Holdings: Intense electron and ion beams

Intense electron and ion beams:

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Bibliographic Details
Main Authors:	Molokovskij, Sergej I. (Author), Suškov, Aleksandr D. (Author)
Format:	Book
Language:	English
Published:	Berlin ; Heidelberg ; New York Springer 2005
Subjects:	Electron beams Ion bombardment Lasers Particle beams Ionenstrahl Elektronenstrahl
Online Access:	Inhaltsverzeichnis
Item Description:	Literaturverz. S. 269 - 277
Physical Description:	XII, 281 S. graph. Darst. 24 cm
ISBN:	3540242201

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100	1		\|a Molokovskij, Sergej I. \|e Verfasser \|4 aut
245	1	0	\|a Intense electron and ion beams \|c S. I. Molokovsky ; A. D. Sushkov
264		1	\|a Berlin ; Heidelberg ; New York \|b Springer \|c 2005
300			\|a XII, 281 S. \|b graph. Darst. \|c 24 cm
336			\|b txt \|2 rdacontent
337			\|b n \|2 rdamedia
338			\|b nc \|2 rdacarrier
500			\|a Literaturverz. S. 269 - 277
650		4	\|a Electron beams
650		4	\|a Ion bombardment
650		4	\|a Lasers
650		4	\|a Particle beams
650	0	7	\|a Ionenstrahl \|0 (DE-588)4162347-2 \|2 gnd \|9 rswk-swf
650	0	7	\|a Elektronenstrahl \|0 (DE-588)4151894-9 \|2 gnd \|9 rswk-swf
689	0	0	\|a Elektronenstrahl \|0 (DE-588)4151894-9 \|D s
689	0		\|5 DE-604
689	1	0	\|a Ionenstrahl \|0 (DE-588)4162347-2 \|D s
689	1		\|5 DE-604
700	1		\|a Suškov, Aleksandr D. \|e Verfasser \|4 aut
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Record in the Search Index

_version_	1804136560237477888
adam_text	S.I. MOLOKOVSKY A.D. SUSHKOV INTENSE ELECTRON AND ION BEAMS WITH 140 FIGURES 4Y SPRINGER CONTENTS 1 INTRODUCTION TO PARTICLE-BEAM FORMATION 1 1.1 APPLICATION AND PARAMETERS OF INTENSE CHARGED-PARTICLE BEAMS 1 1.2 OPTICAL SYSTEMS OF ELECTRON DEVICES 4 1.2.1 ELECTRON GUNS 4 1.2.2 ELECTRON GUNS WITH BEAM CURRENT CONTROL 6 1.3 FOCUSING SYSTEM OF ELECTRON DEVICES 9 1.3.1 MAGNETIC FOCUSING WITH UNIFORM FIELD 9 1.3.2 MAGNETIC PERIODIC FOCUSING 11 1.3.3 PERIODIC ELECTROSTATIC FOCUSING 12 1.3.4 HOLLOW-BEAM FOCUSING 13 1.4 OPTICAL SYSTEMS OF PARTICLE-BEAM TECHNOLOGY 14 1.4.1 INSTALLATIONS OF ELECTRON BEAM WELDING AND MELTING 14 1.5 ION OPTICAL SYSTEMS 16 2 METHODS OF FIELDS CALCULATION 19 2.1 GENERAL EQUATIONS OF ELECTROSTATIC FIELDS 19 2.2 ELECTROSTATIC FIELD CALCULATION. DIRICHLET PROBLEM 20 2.2.1 METHOD OF THE SEPARATION OF VARIABLES 20 2.2.2 METHOD OF GREEN FUNCTION 23 2.2.3 METHOD OF THE INTEGRAL EQUATIONS 26 2.2.4 METHOD OF FINITE DIFFERENCE 27 2.3 CALCULATION OF ELECTROSTATIC FIELD: CAUCHY PROBLEM 30 2.3.1 METHOD OF ANALYTICAL CONTINUATION 31 2.4 COMPUTER CALCULATION OF ELECTROSTATIC FIELDS ... . 