Holdings: Principles and applications of NanoMEMS physics

Principles and applications of NanoMEMS physics:

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Bibliographic Details
Main Author:	De Los Santos, Héctor J. (Author)
Format:	Book
Language:	English
Published:	Dordrecht, The Netherlands Springer c2005
Series:	Microsystems 15
Subjects:	Quantum electronics Wave-particle duality Nanotechnology Microelectromechanical systems Nanotechnologie MEMS
Online Access:	Table of contents Inhaltsverzeichnis
Item Description:	Includes bibliographical references (p. [241]-252) and index
Physical Description:	xv, 254 p. ill. 25 cm
ISBN:	1402032382

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adam_text	PRINCIPLES AND APPLICATIONS OF NANOMEMS PHYSICS BY HECTOR J. DE LOS SANTOS NANOMEMS RESEARCH LLC, IRVINE. CA, USA OESPRI RINGER CONTENTS PRCFACC XIII ACKNOWLEDGMCNTS XV 1. NANOELECTROMECHANICAL SYSTEMS 1 1.1 NANOMEMS ORIGINS 1 1.2 NANOMEMS FABRICATION TECHNOLOGIES 3 1.2.1 CONVENTIONAL IC FABRICATION PROCESS 4 1.2.1.1 SPIN-CASTING 4 1.2.1.2 WAFER PATTERNING 5 1.2.1.2.1 LITHOGRAPHY 6 1.2.1.2.2 PHOTORESIST 8 1.2.1.3 ETCHING 9 1.2.1.3.1 WETETCHING 10 1.2.1.3.2 DRY ETCHING 11 1.2.1.4 CHEMICAL VAPOR DEPOSITION 13 1.2.1.5 SPUTTERING 15 1.2.1.6 EVAPORATION 16 1.2.2 MEMS FABRICATION METHODS 16 1.2.2.1 SURFACE MICROMACHINING 17 1.2.2.2 BULK MICROMACHINING 18 1.2.2.3 DEEP REACTIVE ION ETCHING 20 1.2.2.4 SINGLE CRYSTAL SILICON REACTIVE ETCH AND METAL 21 1.2.3 NANOCLCCTRONICS FABRICATION ELEMENTS 22 1.2.3.1 ELECTRON BEAM LITHOGRAPHY 22 VN VLLL CONTENTS 1.2.3.2 SOFT LITHOGRAPHY 24 1.2.3.3 MOLECULAR BEAM EPITAXY 27 1.2.3.4 SCANNING PROBE MICROSCOPY 29 1.2.3.4.1 SCANNING TUNNCLING MICROSCOPE 30 1.2.3.4.2 ATOMIC FORCE MICROSCOPY 31 1.2.3.5 CARBON NANOTUBES 36 1.2.3.6 NANOMANIPULATION 37 1.2.3.6.1 AFM-BASED NANOMANIPULATION 38 1.2.3.6.2 DIP-PEN LITHOGRAPHY 38 1.3 SUMMARY 39 2. NANOMEMS PHYSICS: QUANTUM WAVE-PARTICLE 41 PHENOMENA 2.1 LNTRODUCTION 41 2.2 MANIFESTATION OF CHARGE DISCRETENESS 42 2.2.1 EFFECTS OF CHARGE DISCRETENESS IN TRANSMISSION LINES 42 2.2.1.1 INDUCTIVC TRANSMISSION LINE BEHAVIOR 48 2.2.1.2 CAPACITIVE TRANSMISSION LINE BEHAVIOR 50 2.2.2 EFFECTS OF CHARGE DISCRETENESS IN ELECTROSTATIC ACTUATION 51 2.2.2.1 FUNDAMENTAL ELECTROSTATIC ACTUATION 51 2.2.2.1.1 LARGE-SIGNAL ACTUATIONSWITCH 52 2.2.2.1.2 SMALL-SIGNAL ACTUATION -RESONATOR 52 2.2.2.2 COULOMB BLOCKADE 53 2.2.3 SINGLE ELECTRON TUNNELING 56 2.2.3.1 QUANTUM DOTS 56 2.2.4 QUANTIZED ELECTROSTATIC ACTUATION 58 2.3 MANIFESTATION OF QUANTUM ELECTRODYNAMICAL FORCES 60 2.3.1 VAN DER WAALS FORCE 60 2.3.2 CASIMIR FORCE 62 2.4 QUANTUM INFORMATION THEORY, COMPUTING AND COMMUNICATIONS 66 2.4.1 QUANTUM ENTANGLEMENT 67 2.4.1.1 