Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI):
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Park Ridge, NJ
Noyes Publ., Andrew Publ.
1988
|
| Series: | Materials science and process technology series
|
| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource (XIII, 675 S.) |
| ISBN: | 9781591242529 9780815511502 9780815518983 |
Staff View
MARC
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Record in the Search Index
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| genre_facet | Aufsatzsammlung |
| id | DE-604.BV023032251 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T19:17:28Z |
| indexdate | 2024-07-31T01:09:17Z |
| institution | BVB |
| isbn | 9781591242529 9780815511502 9780815518983 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-016236102 |
| oclc_num | 873457263 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (XIII, 675 S.) |
| psigel | ZDB-10-ESC |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| publisher | Noyes Publ., Andrew Publ. |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) ed. by Gary E. McGuire Park Ridge, NJ Noyes Publ., Andrew Publ. 1988 1 Online-Ressource (XIII, 675 S.) txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleiterwerkstoff (DE-588)4158817-4 gnd rswk-swf ULSI (DE-588)4226286-0 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Halbleiterwerkstoff (DE-588)4158817-4 s VLSI (DE-588)4117388-0 s ULSI (DE-588)4226286-0 s MacGuire, Gary E. Sonstige oth http://knovel.com/knovel2/Toc.jsp?BookID=385 Volltext |
| spellingShingle | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd ULSI (DE-588)4226286-0 gnd VLSI (DE-588)4117388-0 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4158817-4 (DE-588)4226286-0 (DE-588)4117388-0 (DE-588)4143413-4 |
| title | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) |
| title_auth | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) |
| title_exact_search | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) |
| title_exact_search_txtP | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) |
| title_full | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) ed. by Gary E. McGuire |
| title_fullStr | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) ed. by Gary E. McGuire |
| title_full_unstemmed | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) ed. by Gary E. McGuire |
| title_short | Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI) |
| title_sort | semiconductor materials and process technology handbook for very large scale integration vlsi and ultra large scale integration ulsi |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd ULSI (DE-588)4226286-0 gnd VLSI (DE-588)4117388-0 gnd |
| topic_facet | Halbleitertechnologie Halbleiterwerkstoff ULSI VLSI Aufsatzsammlung |
| url | http://knovel.com/knovel2/Toc.jsp?BookID=385 |
| work_keys_str_mv | AT macguiregarye semiconductormaterialsandprocesstechnologyhandbookforverylargescaleintegrationvlsiandultralargescaleintegrationulsi |