36 2.4.1 METHOD OF FINITE DIFFERENCE 36 2.4.2 METHOD OF INTEGRAL EQUATIONS 38 2.4.3 METHOD OF GREEN FUNCTION 41 2.5 GENERAL EQUATIONS OF MAGNETIC FIELD 43 2.5.1 MAGNETIC VECTOR POTENTIAL 44 2.5.2 SCALAR MAGNETIC POTENTIAL 46 2.6 NUMERICAL CALCULATION OF MAGNETIC FIELD 47 2.6.1 FIEKKOF A SOLENOID 47 2.6.2 FIELD OF A RING-SHAPED MAGNET 48 VIII CONTENTS 2.6.3 TECHNIQUE OF SOLUTION OF NONLINEAR MAGNETIC PROBLEMS 50 3 FUNDAMENTALS OF CHARGED-PARTICLE MOTION 55 3.1 EQUATIONS OF MOTION IN NEWTON FORM 55 3.2 LAW OF ENERGY CONSERVATION 56 3.3 LAGRANGE EQUATIONS OF MOTION 58 3.4 HAMILTON EQUATIONS 59 3.5 HAMILTON-JACOBI EQUATION 60 3.6 EQUATIONS OF MOTION IN AXIALLY SYMMETRIC FIELDS 62 3.6.1 EQUATIONS OF MOTION IN NEWTON FORM 62 3.6.2 LAGRANGE AND HAMILTON EQUATIONS OF MOTION 66 3.6.3 HAMILTON-JACOBI EQUATION OF MOTION 67 3.6.4 MOTION OF ELECTRONS IN CYLINDRICAL MAGNETRON 67 3.7 MOTION IN PLANAR TWO-DIMENSIONAL FIELDS 73 3.7.1 EQUATIONS OF MOTION IN NEWTON FORM 73 3.7.2 LAGRANGE AND HAMILTON EQUATIONS 73 3.8 NUMERICAL CALCULATION OF CHARGED-PARTICLE TRAJECTORIES .... 74 3.8.1 METHOD OF TAYLOR SERIES 74 3.8.2 RUNGE-KUTTA METHOD OF FOURTH ORDER OF ACCURACY . 75 3.8.3 SPATIAL METHOD OF TRAJECTORY TRACING 76 3.9 ELECTROSTATIC CHARGED-PARTICLE LENSES 77 3.9.1 TYPES OF AXIALLY SYMMETRIC ELECTROSTATIC LENSES ... 77 3.9.2 FOCUSING PROPERTIES OF ELECTROSTATIC LENSES 77 3.10 MAGNETIC LENSES .... . 86 3.10.1 THIN MAGNETIC LENS APPROXIMATION 86 3.10.2 THICK MAGNETIC LENS 87 3.10.3 PARAMETERS OF SOME MAGNETIC LENSES 88 3.10.4 MAGNETIC LENSES WITH PERMANENT MAGNETS 91 4 MOTION OF INTENSE CHARGED-PARTICLE BEAMS 95 4.1 PECULIARITIES OF INTENSE PARTICLE-BEAM MOTION 95 4.1.1 EFFECTS OF SELF-FIELDS AND VELOCITY SPREADING 95 4.1.2 MATHEMATICAL DESCRIPTION OF MULTIPLE-VELOCITY BEAMS * 96 4.2 SIMPLIFIED MODELS OF CHARGED-PARTICLE BEAMS 98 4.2.1 MONOVELOCITY MODELS 98 4.2.2 HYDRODYNAMIC (LAMINAR) MODEL OF FLOW 100 4.2.3 QUASIHYDRODYNAMIC FLOW MODEL 102 4.3 METHODS OF SOLUTION OF MOTION EQUATIONS 102 4.3.1 METHOD OF CURVILINEAR COORDINATES 102 4.3.2 METHOD OF EXPANSION IN SERIES. PAR AXIAL-TRAJECTORY EQUATION 104 4.4 APPROXIMATE METHOD OF SPACE-CHARGE ACCOUNT 105 CONTENTS IX 4.5 MOTION OF CHARGE-BEAMS IN CHANNELS FREE FROM EXTERNAL FIELDS 107 4.6 INFLUENCE OF RESIDUAL GASES ON ELECTRON-BEAM MOTION 110 4.6.1 EFFECT OF SPACE-CHARGE NEUTRALIZATION BY POSITIVE IONS 110 4.6.2 PROCESS OF NEUTRALIZATION OF THE ELECTRON BEAM IN A LONG CHANNEL 110 4.6.3 EFFECT OF ION BACKGROUND ON ELECTRON-BEAM MOTION 112 4.6.4 ION FOCUSING 112 4.6.5 SCATTERING OF ELECTRON BEAM BY MOLECULES OF RESIDUAL GAS 114 4.7 ESTIMATION OF EFFECT OF THERMAL ELECTRON VELOCITIES 117 4.7.1 CALCULATION OF TRANSVERSE PARTICLE DISPLACEMENT .... 