Handbook of VLSI microlithography: principles, technology, and applications
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Park Ridge, NJ [u.a.]
Noyes Publ. [u.a.]
2001
|
| Edition: | 2. ed. |
| Series: | Materials science and processing technology series
|
| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource (XXI, 1001 S. Ill., graph. Darst.) |
| ISBN: | 9780815517801 9780815514442 0815514441 |
Staff View
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2. ed. |
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| id | DE-604.BV023035929 |
| illustrated | Illustrated |
| index_date | 2024-07-02T19:18:56Z |
| indexdate | 2024-07-31T01:10:23Z |
| institution | BVB |
| isbn | 9780815517801 9780815514442 0815514441 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016239708 |
| oclc_num | 845654113 |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (XXI, 1001 S. Ill., graph. Darst.) |
| psigel | ZDB-10-ESC |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Noyes Publ. [u.a.] |
| record_format | marc |
| series2 | Materials science and processing technology series |
| spelling | Handbook of VLSI microlithography principles, technology, and applications ed. by John N. Helbert 2. ed. Park Ridge, NJ [u.a.] Noyes Publ. [u.a.] 2001 1 Online-Ressource (XXI, 1001 S. Ill., graph. Darst.) txt rdacontent c rdamedia cr rdacarrier Materials science and processing technology series Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf VLSI (DE-588)4117388-0 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s 1\p DE-604 Elektronenstrahllithografie (DE-588)4151897-4 s 2\p DE-604 Helbert, John N. Sonstige oth http://knovel.com/knovel2/Toc.jsp?BookID=470 Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of VLSI microlithography principles, technology, and applications Elektronenstrahllithografie (DE-588)4151897-4 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd VLSI (DE-588)4117388-0 gnd |
| subject_GND | (DE-588)4151897-4 (DE-588)4174516-4 (DE-588)4191584-7 (DE-588)4117388-0 |
| title | Handbook of VLSI microlithography principles, technology, and applications |
| title_auth | Handbook of VLSI microlithography principles, technology, and applications |
| title_exact_search | Handbook of VLSI microlithography principles, technology, and applications |
| title_exact_search_txtP | Handbook of VLSI microlithography principles, technology, and applications |
| title_full | Handbook of VLSI microlithography principles, technology, and applications ed. by John N. Helbert |
| title_fullStr | Handbook of VLSI microlithography principles, technology, and applications ed. by John N. Helbert |
| title_full_unstemmed | Handbook of VLSI microlithography principles, technology, and applications ed. by John N. Helbert |
| title_short | Handbook of VLSI microlithography |
| title_sort | handbook of vlsi microlithography principles technology and applications |
| title_sub | principles, technology, and applications |
| topic | Elektronenstrahllithografie (DE-588)4151897-4 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd VLSI (DE-588)4117388-0 gnd |
| topic_facet | Elektronenstrahllithografie Fotolithografie Halbleitertechnologie Lithografie Halbleitertechnologie VLSI |
| url | http://knovel.com/knovel2/Toc.jsp?BookID=470 |
| work_keys_str_mv | AT helbertjohnn handbookofvlsimicrolithographyprinciplestechnologyandapplications |