung Production engineering Fertigungstechnik - 0 Gesamtdarstellung idsbb Präzisionsarbeit (DE-588)4175564-9 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Feinstbearbeitung (DE-588)4199904-6 gnd rswk-swf Feinstbearbeitung (DE-588)4199904-6 s DE-604 Fertigung (DE-588)4016899-2 s Präzisionsarbeit (DE-588)4175564-9 s Lee, Dae-Eun Verfasser aut text/html http://deposit.dnb.de/cgi-bin/dokserv?id=2813547&prov=M&dok_var=1&dok_ext=htm Inhaltstext GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=016268637&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Dornfeld, David Lee, Dae-Eun Precision manufacturing Feinstbearbeitung Mechanical engineering Mikrobearbeitung Production engineering Fertigungstechnik - 0 Gesamtdarstellung idsbb Präzisionsarbeit (DE-588)4175564-9 gnd Fertigung (DE-588)4016899-2 gnd Feinstbearbeitung (DE-588)4199904-6 gnd |
| subject_GND | (DE-588)4175564-9 (DE-588)4016899-2 (DE-588)4199904-6 |
| title | Precision manufacturing |
| title_auth | Precision manufacturing |
| title_exact_search | Precision manufacturing |
| title_exact_search_txtP | Precision manufacturing |
| title_full | Precision manufacturing David Dornfeld ; Dae-Eun Lee |
| title_fullStr | Precision manufacturing David Dornfeld ; Dae-Eun Lee |
| title_full_unstemmed | Precision manufacturing David Dornfeld ; Dae-Eun Lee |
| title_short | Precision manufacturing |
| title_sort | precision manufacturing |
| topic | Feinstbearbeitung Mechanical engineering Mikrobearbeitung Production engineering Fertigungstechnik - 0 Gesamtdarstellung idsbb Präzisionsarbeit (DE-588)4175564-9 gnd Fertigung (DE-588)4016899-2 gnd Feinstbearbeitung (DE-588)4199904-6 gnd |
| topic_facet | Feinstbearbeitung Mechanical engineering Mikrobearbeitung Production engineering Fertigungstechnik - 0 Gesamtdarstellung Präzisionsarbeit Fertigung |
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