117 4.7.2 CALCULATION OF CURRENT-DENSITY REDISTRIBUTION 119 4.8 METHODS OF SOLUTION OF SELF-CONSISTENT PROBLEMS 121 4.8.1 METHOD OF SUCCESSIVE APPROXIMATION 121 4.8.2 METHOD OF STEP BY STEP (OR ALGORITHM MODELING OF TRANSIENT PROCESS) 123 5 ELECTRON GUNS 125 5.1 THE PROBLEM OF ELECTRON-BEAM FORMATION 125 5.2 GUNS FOR FORMATION OF STRIP BEAMS 126 5.2.1 PARALLEL STRIP BEAM 126 5.2.2 WEDGE-SHAPED BEAM 128 5.2.3 STRIP-BEAM FORMING IN CROSSED FIELDS 129 5.3 GUNS FOR SOLID AXIALLY SYMMETRIC BEAMS 133 5.3.1 PARALLEL CYLINDRICAL BEAM 133 5.3.2 PIERCE GUN FOR CONVERGENT BEAM 134 5.3.3 SYNTHESIS OF GUNS BY OVCHAROV S METHOD 138 5.4 GUNS FOR FORMATION OF HOLLOW AXISYMMETRIC BEAMS 141 5.4.1 PARALLEL TUBULAR BEAM 141 5.4.2 CONVERGENT HOLLOW BEAM 141 5.4.3 MAGNETRON GUNS FOR FORMATION OF HOLLOW BEAMS * . 142 5.5 ELECTRON GUNS WITH BEAM-CURRENT CONTROL 145 5.5.1 GUNS WITH GRID CONTROL ELECTRODES 146 5.5.2 ELECTRON GUN WITH DIAPHRAGM CONTROL ELECTRODE ... 151 5.6 PRINCIPLE OF COMPUTER-AIDED DESIGN OF ELECTRON GUNS 151 5.6.1 SYNTHESIS OF ELECTRON GUN 152 5.6.2 ELECTRON-GUN ANALYSIS 152 6 ELECTRON AND ION SOURCES WITH FIELD AND PLASMA EMITTERS 157 6.1 SOME PECULIARITIES OF FIELD AND PLASMA EMITTERS 157 6.2 LOW-CURRENT FIELD-EMISSION GUNS 157 X CONTENTS 6.3 MULTIPLE-TIP FIELD-EMISSION CATHODES 159 6.4 HIGH-CURRENT ELECTRON SOURCES WITH EXPLOSIVE EMISSION .... 160 6.5 LIQUID-METAL EMITTERS 160 6.6 PLASMA SOURCES OF CHARGED PARTICLES 161 6.6.1 DUOPLASMATRONS 161 6.6.2 COLD-CATHODE SOURCES 162 6.6.3 HIGH-FREQUENCY ION SOURCES 163 6.6.4 MICROWAVE ION SOURCES 163 6.7 EXTRACTING OF CHARGE PARTICLES AND BEAM FORMING 165 6.7.1 EXTRACTION OF IONS FROM PLANAR PLASMA BOUNDARY . . 165 6.7.2 SYSTEM OF EXTRACTION WITH EXPANSION CUP 166 6.7.3 PROBE SYSTEM OF EXTRACTION 167 7 MAGNETIC FOCUSING SYSTEMS 169 7.1 FOCUSING SYSTEMS WITH UNIFORM FIELD 169 7.1.1 PRINCIPLE OF FOCUSING 169 7.1.2 BALANCED (BRILLOUIN) AXIALLY SYMMETRIC BEAM 170 7.1.3 UNBALANCED BEAM IN UNIFORM FIELD 172 7.1.4 BEAM FORMED WITH PARTIALLY SHIELDED GUN 174 7.1.5 BALANCED NONLAMINAR BEAM 176 7.1.6 MAGNETIC SYSTEMS FOR UNIFORM FIELD 180 7.2 SYSTEMS OF REVERSED- AND PERIODIC-FIELD FOCUSING 181 7.2.1 PRINCIPLE OF REVERSED-FIELD FOCUSING 181 7.2.2 ESTIMATION OF BEAM DISTURBANCES 183 7.2.3 PRINCIPLE OF PERIODIC-FIELD FOCUSING 184 7.2.4 ANALYSIS OF PERIODIC FOCUSING 185 7.2.5 STABILITY OF PERIODIC FOCUSING 187 7.3 FOCUSING OF HOLLOW BEAMS IN UNIFORM FIELD 188 7.3.1 EQUILIBRIUM HOLLOW BEAM 189 7.3.2 INJECTION OF HOLLOW BEAMS IN UNIFORM FIELD 191 7.3.3 BOUNDARY TRAJECTORY PULSATION 192 7.4 