EINSTEIN-PODOLSKY-ROSCN (EPR) STATE 69 2.4.1.2 QUANTUM GATES 70 2.4.2 QUANTUM TELEPORTATION 73 2.4.3 DECOHERENCE 76 2.5 SUMMARY 77 3. NANOMEMS PHYSICS: QUANTUM WA VE PHENOMENA 79 3.1 MANIFESTATION OFWAVCNATURC OFELECTRONS 79 3.1.1 QUANTIZATION OF ELECTRICAL CONDUCTANCE 80 3.1.1.1 LANDAUER FORMULA 80 3.1.1.2 QUANTUM POINT CONTACTS 82 3.1.2 QUANTUM RCSONANCE TUNNCLING 84 3.1.3 QUANTUM INTERFERENCE 88 3.1.3.1 AHARONO V-BOHM EFFECT 88 3.1.4 QUANTUM TRANSPORT THEORY 89 3.1.4.1 QUANTIZED HCAT FLOW 89 3.1.4.2 PERMI LIQUIDS AND LUETTINGER LIQUIDS 90 3.1.4.2.1 FERMIGAS 91 3.1.4.2.2 FERMI LIQUIDS 95 3.1.4.2.3 LUETTINGER LIQUIDS 100 3.2 WAVE BEHAVIOR IN PERIODIC AND APENODIC MEDIA 105 3.2.1 ELECTRONIC BAND-GAP CRYSTALS 105 3.2.1.1 CARBON NANOTUBES 105 3.2.1.2 SUPCRCONDUCTORS 112 3.2.1.2.1 SUPERFLUIDITY 113 3.2.1.2.2 SUPERCONDUCTIVITY 121 3.2.2 PHOTONIC BAND-GAP CRYSTALS 134 3.2.2.1 ONE-DIMENSIONAI PBC PHYSICS 134 3.2.2.2 MULTI-DIMENSIONAL PBC PHYSICS 138 3.2.2.2.1 GENERAL PROPERTIES OF PBCS 139 3.2.2.3 ADVANCED PBC STRUCTURES 141 3.2.2.3.1 NEGATIVE REFRACTION AND PERFECT LENSCS 142 3.2.3 CAVITY QUANTUM ELECTRODYNAMICS 145 3.3 SUMMARY 148 4. NANOMEMS APPLICATIONS: CIRCUITS AND SYSTEMS 149 4.1 INTRODUCTION 149 4.2 NANOMEMS SYSTEMS ON CHIP 149 4.2.1 NANOMEMS SOC ARCHITCCTURES 150 4.2.2 NANOMEMS SOC BUILDING BLOCKS 151 4.2.2.1 INTERFACES 151 4.2.2.2 EMERGING SIGNAL PROCESSING BUILDING BLOCKS 152 4.2.2.2.1 CHARGE DETECTOR 153 4.2.2.2.2 WHICH-PATH ELECTRON INTERFEROMETER 154 4.2.2.2.3 PARAMETRIC AMPLIFICATION IN TORSIONAL MEM RESONATOR 155 4.2.2.2.4 CASIMIR EFFECT OSCILTATOR 156 4.2.2.2.5 MAGNETOMECHANICALLY ACTUATCD BEAMS 157 4.2.2.2.6 SYSTEMSFUNCTIONAL ARRAYS 158 4.2.2.2.7 NOISEQUANTUM SQUEEZING 158 4.2.2.2.8 NANOMECHANICAL LASER 159 4.2.2.2.9 QUANTUM ENTANGLEMENT GENERATION 160 X CONTENTS 4.3.1 QUANTUM COMPUTING PARADIGMS 161 4.3.1.1 THE ION-TRAP QUBIT 162 4.3.1.2 THE NUCLEAR MAGNETIC RESONANCE (NMR) QUBIT 166 4.3.1.3 THE SEMICONDUCTOR SOLID-STATE QUBIT 178 4.3.1.4 SUPERCONDUCTING-BASCD QUBITS 183 4.3.1.4.1 THE CHARGE QUBIT 186 4.3.1.4.2 THE FLUX QUBIT 188 4.3.1.4.3 THE PHASE QUBIT 190 4.4 SUMMARY 191 5 NANOMEMS APPLICATTONS: PHOTONICS 193 5.1 INTRODUCTION 193 5.2 SURFACE PLASMONS 194 5.2.1 SURFACE PLASMON CHARACTERISTICS 195 5.3 NANOPHOTONICS 197 5.3.1 LIGHT-SURFACE PLASMON TRANSFORMATION 197 5.3.2 ONE-DIMCNSIONAL SURFACE PLASMON PROPAGATION 199 5.3.2.1 SP PROPAGATION IN NARROW METAL STRIPES 200 5.3.2.2 SP PROPAGATION IN NANOWIRES 200 5.3.2.3 SP RESONANCES IN SINGLE MCTALLIC NANOPARTICLES 201 5.3.2.4 SP COUPLING OF METALLIC NANOPARTICLES 202 5.3.2.5 PLASMONIC WAVEGUIDES 203 5.3.3 NANOPHOTONIC SP-BASED DEVICES 204 5.3.4 SEMICONDUCTING NANOWIRCS-BASED NANOPHOTONICS 207 5.4 DCTCCTION OF