Titannitrid- und Titan-Schichten für die Nano-Elektromechanik:
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Bibliographic Details
Main Author: Pritschow, Marcus 1975- (Author)
Format: Thesis Electronic eBook
Language:German
Published: 2007
Subjects:
Online Access:Volltext
kostenfrei
http://elib.uni-stuttgart.de/opus/volltexte/2007/3057/
http://d-nb.info/984537635/34
Physical Description:1 Online-Ressource

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