FOCUSING OF STRIP BEAMS 193 7.4.1 UNIFORM-FIELD FOCUSING 193 7.4.2 PERIODIC MAGNETIC FOCUSING 195 7.5 COMPUTER-AIDED DESIGN OF MAGNETIC SYSTEMS 196 8 ELECTROSTATIC FOCUSING SYSTEMS 199 8.1 FOCUSING SYSTEM FOR SOLID AXIALLY SYMMETRICAL BEAMS 199 8.1.1 EQUILIBRIUM CYLINDRICAL BEAM 199 8.1.2 FOCUSING SYSTEM WITH PERIODIC POTENTIAL DISTRIBUTION 201 8.1.3 PERIODIC SYSTEM OF APERTURED DISKS 203 8.1.4 SYSTEM OF UNIPOTENTIAL ELECTROSTATIC LENSES 203 8.2 SYSTEMS FOR FOCUSING OF STRIP BEAMS 210 8.2.1 EQUILIBRIUM STRIP BEAM . 210 CONTENTS XI 8.2.2 PERIODIC ELECTROSTATIC SYSTEM 211 8.3 FOCUSING SYSTEMS FOR HOLLOW BEAMS 211 8.3.1 PERIODIC ELECTROSTATIC FOCUSING 211 8.3.2 CENTRIFUGAL ELECTROSTATIC FOCUSING 213 9 OPTICAL SYSTEMS OF TECHNOLOGICAL INSTALLATIONS 215 9.1 ELECTRON PROBE OF WELDING INSTALLATION 215 9.1.1 EFFECT OF THERMAL VELOCITIES 216 9.1.2 ABERRATIONS OF OPTICAL SYSTEM 216 9.1.3 EFFECTS OF SELF-FIELDS AND SCATTERING OF ELECTRONS ... 219 9.2 OPTICAL SYSTEM FOR ELECTRON-BEAM LITHOGRAPHY 219 9.2.1 SYSTEM WITH THERMAL CATHODE 219 9.2.2 SYSTEM WITH COLD FIELD EMITTER 221 9.3 ION PROBES 221 10 INTENSE RELATIVISTIC CHARGED-PARTICLE BEAMS 223 10.1 RELATIVISTIC EQUATIONS OF MOTION 223 10.1.1 LAW OF ENERGY CONSERVATION 224 10.1.2 EQUATIONS OF MOTION IN AXIALLY SYMMETRY FIELDS . . . 224 10.2 INTENSE RELATIVISTIC BEAMS IN VACUUM CHANNELS 225 10.2.1 ELECTRON BEAM SPREAD UNDER SELF-FIELDS ACTION .... 225 10.2.2 BEAM CURRENT LIMITATION 227 10.2.3 BRILLOUIN RELATIVISTIC ELECTRON BEAM 229 10.3 NEUTRALIZED RELATIVISTIC BEAMS 232 10.3.1 BEAMS IN SPACE FREE FROM EXTERNAL FIELDS 232 10.3.2 NEUTRALIZED MAGNETICALLY CONFINED BEAMS 232 10.4 BEAM-MOTION COMPUTATION 232 10.4.1 AXIALLY SYMMETRIC LENS SYSTEMS 233 10.4.2 QUADRUPLE LENS SYSTEMS 234 11 MULTIPLE-BEAM ELECTRON-OPTICAL SYSTEMS 237 11.1 PECULIARITIES AND APPLICATION OF MULTIPLE BEAMS 237 11.2 MULTIPLE-BEAM GUNS AND MAGNETIC SYSTEMS 239 11.2.1 ELECTRON GUNS 239 11.2.2 MAGNETIC FOCUSING SYSTEMS . 241 11.3 PECULIARITIES OF MULTIPLE SYSTEMS 243 11.3.1 ANALYSIS OF STRAY-FIELDS ACTION 243 11.3.2 TRANSVERSE FIELDS 244 11.4 ESTIMATION OF EFFECTS OF TRANSVERSE FIELDS 248 11.5 ANALYSIS OF BEAM INTERACTION 250 12 METHODS OF EXPERIMENTAL INVESTIGATION OF BEAMS 255 12.1 CLASSIFICATION OF METHODS 255 12.2 THE PIN-HOLE-CHAMBER METHOD 258 12.3 APPLICATION OF MODIFIED PIN-HOLE CHAMBER 261 XII CONTENTS APPENDIX 265 REFERENCES 269 INDEX 279