SURFACE PLASMONS 207 5.4.1 NSOM7SNOM 208 5.5 SUMMARY 210 APPCNDICCS A -QUANTUM MECHANICS PRIMCR 213 A.L INTRODUCTION 213 A.2 SOME BASIC LAWS GOVERNING QUANTUM SYSTEMS 213 A.3 HARMONIE OSCILLATOR AND QUANTIZATION 215 A.4 CREATION AND ANNIHILATION OPERATORS 216 A.5 SECOND QUANTIZATION 218 A.5.1 FIELD OPERATORS 224 BBOSONIZATION 227 B.L INTRODUCTION 227 B.2 BOSONIZATION RULES 227 B.3 BOSONIC FIELD OPERATORS 232 B.4 BOSONIZATION IDENTITY AND ITS APPLICATION TO HAMILTONIAN WITH LINEAR DISPERSION 233 XI B.5 BOSONIZATION TREATMENT OF SPINLESS ELECTRONS IN ONE-DIMENSIONAL WIRC 239 REIERCNCES 241 INDEX 253
adam_txt	PRINCIPLES AND APPLICATIONS OF NANOMEMS PHYSICS BY HECTOR J. DE LOS SANTOS NANOMEMS RESEARCH LLC, IRVINE. CA, USA OESPRI RINGER CONTENTS PRCFACC XIII ACKNOWLEDGMCNTS XV 1. NANOELECTROMECHANICAL SYSTEMS 1 1.1 NANOMEMS ORIGINS 1 1.2 NANOMEMS FABRICATION TECHNOLOGIES 3 1.2.1 CONVENTIONAL IC FABRICATION PROCESS 4 1.2.1.1 SPIN-CASTING 4 1.2.1.2 WAFER PATTERNING 5 1.2.1.2.1 LITHOGRAPHY 6 1.2.1.2.2 PHOTORESIST 8 1.2.1.3 ETCHING 9 1.2.1.3.1 WETETCHING 10 1.2.1.3.2 DRY ETCHING 11 1.2.1.4 CHEMICAL VAPOR DEPOSITION 13 1.2.1.5 SPUTTERING 15 1.2.1.6 EVAPORATION 16 1.2.2 MEMS FABRICATION METHODS 16 1.2.2.1 SURFACE MICROMACHINING 17 1.2.2.2 BULK MICROMACHINING 18 1.2.2.3 DEEP REACTIVE ION ETCHING 20 1.2.2.4 SINGLE CRYSTAL SILICON REACTIVE ETCH AND METAL 21 1.2.3 NANOCLCCTRONICS FABRICATION ELEMENTS 22 1.2.3.1 ELECTRON BEAM LITHOGRAPHY 22 VN VLLL CONTENTS 1.2.3.2 SOFT LITHOGRAPHY 24 1.2.3.3 MOLECULAR BEAM EPITAXY 27 1.2.3.4 SCANNING PROBE MICROSCOPY 29 1.2.3.4.1 SCANNING TUNNCLING MICROSCOPE 30 1.2.3.4.2 ATOMIC FORCE MICROSCOPY 31 1.2.3.5 CARBON NANOTUBES 36 1.2.3.6 NANOMANIPULATION 37 1.2.3.6.1 AFM-BASED NANOMANIPULATION 38 1.2.3.6.2 DIP-PEN LITHOGRAPHY 38 1.3 SUMMARY 39 2. NANOMEMS PHYSICS: QUANTUM WAVE-PARTICLE 41 PHENOMENA 2.1 LNTRODUCTION 41 2.2 MANIFESTATION OF CHARGE DISCRETENESS 42 2.2.1 EFFECTS OF CHARGE DISCRETENESS IN TRANSMISSION LINES 42 2.2.1.1 INDUCTIVC TRANSMISSION LINE BEHAVIOR 48 2.2.1.2 CAPACITIVE TRANSMISSION LINE BEHAVIOR 50 2.2.2 EFFECTS OF CHARGE DISCRETENESS IN ELECTROSTATIC ACTUATION 51 2.2.2.1 FUNDAMENTAL ELECTROSTATIC ACTUATION 51 2.2.2.1.1 LARGE-SIGNAL ACTUATIONSWITCH 52 2.2.2.1.2 SMALL-SIGNAL ACTUATION -RESONATOR 52 2.2.2.2 COULOMB BLOCKADE 53 2.2.3 SINGLE ELECTRON TUNNELING 56 2.2.3.1 QUANTUM DOTS 56 2.2.4 QUANTIZED ELECTROSTATIC ACTUATION 58 2.3 MANIFESTATION OF QUANTUM ELECTRODYNAMICAL FORCES 60 2.3.1 VAN DER WAALS FORCE 60 2.3.2 CASIMIR FORCE 62 2.4 QUANTUM INFORMATION THEORY, COMPUTING AND COMMUNICATIONS 66 2.4.1 QUANTUM ENTANGLEMENT 67 2.4.1.1 EINSTEIN-PODOLSKY-ROSCN (EPR) STATE 69 2.4.1.2 QUANTUM GATES 70 2.4.2 QUANTUM TELEPORTATION 73 2.4.3 