Gate stack and silicide issues in silicon processing II: symposium held April 17 - 19, 2001, San Francisco, California, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2002
|
| Schriftenreihe: | Materials Research Society symposium proceedings
670 |
| Schlagworte: | |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
| ISBN: | 1558996060 |
Internformat
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| 650 | 4 | |a Integrated circuits |x Ultra large scale integration |x Materials |v Congresses | |
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift |
| id | DE-604.BV022073423 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:00Z |
| indexdate | 2024-07-09T20:50:13Z |
| institution | BVB |
| isbn | 1558996060 |
| language | English |
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| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Gate stack and silicide issues in silicon processing II symposium held April 17 - 19, 2001, San Francisco, California, USA Warrendale, Pa. Materials Research Soc. 2002 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 670 Electric leakage Congresses Gate array circuits Congresses Integrated circuits Ultra large scale integration Materials Congresses Silicides Congresses Siliciumdioxid (DE-588)4077447-8 gnd rswk-swf Ersatz (DE-588)4138740-5 gnd rswk-swf Halbleiterelektronik (DE-588)4140120-7 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf Silicide (DE-588)4268288-5 gnd rswk-swf CMOS-Schaltung (DE-588)4148111-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content CMOS-Schaltung (DE-588)4148111-2 s DE-604 Halbleiterelektronik (DE-588)4140120-7 s Siliciumdioxid (DE-588)4077447-8 s Ersatz (DE-588)4138740-5 s 1\p DE-604 CMOS (DE-588)4010319-5 s Silicide (DE-588)4268288-5 s 2\p DE-604 Campbell, Stephen A. Sonstige oth Materials Research Society symposium proceedings 670 (DE-604)BV001899105 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Gate stack and silicide issues in silicon processing II symposium held April 17 - 19, 2001, San Francisco, California, USA Materials Research Society symposium proceedings Electric leakage Congresses Gate array circuits Congresses Integrated circuits Ultra large scale integration Materials Congresses Silicides Congresses Siliciumdioxid (DE-588)4077447-8 gnd Ersatz (DE-588)4138740-5 gnd Halbleiterelektronik (DE-588)4140120-7 gnd CMOS (DE-588)4010319-5 gnd Silicide (DE-588)4268288-5 gnd CMOS-Schaltung (DE-588)4148111-2 gnd |
| subject_GND | (DE-588)4077447-8 (DE-588)4138740-5 (DE-588)4140120-7 (DE-588)4010319-5 (DE-588)4268288-5 (DE-588)4148111-2 (DE-588)1071861417 |
| title | Gate stack and silicide issues in silicon processing II symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_auth | Gate stack and silicide issues in silicon processing II symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_exact_search | Gate stack and silicide issues in silicon processing II symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_exact_search_txtP | Gate stack and silicide issues in silicon processing II symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_full | Gate stack and silicide issues in silicon processing II symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_fullStr | Gate stack and silicide issues in silicon processing II symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_full_unstemmed | Gate stack and silicide issues in silicon processing II symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_short | Gate stack and silicide issues in silicon processing II |
| title_sort | gate stack and silicide issues in silicon processing ii symposium held april 17 19 2001 san francisco california usa |
| title_sub | symposium held April 17 - 19, 2001, San Francisco, California, USA |
| topic | Electric leakage Congresses Gate array circuits Congresses Integrated circuits Ultra large scale integration Materials Congresses Silicides Congresses Siliciumdioxid (DE-588)4077447-8 gnd Ersatz (DE-588)4138740-5 gnd Halbleiterelektronik (DE-588)4140120-7 gnd CMOS (DE-588)4010319-5 gnd Silicide (DE-588)4268288-5 gnd CMOS-Schaltung (DE-588)4148111-2 gnd |
| topic_facet | Electric leakage Congresses Gate array circuits Congresses Integrated circuits Ultra large scale integration Materials Congresses Silicides Congresses Siliciumdioxid Ersatz Halbleiterelektronik CMOS Silicide CMOS-Schaltung Konferenzschrift |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT campbellstephena gatestackandsilicideissuesinsiliconprocessingiisymposiumheldapril17192001sanfranciscocaliforniausa |