adam_txt	S.I. MOLOKOVSKY A.D. SUSHKOV INTENSE ELECTRON AND ION BEAMS WITH 140 FIGURES 4Y SPRINGER CONTENTS 1 INTRODUCTION TO PARTICLE-BEAM FORMATION 1 1.1 APPLICATION AND PARAMETERS OF INTENSE CHARGED-PARTICLE BEAMS 1 1.2 OPTICAL SYSTEMS OF ELECTRON DEVICES 4 1.2.1 ELECTRON GUNS 4 1.2.2 ELECTRON GUNS WITH BEAM CURRENT CONTROL 6 1.3 FOCUSING SYSTEM OF ELECTRON DEVICES 9 1.3.1 MAGNETIC FOCUSING WITH UNIFORM FIELD 9 1.3.2 MAGNETIC PERIODIC FOCUSING 11 1.3.3 PERIODIC ELECTROSTATIC FOCUSING 12 1.3.4 HOLLOW-BEAM FOCUSING 13 1.4 OPTICAL SYSTEMS OF PARTICLE-BEAM TECHNOLOGY 14 1.4.1 INSTALLATIONS OF ELECTRON BEAM WELDING AND MELTING 14 1.5 ION OPTICAL SYSTEMS 16 2 METHODS OF FIELDS CALCULATION 19 2.1 GENERAL EQUATIONS OF ELECTROSTATIC FIELDS 19 2.2 ELECTROSTATIC FIELD CALCULATION. DIRICHLET PROBLEM 20 2.2.1 METHOD OF THE SEPARATION OF VARIABLES 20 2.2.2 METHOD OF GREEN FUNCTION 23 2.2.3 METHOD OF THE INTEGRAL EQUATIONS 26 2.2.4 METHOD OF FINITE DIFFERENCE 27 2.3 CALCULATION OF ELECTROSTATIC FIELD: CAUCHY PROBLEM 30 2.3.1 METHOD OF ANALYTICAL CONTINUATION 31 2.4 COMPUTER CALCULATION OF ELECTROSTATIC FIELDS .'. 36 2.4.1 METHOD OF FINITE DIFFERENCE 36 2.4.2 METHOD OF INTEGRAL EQUATIONS 38 2.4.3 METHOD OF GREEN FUNCTION 41 2.5 GENERAL EQUATIONS OF MAGNETIC FIELD 43 2.5.1 MAGNETIC VECTOR POTENTIAL 44 2.5.2 SCALAR MAGNETIC POTENTIAL 46 2.6 NUMERICAL CALCULATION OF MAGNETIC FIELD 47 2.6.1 FIEKKOF A SOLENOID 47 2.6.2 FIELD OF A RING-SHAPED MAGNET 48 VIII CONTENTS 2.6.3 TECHNIQUE OF SOLUTION OF NONLINEAR MAGNETIC PROBLEMS 50 3 FUNDAMENTALS OF CHARGED-PARTICLE MOTION 55 3.1 EQUATIONS OF MOTION IN NEWTON FORM 55 3.2 LAW OF ENERGY CONSERVATION 56 3.3 LAGRANGE EQUATIONS OF MOTION 58 3.4 HAMILTON EQUATIONS 59 3.5 HAMILTON-JACOBI EQUATION 60 3.6 EQUATIONS OF MOTION IN AXIALLY SYMMETRIC FIELDS 62 3.6.1 EQUATIONS OF MOTION IN NEWTON FORM 62 3.6.2 LAGRANGE AND HAMILTON EQUATIONS OF MOTION 66 3.6.3 HAMILTON-JACOBI EQUATION OF MOTION 67 3.6.4 MOTION OF ELECTRONS IN CYLINDRICAL MAGNETRON 67 3.7 MOTION IN PLANAR TWO-DIMENSIONAL FIELDS 73 3.7.1 EQUATIONS OF MOTION IN NEWTON FORM 73 3.7.2 LAGRANGE AND HAMILTON EQUATIONS 73 3.8 NUMERICAL CALCULATION OF CHARGED-PARTICLE TRAJECTORIES . 74 3.8.1 METHOD OF TAYLOR SERIES 74 3.8.2 RUNGE-KUTTA METHOD OF FOURTH ORDER OF ACCURACY . 75 3.8.3 SPATIAL METHOD OF TRAJECTORY TRACING 76 3.9 ELECTROSTATIC CHARGED-PARTICLE LENSES 77 3.9.1 TYPES OF AXIALLY SYMMETRIC ELECTROSTATIC LENSES . 77 3.9.2 FOCUSING PROPERTIES OF ELECTROSTATIC LENSES 77 3.10 MAGNETIC LENSES .'. 