Handbook of ion beam processing technology: principles, deposition, film modification and synthesis
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Park Ridge, NJ
Noyes Publ.
1989
|
| Series: | Materials science and process technology series
|
| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource (XVIII, 438 S. Ill., graph. Darst.) |
| ISBN: | 9780815511991 9780815517573 |
Staff View
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Record in the Search Index
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| discipline | Physik Elektrotechnik Fertigungstechnik |
| discipline_str_mv | Physik Elektrotechnik Fertigungstechnik |
| format | Electronic eBook |
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| id | DE-604.BV023050320 |
| illustrated | Illustrated |
| index_date | 2024-07-02T19:24:23Z |
| indexdate | 2024-07-31T01:10:23Z |
| institution | BVB |
| isbn | 9780815511991 9780815517573 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016253713 |
| oclc_num | 635854495 |
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| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (XVIII, 438 S. Ill., graph. Darst.) |
| psigel | ZDB-10-ESC |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Noyes Publ. |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... Park Ridge, NJ Noyes Publ. 1989 1 Online-Ressource (XVIII, 438 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Materialbearbeitung (DE-588)4139082-9 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Materialbearbeitung (DE-588)4139082-9 s Ionenstrahl (DE-588)4162347-2 s DE-604 Ionenimplantation (DE-588)4027606-5 s Cuomo, Jerome J. Sonstige oth Erscheint auch als Druckausgabe 978-0-8155-1199-1 http://knovel.com/knovel2/Toc.jsp?BookID=1293 Volltext |
| spellingShingle | Handbook of ion beam processing technology principles, deposition, film modification and synthesis Materialbearbeitung (DE-588)4139082-9 gnd Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahl (DE-588)4162347-2 gnd |
| subject_GND | (DE-588)4139082-9 (DE-588)4027606-5 (DE-588)4162347-2 (DE-588)4143413-4 |
| title | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
| title_auth | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
| title_exact_search | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
| title_exact_search_txtP | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
| title_full | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... |
| title_fullStr | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... |
| title_full_unstemmed | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... |
| title_short | Handbook of ion beam processing technology |
| title_sort | handbook of ion beam processing technology principles deposition film modification and synthesis |
| title_sub | principles, deposition, film modification and synthesis |
| topic | Materialbearbeitung (DE-588)4139082-9 gnd Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahl (DE-588)4162347-2 gnd |
| topic_facet | Materialbearbeitung Ionenimplantation Ionenstrahl Aufsatzsammlung |
| url | http://knovel.com/knovel2/Toc.jsp?BookID=1293 |
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