Handbook of multilevel metallization for integrated circuits: materials, technology, and applications
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Westwood, NJ
Noyes
1993
|
| Schriftenreihe: | Materials science and process technology series
|
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Beschreibung: | 1 Online-Ressource (XXIII, 887 S. Ill., graph. Darst.) |
| ISBN: | 9780815517610 9780815513407 |
Internformat
MARC
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| 245 | 1 | 0 | |a Handbook of multilevel metallization for integrated circuits |b materials, technology, and applications |c ed. by Syd R. Wilson ... |
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Datensatz im Suchindex
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|---|---|
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| building | Verbundindex |
| bvnumber | BV023050389 |
| classification_rvk | UP 3150 |
| collection | ZDB-10-ESC |
| ctrlnum | (OCoLC)635592091 (DE-599)BVBBV023050389 |
| discipline | Physik |
| discipline_str_mv | Physik |
| format | Electronic eBook |
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| genre_facet | Aufsatzsammlung |
| id | DE-604.BV023050389 |
| illustrated | Illustrated |
| index_date | 2024-07-02T19:24:25Z |
| indexdate | 2024-07-31T01:10:23Z |
| institution | BVB |
| isbn | 9780815517610 9780815513407 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016253782 |
| oclc_num | 635592091 |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (XXIII, 887 S. Ill., graph. Darst.) |
| psigel | ZDB-10-ESC |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Noyes |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | Handbook of multilevel metallization for integrated circuits materials, technology, and applications ed. by Syd R. Wilson ... Westwood, NJ Noyes 1993 1 Online-Ressource (XXIII, 887 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Metallisieren (DE-588)4169599-9 gnd rswk-swf Mehrschichtsystem (DE-588)4244347-7 gnd rswk-swf Halbleiterschicht (DE-588)4158812-5 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Halbleiterschicht (DE-588)4158812-5 s Mehrschichtsystem (DE-588)4244347-7 s DE-604 Metallisieren (DE-588)4169599-9 s 1\p DE-604 Integrierte Schaltung (DE-588)4027242-4 s 2\p DE-604 Wilson, Syd R. Sonstige oth http://knovel.com/knovel2/Toc.jsp?BookID=576 Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of multilevel metallization for integrated circuits materials, technology, and applications Integrierte Schaltung (DE-588)4027242-4 gnd Metallisieren (DE-588)4169599-9 gnd Mehrschichtsystem (DE-588)4244347-7 gnd Halbleiterschicht (DE-588)4158812-5 gnd |
| subject_GND | (DE-588)4027242-4 (DE-588)4169599-9 (DE-588)4244347-7 (DE-588)4158812-5 (DE-588)4143413-4 |
| title | Handbook of multilevel metallization for integrated circuits materials, technology, and applications |
| title_auth | Handbook of multilevel metallization for integrated circuits materials, technology, and applications |
| title_exact_search | Handbook of multilevel metallization for integrated circuits materials, technology, and applications |
| title_exact_search_txtP | Handbook of multilevel metallization for integrated circuits materials, technology, and applications |
| title_full | Handbook of multilevel metallization for integrated circuits materials, technology, and applications ed. by Syd R. Wilson ... |
| title_fullStr | Handbook of multilevel metallization for integrated circuits materials, technology, and applications ed. by Syd R. Wilson ... |
| title_full_unstemmed | Handbook of multilevel metallization for integrated circuits materials, technology, and applications ed. by Syd R. Wilson ... |
| title_short | Handbook of multilevel metallization for integrated circuits |
| title_sort | handbook of multilevel metallization for integrated circuits materials technology and applications |
| title_sub | materials, technology, and applications |
| topic | Integrierte Schaltung (DE-588)4027242-4 gnd Metallisieren (DE-588)4169599-9 gnd Mehrschichtsystem (DE-588)4244347-7 gnd Halbleiterschicht (DE-588)4158812-5 gnd |
| topic_facet | Integrierte Schaltung Metallisieren Mehrschichtsystem Halbleiterschicht Aufsatzsammlung |
| url | http://knovel.com/knovel2/Toc.jsp?BookID=576 |
| work_keys_str_mv | AT wilsonsydr handbookofmultilevelmetallizationforintegratedcircuitsmaterialstechnologyandapplications |