86 3.10.1 THIN MAGNETIC LENS APPROXIMATION 86 3.10.2 THICK MAGNETIC LENS 87 3.10.3 PARAMETERS OF SOME MAGNETIC LENSES 88 3.10.4 MAGNETIC LENSES WITH PERMANENT MAGNETS 91 4 MOTION OF INTENSE CHARGED-PARTICLE BEAMS 95 4.1 PECULIARITIES OF INTENSE PARTICLE-BEAM MOTION 95 4.1.1 EFFECTS OF SELF-FIELDS AND VELOCITY SPREADING 95 4.1.2 MATHEMATICAL DESCRIPTION OF MULTIPLE-VELOCITY BEAMS * 96 4.2 SIMPLIFIED MODELS OF CHARGED-PARTICLE BEAMS 98 4.2.1 MONOVELOCITY MODELS 98 4.2.2 HYDRODYNAMIC (LAMINAR) MODEL OF FLOW 100 4.2.3 QUASIHYDRODYNAMIC FLOW MODEL 102 4.3 METHODS OF SOLUTION OF MOTION EQUATIONS 102 4.3.1 METHOD OF CURVILINEAR COORDINATES 102 4.3.2 METHOD OF EXPANSION IN SERIES. PAR AXIAL-TRAJECTORY EQUATION 104 4.4 APPROXIMATE METHOD OF SPACE-CHARGE ACCOUNT 105 CONTENTS IX 4.5 MOTION OF CHARGE-BEAMS IN CHANNELS FREE FROM EXTERNAL FIELDS 107 4.6 INFLUENCE OF RESIDUAL GASES ON ELECTRON-BEAM MOTION 110 4.6.1 EFFECT OF SPACE-CHARGE NEUTRALIZATION BY POSITIVE IONS 110 4.6.2 PROCESS OF NEUTRALIZATION OF THE ELECTRON BEAM IN A LONG CHANNEL 110 4.6.3 EFFECT OF ION BACKGROUND ON ELECTRON-BEAM MOTION 112 4.6.4 ION FOCUSING 112 4.6.5 SCATTERING OF ELECTRON BEAM BY MOLECULES OF RESIDUAL GAS 114 4.7 ESTIMATION OF EFFECT OF THERMAL ELECTRON VELOCITIES 117 4.7.1 CALCULATION OF TRANSVERSE PARTICLE DISPLACEMENT . 117 4.7.2 CALCULATION OF CURRENT-DENSITY REDISTRIBUTION 119 4.8 METHODS OF SOLUTION OF SELF-CONSISTENT PROBLEMS 121 4.8.1 METHOD OF SUCCESSIVE APPROXIMATION 121 4.8.2 METHOD OF "STEP BY STEP" (OR ALGORITHM MODELING OF TRANSIENT PROCESS) 123 5 ELECTRON GUNS 125 5.1 THE PROBLEM OF ELECTRON-BEAM FORMATION 125 5.2 GUNS FOR FORMATION OF STRIP BEAMS 126 5.2.1 PARALLEL STRIP BEAM 126 5.2.2 WEDGE-SHAPED BEAM 128 5.2.3 STRIP-BEAM FORMING IN CROSSED FIELDS ' 129 5.3 GUNS FOR SOLID AXIALLY SYMMETRIC BEAMS 133 5.3.1 PARALLEL CYLINDRICAL BEAM 133 5.3.2 PIERCE GUN FOR CONVERGENT BEAM 134 5.3.3 SYNTHESIS OF GUNS BY OVCHAROV'S METHOD 138 5.4 GUNS FOR FORMATION OF HOLLOW AXISYMMETRIC BEAMS 141 5.4.1 PARALLEL TUBULAR BEAM 141 5.4.2 CONVERGENT HOLLOW BEAM 141 5.4.3 MAGNETRON GUNS FOR FORMATION OF HOLLOW BEAMS * . 142 5.5 ELECTRON GUNS WITH BEAM-CURRENT CONTROL 145 5.5.1 GUNS WITH GRID CONTROL ELECTRODES 146 5.5.2 ELECTRON GUN WITH DIAPHRAGM CONTROL ELECTRODE . 151 5.6 PRINCIPLE OF COMPUTER-AIDED DESIGN OF ELECTRON GUNS 151 5.6.1 SYNTHESIS OF ELECTRON GUN 152 5.6.2 ELECTRON-GUN ANALYSIS 152 6 ELECTRON AND ION SOURCES WITH FIELD AND PLASMA EMITTERS 157 6.1 SOME PECULIARITIES OF FIELD AND PLASMA EMITTERS 157 6.2 LOW-CURRENT FIELD-EMISSION GUNS 157 X CONTENTS 6.3 MULTIPLE-TIP FIELD-EMISSION CATHODES 159 6.4 HIGH-CURRENT ELECTRON SOURCES WITH EXPLOSIVE EMISSION . 160 6.5 LIQUID-METAL EMITTERS 160 6.6 PLASMA SOURCES OF CHARGED PARTICLES 161 6.6.1 DUOPLASMATRONS 161 6.6.2 COLD-CATHODE SOURCES 162 6.6.3 HIGH-FREQUENCY ION SOURCES 163 6.6.4 MICROWAVE ION SOURCES 163 6.7 EXTRACTING OF CHARGE PARTICLES AND BEAM FORMING 165 6.7.1 EXTRACTION OF IONS FROM PLANAR PLASMA BOUNDARY . . 