Introduction to microelectronic fabrication:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Reading, Mass. [u.a.]
Addison-Wesley
1987
|
| Edition: | 1. print. |
| Series: | Modular series on solid state devices
5 |
| Subjects: | |
| Physical Description: | XIII, 232 S. zahlr. graph. Darst. |
| ISBN: | 0201146959 |
Staff View
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Record in the Search Index
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| edition | 1. print. |
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| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV022136227 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:17:20Z |
| indexdate | 2024-07-09T20:51:09Z |
| institution | BVB |
| isbn | 0201146959 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015350845 |
| oclc_num | 237287415 |
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| owner | DE-706 |
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| physical | XIII, 232 S. zahlr. graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Addison-Wesley |
| record_format | marc |
| series | Modular series on solid state devices |
| series2 | Modular series on solid state devices |
| spelling | Jaeger, Richard C. Verfasser aut Introduction to microelectronic fabrication 1. print. Reading, Mass. [u.a.] Addison-Wesley 1987 XIII, 232 S. zahlr. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Modular series on solid state devices 5 Integrated circuits Very large scale integration Design and construction Congresses Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Integrierte Schaltung (DE-588)4027242-4 s DE-604 Mikroelektronik (DE-588)4039207-7 s Halbleitertechnologie (DE-588)4158814-9 s 1\p DE-604 Modular series on solid state devices 5 (DE-604)BV001896679 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Jaeger, Richard C. Introduction to microelectronic fabrication Modular series on solid state devices Integrated circuits Very large scale integration Design and construction Congresses Mikroelektronik (DE-588)4039207-7 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4027242-4 (DE-588)4158814-9 (DE-588)1071861417 |
| title | Introduction to microelectronic fabrication |
| title_auth | Introduction to microelectronic fabrication |
| title_exact_search | Introduction to microelectronic fabrication |
| title_exact_search_txtP | Introduction to microelectronic fabrication |
| title_full | Introduction to microelectronic fabrication |
| title_fullStr | Introduction to microelectronic fabrication |
| title_full_unstemmed | Introduction to microelectronic fabrication |
| title_short | Introduction to microelectronic fabrication |
| title_sort | introduction to microelectronic fabrication |
| topic | Integrated circuits Very large scale integration Design and construction Congresses Mikroelektronik (DE-588)4039207-7 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Integrated circuits Very large scale integration Design and construction Congresses Mikroelektronik Integrierte Schaltung Halbleitertechnologie Konferenzschrift |
| volume_link | (DE-604)BV001896679 |
| work_keys_str_mv | AT jaegerrichardc introductiontomicroelectronicfabrication |