APA (7th ed.) Citation

(2001). Handbook of VLSI microlithography: Principles, technology, and applications (2. ed.). Noyes Publ. [u.a.].

Chicago Style (17th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology, and Applications. 2. ed. Park Ridge, NJ [u.a.]: Noyes Publ. [u.a.], 2001.

MLA (9th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology, and Applications. 2. ed. Noyes Publ. [u.a.], 2001.