165 6.7.2 SYSTEM OF EXTRACTION WITH EXPANSION CUP 166 6.7.3 PROBE SYSTEM OF EXTRACTION 167 7 MAGNETIC FOCUSING SYSTEMS 169 7.1 FOCUSING SYSTEMS WITH UNIFORM FIELD 169 7.1.1 PRINCIPLE OF FOCUSING 169 7.1.2 BALANCED (BRILLOUIN) AXIALLY SYMMETRIC BEAM 170 7.1.3 UNBALANCED BEAM IN UNIFORM FIELD 172 7.1.4 BEAM FORMED WITH PARTIALLY SHIELDED GUN 174 7.1.5 BALANCED NONLAMINAR BEAM 176 7.1.6 MAGNETIC SYSTEMS FOR UNIFORM FIELD 180 7.2 SYSTEMS OF REVERSED- AND PERIODIC-FIELD FOCUSING 181 7.2.1 PRINCIPLE OF REVERSED-FIELD FOCUSING 181 7.2.2 ESTIMATION OF BEAM DISTURBANCES 183 7.2.3 PRINCIPLE OF PERIODIC-FIELD FOCUSING 184 7.2.4 ANALYSIS OF PERIODIC FOCUSING " 185 7.2.5 STABILITY OF PERIODIC FOCUSING 187 7.3 FOCUSING OF HOLLOW BEAMS IN UNIFORM FIELD 188 7.3.1 EQUILIBRIUM HOLLOW BEAM 189 7.3.2 INJECTION OF HOLLOW BEAMS IN UNIFORM FIELD 191 7.3.3 BOUNDARY TRAJECTORY PULSATION 192 7.4 FOCUSING OF STRIP BEAMS 193 7.4.1 UNIFORM-FIELD FOCUSING 193 7.4.2 PERIODIC MAGNETIC FOCUSING 195 7.5 COMPUTER-AIDED DESIGN OF MAGNETIC SYSTEMS 196 8 ELECTROSTATIC FOCUSING SYSTEMS 199 8.1 FOCUSING SYSTEM FOR SOLID AXIALLY SYMMETRICAL BEAMS 199 8.1.1 EQUILIBRIUM CYLINDRICAL BEAM 199 8.1.2 FOCUSING SYSTEM WITH PERIODIC POTENTIAL DISTRIBUTION 201 8.1.3 PERIODIC SYSTEM OF APERTURED DISKS 203 8.1.4 SYSTEM OF UNIPOTENTIAL ELECTROSTATIC LENSES 203 8.2 SYSTEMS FOR FOCUSING OF STRIP BEAMS 210 8.2.1 EQUILIBRIUM STRIP BEAM . 210 CONTENTS XI 8.2.2 PERIODIC ELECTROSTATIC SYSTEM 211 8.3 FOCUSING SYSTEMS FOR HOLLOW BEAMS 211 8.3.1 PERIODIC ELECTROSTATIC FOCUSING 211 8.3.2 CENTRIFUGAL ELECTROSTATIC FOCUSING 213 9 OPTICAL SYSTEMS OF TECHNOLOGICAL INSTALLATIONS 215 9.1 ELECTRON PROBE OF WELDING INSTALLATION 215 9.1.1 EFFECT OF THERMAL VELOCITIES 216 9.1.2 ABERRATIONS OF OPTICAL SYSTEM 216 9.1.3 EFFECTS OF SELF-FIELDS AND SCATTERING OF ELECTRONS . 219 9.2 OPTICAL SYSTEM FOR ELECTRON-BEAM LITHOGRAPHY 219 9.2.1 SYSTEM WITH THERMAL CATHODE 219 9.2.2 SYSTEM WITH COLD FIELD EMITTER 221 9.3 ION PROBES 221 10 INTENSE RELATIVISTIC CHARGED-PARTICLE BEAMS 223 10.1 RELATIVISTIC EQUATIONS OF MOTION 223 10.1.1 LAW OF ENERGY CONSERVATION 224 10.1.2 EQUATIONS OF MOTION IN AXIALLY SYMMETRY FIELDS . . . 224 10.2 INTENSE RELATIVISTIC BEAMS IN VACUUM CHANNELS 225 10.2.1 ELECTRON BEAM SPREAD UNDER SELF-FIELDS ACTION . 225 10.2.2 BEAM CURRENT LIMITATION 227 10.2.3 BRILLOUIN RELATIVISTIC ELECTRON BEAM 229 10.3 NEUTRALIZED RELATIVISTIC BEAMS 232 10.3.1 BEAMS IN SPACE FREE FROM EXTERNAL FIELDS 232 10.3.2 NEUTRALIZED MAGNETICALLY CONFINED BEAMS 232 10.4 BEAM-MOTION COMPUTATION 232 10.4.1 AXIALLY SYMMETRIC LENS SYSTEMS 233 10.4.2 QUADRUPLE LENS SYSTEMS 234 11 MULTIPLE-BEAM ELECTRON-OPTICAL SYSTEMS 237 11.1 PECULIARITIES AND APPLICATION OF MULTIPLE BEAMS 237 11.2 MULTIPLE-BEAM GUNS AND MAGNETIC SYSTEMS 239 11.2.1 ELECTRON GUNS 239 11.2.2 MAGNETIC FOCUSING SYSTEMS . 