Sputtering by particle bombardment: 1 Physical sputtering of single-element solids
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Berlin [u.a.]
Springer
1981
|
| Series: | Topics in applied physics
47 |
| Physical Description: | 281 S. |
| ISBN: | 3540105212 |
Staff View
MARC
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| id | DE-604.BV022079602 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T16:14:16Z |
| indexdate | 2024-07-09T20:50:19Z |
| institution | BVB |
| isbn | 3540105212 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015294419 |
| oclc_num | 634104572 |
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| physical | 281 S. |
| publishDate | 1981 |
| publishDateSearch | 1981 |
| publishDateSort | 1981 |
| publisher | Springer |
| record_format | marc |
| series | Topics in applied physics |
| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment 1 Physical sputtering of single-element solids ed. by R. Behrisch ... Berlin [u.a.] Springer 1981 281 S. txt rdacontent n rdamedia nc rdacarrier Topics in applied physics 47 Topics in applied physics ... Behrisch, Rainer Sonstige oth (DE-604)BV021857696 1 Topics in applied physics 47 (DE-604)BV008007504 |
| spellingShingle | Sputtering by particle bombardment Topics in applied physics |
| title | Sputtering by particle bombardment |
| title_auth | Sputtering by particle bombardment |
| title_exact_search | Sputtering by particle bombardment |
| title_exact_search_txtP | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment 1 Physical sputtering of single-element solids ed. by R. Behrisch ... |
| title_fullStr | Sputtering by particle bombardment 1 Physical sputtering of single-element solids ed. by R. Behrisch ... |
| title_full_unstemmed | Sputtering by particle bombardment 1 Physical sputtering of single-element solids ed. by R. Behrisch ... |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment physical sputtering of single element solids |
| volume_link | (DE-604)BV021857696 (DE-604)BV008007504 |
| work_keys_str_mv | AT behrischrainer sputteringbyparticlebombardment1 |