Silicon materials: processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Warrendale, PA
Materials Research Soc.
2002
|
| Schriftenreihe: | Materials Research Society symposium proceedings
716 |
| Schlagworte: | |
| Beschreibung: | XVII, 672 S. Ill., graph. Darst. |
| ISBN: | 1558996524 |
Internformat
MARC
| LEADER | 00000nam a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV022073424 | ||
| 003 | DE-604 | ||
| 005 | 20040302000000.0 | ||
| 007 | t | ||
| 008 | 030805s2002 ad|| |||| 10||| eng d | ||
| 020 | |a 1558996524 |9 1-55899-652-4 | ||
| 035 | |a (OCoLC)123155621 | ||
| 035 | |a (DE-599)BVBBV022073424 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2 |2 21 | |
| 084 | |a UD 8400 |0 (DE-625)145545: |2 rvk | ||
| 245 | 1 | 0 | |a Silicon materials |b processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA |
| 264 | 1 | |a Warrendale, PA |b Materials Research Soc. |c 2002 | |
| 300 | |a XVII, 672 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society symposium proceedings |v 716 | |
| 650 | 4 | |a Semiconductors |v Congresses | |
| 650 | 4 | |a Semiconductors |x Reliability |v Congresses | |
| 650 | 4 | |a Silicon alloys |v Congresses | |
| 650 | 4 | |a Silicon |v Congresses | |
| 650 | 0 | 7 | |a Halbleiterbauelement |0 (DE-588)4113826-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Zuverlässigkeit |0 (DE-588)4059245-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicone |0 (DE-588)4127342-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Zuverlässigkeit |0 (DE-588)4059245-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleiterbauelement |0 (DE-588)4113826-0 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Silicone |0 (DE-588)4127342-4 |D s |
| 689 | 2 | |5 DE-604 | |
| 700 | 1 | |a Veteran, Janice L. |e Sonstige |4 oth | |
| 830 | 0 | |a Materials Research Society symposium proceedings |v 716 |w (DE-604)BV001899105 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015288216 | ||
Datensatz im Suchindex
| _version_ | 1804136049167826944 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV022073424 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UD 8400 |
| ctrlnum | (OCoLC)123155621 (DE-599)BVBBV022073424 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01740nam a2200481zcb4500</leader><controlfield tag="001">BV022073424</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20040302000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">030805s2002 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1558996524</subfield><subfield code="9">1-55899-652-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)123155621</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022073424</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UD 8400</subfield><subfield code="0">(DE-625)145545:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Silicon materials</subfield><subfield code="b">processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Warrendale, PA</subfield><subfield code="b">Materials Research Soc.</subfield><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVII, 672 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">716</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Reliability</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon alloys</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterbauelement</subfield><subfield code="0">(DE-588)4113826-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Zuverlässigkeit</subfield><subfield code="0">(DE-588)4059245-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicone</subfield><subfield code="0">(DE-588)4127342-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Zuverlässigkeit</subfield><subfield code="0">(DE-588)4059245-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleiterbauelement</subfield><subfield code="0">(DE-588)4113826-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Silicone</subfield><subfield code="0">(DE-588)4127342-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Veteran, Janice L.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">716</subfield><subfield code="w">(DE-604)BV001899105</subfield><subfield code="9"></subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015288216</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV022073424 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:00Z |
| indexdate | 2024-07-09T20:50:13Z |
| institution | BVB |
| isbn | 1558996524 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015288216 |
| oclc_num | 123155621 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | XVII, 672 S. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Silicon materials processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA Warrendale, PA Materials Research Soc. 2002 XVII, 672 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 716 Semiconductors Congresses Semiconductors Reliability Congresses Silicon alloys Congresses Silicon Congresses Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Zuverlässigkeit (DE-588)4059245-5 gnd rswk-swf Silicone (DE-588)4127342-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Zuverlässigkeit (DE-588)4059245-5 s DE-604 Halbleiterbauelement (DE-588)4113826-0 s Silicone (DE-588)4127342-4 s Veteran, Janice L. Sonstige oth Materials Research Society symposium proceedings 716 (DE-604)BV001899105 |
| spellingShingle | Silicon materials processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA Materials Research Society symposium proceedings Semiconductors Congresses Semiconductors Reliability Congresses Silicon alloys Congresses Silicon Congresses Halbleiterbauelement (DE-588)4113826-0 gnd Zuverlässigkeit (DE-588)4059245-5 gnd Silicone (DE-588)4127342-4 gnd |
| subject_GND | (DE-588)4113826-0 (DE-588)4059245-5 (DE-588)4127342-4 (DE-588)1071861417 |
| title | Silicon materials processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA |
| title_auth | Silicon materials processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA |
| title_exact_search | Silicon materials processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA |
| title_exact_search_txtP | Silicon materials processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA |
| title_full | Silicon materials processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA |
| title_fullStr | Silicon materials processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA |
| title_full_unstemmed | Silicon materials processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA |
| title_short | Silicon materials |
| title_sort | silicon materials processing characterization and reliability symposium held april 1 5 2002 san francisco california usa |
| title_sub | processing, characterization and reliability ; symposium held April 1 - 5, 2002, San Francisco, California, USA |
| topic | Semiconductors Congresses Semiconductors Reliability Congresses Silicon alloys Congresses Silicon Congresses Halbleiterbauelement (DE-588)4113826-0 gnd Zuverlässigkeit (DE-588)4059245-5 gnd Silicone (DE-588)4127342-4 gnd |
| topic_facet | Semiconductors Congresses Semiconductors Reliability Congresses Silicon alloys Congresses Silicon Congresses Halbleiterbauelement Zuverlässigkeit Silicone Konferenzschrift |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT veteranjanicel siliconmaterialsprocessingcharacterizationandreliabilitysymposiumheldapril152002sanfranciscocaliforniausa |