241 11.3 PECULIARITIES OF MULTIPLE SYSTEMS ' 243 11.3.1 ANALYSIS OF STRAY-FIELDS ACTION 243 11.3.2 TRANSVERSE FIELDS 244 11.4 ESTIMATION OF EFFECTS OF TRANSVERSE FIELDS 248 11.5 ANALYSIS OF BEAM INTERACTION 250 12 METHODS OF EXPERIMENTAL INVESTIGATION OF BEAMS 255 12.1 CLASSIFICATION OF METHODS 255 12.2 THE PIN-HOLE-CHAMBER METHOD 258 12.3 APPLICATION OF MODIFIED PIN-HOLE CHAMBER 261 XII CONTENTS APPENDIX 265 REFERENCES 269 INDEX 279
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language	English
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spelling	Molokovskij, Sergej I. Verfasser aut Intense electron and ion beams S. I. Molokovsky ; A. D. Sushkov Berlin ; Heidelberg ; New York Springer 2005 XII, 281 S. graph. Darst. 24 cm txt rdacontent n rdamedia nc rdacarrier Literaturverz. S. 269 - 277 Electron beams Ion bombardment Lasers Particle beams Ionenstrahl (DE-588)4162347-2 gnd rswk-swf Elektronenstrahl (DE-588)4151894-9 gnd rswk-swf Elektronenstrahl (DE-588)4151894-9 s DE-604 Ionenstrahl (DE-588)4162347-2 s Suškov, Aleksandr D. Verfasser aut HEBIS Datenaustausch Darmstadt application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015679920&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Molokovskij, Sergej I. Suškov, Aleksandr D. Intense electron and ion beams Electron beams Ion bombardment Lasers Particle beams Ionenstrahl (DE-588)4162347-2 gnd Elektronenstrahl (DE-588)4151894-9 gnd
subject_GND	(DE-588)4162347-2 (DE-588)4151894-9
title	Intense electron and ion beams
title_auth	Intense electron and ion beams
title_exact_search	Intense electron and ion beams
title_exact_search_txtP	Intense electron and ion beams
title_full	Intense electron and ion beams S. I. Molokovsky ; A. D. Sushkov
title_fullStr	Intense electron and ion beams S. I. Molokovsky ; A. D. Sushkov
title_full_unstemmed	Intense electron and ion beams S. I. Molokovsky ; A. D. Sushkov
title_short	Intense electron and ion beams
title_sort	intense electron and ion beams
topic	Electron beams Ion bombardment Lasers Particle beams Ionenstrahl (DE-588)4162347-2 gnd Elektronenstrahl (DE-588)4151894-9 gnd
topic_facet	Electron beams Ion bombardment Lasers Particle beams Ionenstrahl Elektronenstrahl
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015679920&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT molokovskijsergeji intenseelectronandionbeams AT suskovaleksandrd intenseelectronandionbeams

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