Handbook of ion beam processing technology: principles, deposition, film modification and synthesis
Gespeichert in:
Format: | Elektronisch E-Book |
---|---|
Sprache: | English |
Veröffentlicht: |
Park Ridge, NJ
Noyes Publ.
1989
|
Schriftenreihe: | Materials science and process technology series
|
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | 1 Online-Ressource (XVIII, 438 S. Ill., graph. Darst.) |
ISBN: | 9780815511991 9780815517573 |
Internformat
MARC
LEADER | 00000nmm a2200000 c 4500 | ||
---|---|---|---|
001 | BV023050320 | ||
003 | DE-604 | ||
005 | 20140509 | ||
007 | cr|uuu---uuuuu | ||
008 | 071213s1989 |||| o||u| ||||||eng d | ||
020 | |a 9780815511991 |c Print |9 978-0-8155-1199-1 | ||
020 | |a 9780815517573 |c Online |9 978-0-8155-1757-3 | ||
035 | |a (OCoLC)635854495 | ||
035 | |a (DE-599)BVBBV023050320 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
084 | |a UP 9350 |0 (DE-625)146462: |2 rvk | ||
084 | |a ELT 293f |2 stub | ||
084 | |a FER 786f |2 stub | ||
245 | 1 | 0 | |a Handbook of ion beam processing technology |b principles, deposition, film modification and synthesis |c ed. by Jerome J. Cuomo ... |
264 | 1 | |a Park Ridge, NJ |b Noyes Publ. |c 1989 | |
300 | |a 1 Online-Ressource (XVIII, 438 S. |b Ill., graph. Darst.) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
490 | 0 | |a Materials science and process technology series | |
650 | 0 | 7 | |a Materialbearbeitung |0 (DE-588)4139082-9 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenstrahl |0 (DE-588)4162347-2 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
689 | 0 | 0 | |a Materialbearbeitung |0 (DE-588)4139082-9 |D s |
689 | 0 | 1 | |a Ionenstrahl |0 (DE-588)4162347-2 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
689 | 1 | |5 DE-604 | |
689 | 2 | 0 | |a Ionenstrahl |0 (DE-588)4162347-2 |D s |
689 | 2 | |5 DE-604 | |
700 | 1 | |a Cuomo, Jerome J. |e Sonstige |4 oth | |
776 | 0 | 8 | |i Erscheint auch als |n Druckausgabe |z 978-0-8155-1199-1 |
856 | 4 | 0 | |u http://knovel.com/knovel2/Toc.jsp?BookID=1293 |3 Volltext |
912 | |a ZDB-10-ESC | ||
943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-016253713 |
Datensatz im Suchindex
_version_ | 1806054954020896768 |
---|---|
adam_text | |
adam_txt | |
any_adam_object | |
any_adam_object_boolean | |
building | Verbundindex |
bvnumber | BV023050320 |
classification_rvk | UP 9350 |
classification_tum | ELT 293f FER 786f |
collection | ZDB-10-ESC |
ctrlnum | (OCoLC)635854495 (DE-599)BVBBV023050320 |
discipline | Physik Elektrotechnik Fertigungstechnik |
discipline_str_mv | Physik Elektrotechnik Fertigungstechnik |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nmm a2200000 c 4500</leader><controlfield tag="001">BV023050320</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20140509</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">071213s1989 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815511991</subfield><subfield code="c">Print</subfield><subfield code="9">978-0-8155-1199-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815517573</subfield><subfield code="c">Online</subfield><subfield code="9">978-0-8155-1757-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)635854495</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV023050320</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 9350</subfield><subfield code="0">(DE-625)146462:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 293f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 786f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of ion beam processing technology</subfield><subfield code="b">principles, deposition, film modification and synthesis</subfield><subfield code="c">ed. by Jerome J. Cuomo ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Park Ridge, NJ</subfield><subfield code="b">Noyes Publ.</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XVIII, 438 S.</subfield><subfield code="b">Ill., graph. Darst.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Materials science and process technology series</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Materialbearbeitung</subfield><subfield code="0">(DE-588)4139082-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Materialbearbeitung</subfield><subfield code="0">(DE-588)4139082-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cuomo, Jerome J.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druckausgabe</subfield><subfield code="z">978-0-8155-1199-1</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://knovel.com/knovel2/Toc.jsp?BookID=1293</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-10-ESC</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-016253713</subfield></datafield></record></collection> |
genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
genre_facet | Aufsatzsammlung |
id | DE-604.BV023050320 |
illustrated | Illustrated |
index_date | 2024-07-02T19:24:23Z |
indexdate | 2024-07-31T01:10:23Z |
institution | BVB |
isbn | 9780815511991 9780815517573 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016253713 |
oclc_num | 635854495 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM |
owner_facet | DE-91 DE-BY-TUM |
physical | 1 Online-Ressource (XVIII, 438 S. Ill., graph. Darst.) |
psigel | ZDB-10-ESC |
publishDate | 1989 |
publishDateSearch | 1989 |
publishDateSort | 1989 |
publisher | Noyes Publ. |
record_format | marc |
series2 | Materials science and process technology series |
spelling | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... Park Ridge, NJ Noyes Publ. 1989 1 Online-Ressource (XVIII, 438 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Materialbearbeitung (DE-588)4139082-9 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Materialbearbeitung (DE-588)4139082-9 s Ionenstrahl (DE-588)4162347-2 s DE-604 Ionenimplantation (DE-588)4027606-5 s Cuomo, Jerome J. Sonstige oth Erscheint auch als Druckausgabe 978-0-8155-1199-1 http://knovel.com/knovel2/Toc.jsp?BookID=1293 Volltext |
spellingShingle | Handbook of ion beam processing technology principles, deposition, film modification and synthesis Materialbearbeitung (DE-588)4139082-9 gnd Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahl (DE-588)4162347-2 gnd |
subject_GND | (DE-588)4139082-9 (DE-588)4027606-5 (DE-588)4162347-2 (DE-588)4143413-4 |
title | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
title_auth | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
title_exact_search | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
title_exact_search_txtP | Handbook of ion beam processing technology principles, deposition, film modification and synthesis |
title_full | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... |
title_fullStr | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... |
title_full_unstemmed | Handbook of ion beam processing technology principles, deposition, film modification and synthesis ed. by Jerome J. Cuomo ... |
title_short | Handbook of ion beam processing technology |
title_sort | handbook of ion beam processing technology principles deposition film modification and synthesis |
title_sub | principles, deposition, film modification and synthesis |
topic | Materialbearbeitung (DE-588)4139082-9 gnd Ionenimplantation (DE-588)4027606-5 gnd Ionenstrahl (DE-588)4162347-2 gnd |
topic_facet | Materialbearbeitung Ionenimplantation Ionenstrahl Aufsatzsammlung |
url | http://knovel.com/knovel2/Toc.jsp?BookID=1293 |
work_keys_str_mv | AT cuomojeromej handbookofionbeamprocessingtechnologyprinciplesdepositionfilmmodificationandsynthesis |