DECOHERENCE 76 2.5 SUMMARY 77 3. NANOMEMS PHYSICS: QUANTUM WA VE PHENOMENA 79 3.1 MANIFESTATION OFWAVCNATURC OFELECTRONS 79 3.1.1 QUANTIZATION OF ELECTRICAL CONDUCTANCE 80 3.1.1.1 LANDAUER FORMULA 80 3.1.1.2 QUANTUM POINT CONTACTS 82 3.1.2 QUANTUM RCSONANCE TUNNCLING 84 3.1.3 QUANTUM INTERFERENCE 88 3.1.3.1 AHARONO V-BOHM EFFECT 88 3.1.4 QUANTUM TRANSPORT THEORY 89 3.1.4.1 QUANTIZED HCAT FLOW 89 3.1.4.2 PERMI LIQUIDS AND LUETTINGER LIQUIDS 90 3.1.4.2.1 FERMIGAS 91 3.1.4.2.2 FERMI LIQUIDS 95 3.1.4.2.3 LUETTINGER LIQUIDS 100 3.2 WAVE BEHAVIOR IN PERIODIC AND APENODIC MEDIA 105 3.2.1 ELECTRONIC BAND-GAP CRYSTALS 105 3.2.1.1 CARBON NANOTUBES 105 3.2.1.2 SUPCRCONDUCTORS 112 3.2.1.2.1 SUPERFLUIDITY 113 3.2.1.2.2 SUPERCONDUCTIVITY 121 3.2.2 PHOTONIC BAND-GAP CRYSTALS 134 3.2.2.1 ONE-DIMENSIONAI PBC PHYSICS 134 3.2.2.2 MULTI-DIMENSIONAL PBC PHYSICS 138 3.2.2.2.1 GENERAL PROPERTIES OF PBCS 139 3.2.2.3 ADVANCED PBC STRUCTURES 141 3.2.2.3.1 NEGATIVE REFRACTION AND PERFECT LENSCS 142 3.2.3 CAVITY QUANTUM ELECTRODYNAMICS 145 3.3 SUMMARY 148 4. NANOMEMS APPLICATIONS: CIRCUITS AND SYSTEMS 149 4.1 INTRODUCTION 149 4.2 NANOMEMS SYSTEMS ON CHIP 149 4.2.1 NANOMEMS SOC ARCHITCCTURES 150 4.2.2 NANOMEMS SOC BUILDING BLOCKS 151 4.2.2.1 INTERFACES 151 4.2.2.2 EMERGING SIGNAL PROCESSING BUILDING BLOCKS 152 4.2.2.2.1 CHARGE DETECTOR 153 4.2.2.2.2 WHICH-PATH ELECTRON INTERFEROMETER 154 4.2.2.2.3 PARAMETRIC AMPLIFICATION IN TORSIONAL MEM RESONATOR 155 4.2.2.2.4 CASIMIR EFFECT OSCILTATOR 156 4.2.2.2.5 MAGNETOMECHANICALLY ACTUATCD BEAMS 157 4.2.2.2.6 SYSTEMSFUNCTIONAL ARRAYS 158 4.2.2.2.7 NOISEQUANTUM SQUEEZING 158 4.2.2.2.8 NANOMECHANICAL LASER 159 4.2.2.2.9 QUANTUM ENTANGLEMENT GENERATION 160 X CONTENTS 4.3.1 QUANTUM COMPUTING PARADIGMS 161 4.3.1.1 THE ION-TRAP QUBIT 162 4.3.1.2 THE NUCLEAR MAGNETIC RESONANCE (NMR) QUBIT 166 4.3.1.3 THE SEMICONDUCTOR SOLID-STATE QUBIT 178 4.3.1.4 SUPERCONDUCTING-BASCD QUBITS 183 4.3.1.4.1 THE CHARGE QUBIT 186 4.3.1.4.2 THE FLUX QUBIT 188 4.3.1.4.3 THE PHASE QUBIT 190 4.4 SUMMARY 191 5 NANOMEMS APPLICATTONS: PHOTONICS 193 5.1 INTRODUCTION 193 5.2 SURFACE PLASMONS 194 5.2.1 SURFACE PLASMON CHARACTERISTICS 195 5.3 NANOPHOTONICS 197 5.3.1 LIGHT-SURFACE PLASMON TRANSFORMATION 197 5.3.2 ONE-DIMCNSIONAL SURFACE PLASMON PROPAGATION 199 5.3.2.1 SP PROPAGATION IN NARROW METAL STRIPES 200 5.3.2.2 SP PROPAGATION IN NANOWIRES 200 5.3.2.3 SP RESONANCES IN SINGLE MCTALLIC NANOPARTICLES 201 5.3.2.4 SP COUPLING OF METALLIC NANOPARTICLES 202 5.3.2.5 PLASMONIC WAVEGUIDES 203 5.3.3 NANOPHOTONIC SP-BASED DEVICES 204 5.3.4 SEMICONDUCTING NANOWIRCS-BASED NANOPHOTONICS 207 5.4 DCTCCTION OF SURFACE PLASMONS 207 5.4.1 NSOM7SNOM 208 5.5 SUMMARY 210 APPCNDICCS A -QUANTUM MECHANICS PRIMCR 