Spectroscopic ellipsometry: principles and applications
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Chichester
Wiley
2007
|
| Subjects: | |
| Online Access: | Table of contents only |
| Physical Description: | XVIII, 369 S. Ill., graph. Darst. |
| ISBN: | 9780470016084 0470016086 |
Staff View
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV022224555 | ||
| 003 | DE-604 | ||
| 005 | 20120116 | ||
| 007 | t | ||
| 008 | 070115s2007 xxkad|| |||| 00||| eng d | ||
| 010 | |a 2006030741 | ||
| 020 | |a 9780470016084 |9 978-0-470-01608-4 | ||
| 020 | |a 0470016086 |9 0-470-01608-6 | ||
| 035 | |a (OCoLC)71507562 | ||
| 035 | |a (DE-599)BVBBV022224555 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxk |c GB | ||
| 049 | |a DE-703 |a DE-20 |a DE-11 |a DE-526 | ||
| 050 | 0 | |a QC443 | |
| 082 | 0 | |a 620.1/1295 | |
| 084 | |a UH 5500 |0 (DE-625)145663: |2 rvk | ||
| 084 | |a UP 8300 |0 (DE-625)146450: |2 rvk | ||
| 100 | 1 | |a Fujiwara, Hiroyuki |e Verfasser |0 (DE-588)140809872 |4 aut | |
| 245 | 1 | 0 | |a Spectroscopic ellipsometry |b principles and applications |c Hiroyuki Fujiwara |
| 264 | 1 | |a Chichester |b Wiley |c 2007 | |
| 300 | |a XVIII, 369 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Ellipsometry | |
| 650 | 4 | |a Spectrum analysis | |
| 650 | 4 | |a Materials |x Optical properties | |
| 650 | 0 | 7 | |a Spektralanalyse |0 (DE-588)4132368-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ellipsometrie |0 (DE-588)4152025-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Ellipsometrie |0 (DE-588)4152025-7 |D s |
| 689 | 0 | 1 | |a Spektralanalyse |0 (DE-588)4132368-3 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | |u http://www.loc.gov/catdir/toc/ecip071/2006030741.html |3 Table of contents only | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015435714 | ||
Record in the Search Index
| _version_ | 1804136209617780736 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author | Fujiwara, Hiroyuki |
| author_GND | (DE-588)140809872 |
| author_facet | Fujiwara, Hiroyuki |
| author_role | aut |
| author_sort | Fujiwara, Hiroyuki |
| author_variant | h f hf |
| building | Verbundindex |
| bvnumber | BV022224555 |
| callnumber-first | Q - Science |
| callnumber-label | QC443 |
| callnumber-raw | QC443 |
| callnumber-search | QC443 |
| callnumber-sort | QC 3443 |
| callnumber-subject | QC - Physics |
| classification_rvk | UH 5500 UP 8300 |
| ctrlnum | (OCoLC)71507562 (DE-599)BVBBV022224555 |
| dewey-full | 620.1/1295 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.1/1295 |
| dewey-search | 620.1/1295 |
| dewey-sort | 3620.1 41295 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik |
| discipline_str_mv | Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01476nam a2200445zc 4500</leader><controlfield tag="001">BV022224555</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20120116 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">070115s2007 xxkad|| |||| 00||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2006030741</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780470016084</subfield><subfield code="9">978-0-470-01608-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0470016086</subfield><subfield code="9">0-470-01608-6</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)71507562</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022224555</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxk</subfield><subfield code="c">GB</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-20</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-526</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC443</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.1/1295</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 5500</subfield><subfield code="0">(DE-625)145663:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 8300</subfield><subfield code="0">(DE-625)146450:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Fujiwara, Hiroyuki</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)140809872</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Spectroscopic ellipsometry</subfield><subfield code="b">principles and applications</subfield><subfield code="c">Hiroyuki Fujiwara</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Chichester</subfield><subfield code="b">Wiley</subfield><subfield code="c">2007</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVIII, 369 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ellipsometry</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Spectrum analysis</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Materials</subfield><subfield code="x">Optical properties</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Spektralanalyse</subfield><subfield code="0">(DE-588)4132368-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Spektralanalyse</subfield><subfield code="0">(DE-588)4132368-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://www.loc.gov/catdir/toc/ecip071/2006030741.html</subfield><subfield code="3">Table of contents only</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015435714</subfield></datafield></record></collection> |
| id | DE-604.BV022224555 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:30:25Z |
| indexdate | 2024-07-09T20:52:46Z |
| institution | BVB |
| isbn | 9780470016084 0470016086 |
| language | English |
| lccn | 2006030741 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015435714 |
| oclc_num | 71507562 |
| open_access_boolean | |
| owner | DE-703 DE-20 DE-11 DE-526 |
| owner_facet | DE-703 DE-20 DE-11 DE-526 |
| physical | XVIII, 369 S. Ill., graph. Darst. |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | Wiley |
| record_format | marc |
| spelling | Fujiwara, Hiroyuki Verfasser (DE-588)140809872 aut Spectroscopic ellipsometry principles and applications Hiroyuki Fujiwara Chichester Wiley 2007 XVIII, 369 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Ellipsometry Spectrum analysis Materials Optical properties Spektralanalyse (DE-588)4132368-3 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 s Spektralanalyse (DE-588)4132368-3 s DE-604 http://www.loc.gov/catdir/toc/ecip071/2006030741.html Table of contents only |
| spellingShingle | Fujiwara, Hiroyuki Spectroscopic ellipsometry principles and applications Ellipsometry Spectrum analysis Materials Optical properties Spektralanalyse (DE-588)4132368-3 gnd Ellipsometrie (DE-588)4152025-7 gnd |
| subject_GND | (DE-588)4132368-3 (DE-588)4152025-7 |
| title | Spectroscopic ellipsometry principles and applications |
| title_auth | Spectroscopic ellipsometry principles and applications |
| title_exact_search | Spectroscopic ellipsometry principles and applications |
| title_exact_search_txtP | Spectroscopic ellipsometry principles and applications |
| title_full | Spectroscopic ellipsometry principles and applications Hiroyuki Fujiwara |
| title_fullStr | Spectroscopic ellipsometry principles and applications Hiroyuki Fujiwara |
| title_full_unstemmed | Spectroscopic ellipsometry principles and applications Hiroyuki Fujiwara |
| title_short | Spectroscopic ellipsometry |
| title_sort | spectroscopic ellipsometry principles and applications |
| title_sub | principles and applications |
| topic | Ellipsometry Spectrum analysis Materials Optical properties Spektralanalyse (DE-588)4132368-3 gnd Ellipsometrie (DE-588)4152025-7 gnd |
| topic_facet | Ellipsometry Spectrum analysis Materials Optical properties Spektralanalyse Ellipsometrie |
| url | http://www.loc.gov/catdir/toc/ecip071/2006030741.html |
| work_keys_str_mv | AT fujiwarahiroyuki spectroscopicellipsometryprinciplesandapplications |