Polysilicon thin films and interfaces: symposium held April 17 - 19, 1990, San Francisco, California, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1990
|
| Schriftenreihe: | Materials Research Society symposium proceedings
182 |
| Schlagworte: | |
| Beschreibung: | XIII, 403 S. Ill., graph. Darst. |
| ISBN: | 1558990712 |
Internformat
MARC
| LEADER | 00000nam a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV022073411 | ||
| 003 | DE-604 | ||
| 005 | 20040302000000.0 | ||
| 007 | t | ||
| 008 | 030805s1990 ad|| |||| 10||| eng d | ||
| 020 | |a 1558990712 |9 1-55899-071-2 | ||
| 035 | |a (OCoLC)22208559 | ||
| 035 | |a (DE-599)BVBBV022073411 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 050 | 0 | |a TK7871.15.S55 | |
| 082 | 0 | |a 621.381/52 |2 20 | |
| 245 | 1 | 0 | |a Polysilicon thin films and interfaces |b symposium held April 17 - 19, 1990, San Francisco, California, USA |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1990 | |
| 300 | |a XIII, 403 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society symposium proceedings |v 182 | |
| 650 | 4 | |a Integrated circuits |x Materials |v Congresses | |
| 650 | 4 | |a Silicon |x Electric properties |v Congresses | |
| 650 | 4 | |a Thin film devices |v Congresses | |
| 650 | 0 | 7 | |a Polykristall |0 (DE-588)4188261-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 0 | 1 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 2 | |a Polykristall |0 (DE-588)4188261-1 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 689 | 1 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Polykristall |0 (DE-588)4188261-1 |D s |
| 689 | 2 | |5 DE-604 | |
| 700 | 1 | |a Kamins, Theodore I. |e Sonstige |4 oth | |
| 830 | 0 | |a Materials Research Society symposium proceedings |v 182 |w (DE-604)BV001899105 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015288203 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804136049148952576 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV022073411 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.15.S55 |
| callnumber-search | TK7871.15.S55 |
| callnumber-sort | TK 47871.15 S55 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| ctrlnum | (OCoLC)22208559 (DE-599)BVBBV022073411 |
| dewey-full | 621.381/52 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/52 |
| dewey-search | 621.381/52 |
| dewey-sort | 3621.381 252 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01833nam a2200493zcb4500</leader><controlfield tag="001">BV022073411</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20040302000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">030805s1990 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1558990712</subfield><subfield code="9">1-55899-071-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)22208559</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV022073411</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.15.S55</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381/52</subfield><subfield code="2">20</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Polysilicon thin films and interfaces</subfield><subfield code="b">symposium held April 17 - 19, 1990, San Francisco, California, USA</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Pittsburgh, Pa.</subfield><subfield code="b">Materials Research Soc.</subfield><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIII, 403 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">182</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Materials</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon</subfield><subfield code="x">Electric properties</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin film devices</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Polykristall</subfield><subfield code="0">(DE-588)4188261-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Polykristall</subfield><subfield code="0">(DE-588)4188261-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Polykristall</subfield><subfield code="0">(DE-588)4188261-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kamins, Theodore I.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">182</subfield><subfield code="w">(DE-604)BV001899105</subfield><subfield code="9"></subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015288203</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV022073411 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:14:00Z |
| indexdate | 2024-07-09T20:50:13Z |
| institution | BVB |
| isbn | 1558990712 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015288203 |
| oclc_num | 22208559 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | XIII, 403 S. Ill., graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Polysilicon thin films and interfaces symposium held April 17 - 19, 1990, San Francisco, California, USA Pittsburgh, Pa. Materials Research Soc. 1990 XIII, 403 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 182 Integrated circuits Materials Congresses Silicon Electric properties Congresses Thin film devices Congresses Polykristall (DE-588)4188261-1 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Dünne Schicht (DE-588)4136925-7 s Silicium (DE-588)4077445-4 s Polykristall (DE-588)4188261-1 s 1\p DE-604 DE-604 Kamins, Theodore I. Sonstige oth Materials Research Society symposium proceedings 182 (DE-604)BV001899105 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Polysilicon thin films and interfaces symposium held April 17 - 19, 1990, San Francisco, California, USA Materials Research Society symposium proceedings Integrated circuits Materials Congresses Silicon Electric properties Congresses Thin film devices Congresses Polykristall (DE-588)4188261-1 gnd Dünne Schicht (DE-588)4136925-7 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4188261-1 (DE-588)4136925-7 (DE-588)4077445-4 (DE-588)1071861417 |
| title | Polysilicon thin films and interfaces symposium held April 17 - 19, 1990, San Francisco, California, USA |
| title_auth | Polysilicon thin films and interfaces symposium held April 17 - 19, 1990, San Francisco, California, USA |
| title_exact_search | Polysilicon thin films and interfaces symposium held April 17 - 19, 1990, San Francisco, California, USA |
| title_exact_search_txtP | Polysilicon thin films and interfaces symposium held April 17 - 19, 1990, San Francisco, California, USA |
| title_full | Polysilicon thin films and interfaces symposium held April 17 - 19, 1990, San Francisco, California, USA |
| title_fullStr | Polysilicon thin films and interfaces symposium held April 17 - 19, 1990, San Francisco, California, USA |
| title_full_unstemmed | Polysilicon thin films and interfaces symposium held April 17 - 19, 1990, San Francisco, California, USA |
| title_short | Polysilicon thin films and interfaces |
| title_sort | polysilicon thin films and interfaces symposium held april 17 19 1990 san francisco california usa |
| title_sub | symposium held April 17 - 19, 1990, San Francisco, California, USA |
| topic | Integrated circuits Materials Congresses Silicon Electric properties Congresses Thin film devices Congresses Polykristall (DE-588)4188261-1 gnd Dünne Schicht (DE-588)4136925-7 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Integrated circuits Materials Congresses Silicon Electric properties Congresses Thin film devices Congresses Polykristall Dünne Schicht Silicium Konferenzschrift |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT kaminstheodorei polysiliconthinfilmsandinterfacessymposiumheldapril17191990sanfranciscocaliforniausa |