213 A.L INTRODUCTION 213 A.2 SOME BASIC LAWS GOVERNING QUANTUM SYSTEMS 213 A.3 HARMONIE OSCILLATOR AND QUANTIZATION 215 A.4 CREATION AND ANNIHILATION OPERATORS 216 A.5 SECOND QUANTIZATION 218 A.5.1 FIELD OPERATORS 224 BBOSONIZATION 227 B.L INTRODUCTION 227 B.2 BOSONIZATION "RULES" 227 B.3 BOSONIC FIELD OPERATORS 232 B.4 BOSONIZATION IDENTITY AND ITS APPLICATION TO HAMILTONIAN WITH LINEAR DISPERSION 233 XI B.5 BOSONIZATION TREATMENT OF SPINLESS ELECTRONS IN ONE-DIMENSIONAL WIRC 239 REIERCNCES 241 INDEX 253
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spelling	De Los Santos, Héctor J. Verfasser aut Principles and applications of NanoMEMS physics by Héctor J. De Los Santos Dordrecht, The Netherlands Springer c2005 xv, 254 p. ill. 25 cm txt rdacontent n rdamedia nc rdacarrier Microsystems 15 Includes bibliographical references (p. [241]-252) and index Quantum electronics Wave-particle duality Nanotechnology Microelectromechanical systems Nanotechnologie (DE-588)4327470-5 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s Nanotechnologie (DE-588)4327470-5 s DE-604 http://www.loc.gov/catdir/toc/ecip0513/2005015829.html Table of contents GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015404171&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	De Los Santos, Héctor J. Principles and applications of NanoMEMS physics Quantum electronics Wave-particle duality Nanotechnology Microelectromechanical systems Nanotechnologie (DE-588)4327470-5 gnd MEMS (DE-588)4824724-8 gnd
subject_GND	(DE-588)4327470-5 (DE-588)4824724-8
title	Principles and applications of NanoMEMS physics
title_auth	Principles and applications of NanoMEMS physics
title_exact_search	Principles and applications of NanoMEMS physics
title_exact_search_txtP	Principles and applications of NanoMEMS physics
title_full	Principles and applications of NanoMEMS physics by Héctor J. De Los Santos
title_fullStr	Principles and applications of NanoMEMS physics by Héctor J. De Los Santos
title_full_unstemmed	Principles and applications of NanoMEMS physics by Héctor J. De Los Santos
title_short	Principles and applications of NanoMEMS physics
title_sort	principles and applications of nanomems physics
topic	Quantum electronics Wave-particle duality Nanotechnology Microelectromechanical systems Nanotechnologie (DE-588)4327470-5 gnd MEMS (DE-588)4824724-8 gnd
topic_facet	Quantum electronics Wave-particle duality Nanotechnology Microelectromechanical systems Nanotechnologie MEMS
url	http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015404171&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT delossantoshectorj principlesandapplicationsofnanomemsphysics

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