Plasma processing: [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006]
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Tokyo
Japan Soc. of Applied Physics
2006
|
| Series: | Japanese journal of applied physics : 1
45,10,2 = 45,10B : special issue |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | S. 8035 - 8536, (29) S. Ill., graph. Darst. |
Staff View
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Record in the Search Index
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| genre | (DE-588)1071861417 Konferenzschrift 2006 Matsushima Miyagi gnd-content Kongress - Matsushima <Miyagi, 2006> - Plasmastrahlbearbeitung |
| genre_facet | Konferenzschrift 2006 Matsushima Miyagi Kongress - Matsushima <Miyagi, 2006> - Plasmastrahlbearbeitung |
| id | DE-604.BV022365761 |
| illustrated | Illustrated |
| index_date | 2024-07-02T17:05:12Z |
| indexdate | 2024-07-09T20:56:03Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015575021 |
| oclc_num | 255201438 |
| open_access_boolean | |
| owner | DE-384 |
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| physical | S. 8035 - 8536, (29) S. Ill., graph. Darst. |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | Japan Soc. of Applied Physics |
| record_format | marc |
| series2 | Japanese journal of applied physics : 1 |
| spelling | Plasma processing [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] ed. by Akihiro Kono ... Tokyo Japan Soc. of Applied Physics 2006 S. 8035 - 8536, (29) S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Japanese journal of applied physics : 1 45,10,2 = 45,10B : special issue Einzelaufnahme eines Zeitschr.-Heftes Plasmastrahlbearbeitung (DE-588)4136199-4 gnd rswk-swf Plasmaphysik (DE-588)4046259-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2006 Matsushima Miyagi gnd-content Kongress - Matsushima <Miyagi, 2006> - Plasmastrahlbearbeitung Plasmastrahlbearbeitung (DE-588)4136199-4 s DE-604 Plasmaphysik (DE-588)4046259-6 s 1\p DE-604 Kono, Akihiro edt 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Plasma processing [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Plasmaphysik (DE-588)4046259-6 gnd |
| subject_GND | (DE-588)4136199-4 (DE-588)4046259-6 (DE-588)1071861417 |
| title | Plasma processing [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] |
| title_auth | Plasma processing [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] |
| title_exact_search | Plasma processing [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] |
| title_exact_search_txtP | Plasma processing [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] |
| title_full | Plasma processing [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] ed. by Akihiro Kono ... |
| title_fullStr | Plasma processing [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] ed. by Akihiro Kono ... |
| title_full_unstemmed | Plasma processing [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] ed. by Akihiro Kono ... |
| title_short | Plasma processing |
| title_sort | plasma processing 6th international conference on reactive plasmas 23rd symposium on plasma processing icrp 6 spp 23 held in matsushima japan on january 24 27 2006 |
| title_sub | [6th International Conference on Reactive Plasmas, 23rd Symposium on Plasma Processing ((ICRP-6/SPP-23), held in Matsushima, Japan, on January 24 - 27, 2006] |
| topic | Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Plasmaphysik (DE-588)4046259-6 gnd |
| topic_facet | Plasmastrahlbearbeitung Plasmaphysik Konferenzschrift 2006 Matsushima Miyagi Kongress - Matsushima <Miyagi, 2006> - Plasmastrahlbearbeitung |
| work_keys_str_mv | AT konoakihiro plasmaprocessing6thinternationalconferenceonreactiveplasmas23rdsymposiumonplasmaprocessingicrp6spp23heldinmatsushimajapanonjanuary24272006 |