APA-Zitierstil (7. Ausg.)

(1988). Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI). Noyes Publ., Andrew Publ.

Chicago-Zitierstil (17. Ausg.)

Semiconductor Materials and Process Technology Handbook for Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI). Park Ridge, NJ: Noyes Publ., Andrew Publ, 1988.

MLA-Zitierstil (9. Ausg.)

Semiconductor Materials and Process Technology Handbook for Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI). Noyes Publ., Andrew Publ, 1988.