Micro electro mechanical systems: proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 10 (1997) Nagoya, Japan, January 26 - 30, 1997
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York, NY
Inst. of Electrical and Electronics Engineers
1997
|
| Subjects: | |
| Physical Description: | XXIV, 545 S. zahlr. Ill. und graph. Darst. |
| ISBN: | 0780337441 078033745x 0780337468 |
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| indexdate | 2024-07-09T20:49:43Z |
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| isbn | 0780337441 078033745x 0780337468 |
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| physical | XXIV, 545 S. zahlr. Ill. und graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
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| publisher | Inst. of Electrical and Electronics Engineers |
| record_format | marc |
| spelling | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 10 (1997) Nagoya, Japan, January 26 - 30, 1997 New York, NY Inst. of Electrical and Electronics Engineers 1997 XXIV, 545 S. zahlr. Ill. und graph. Darst. txt rdacontent n rdamedia nc rdacarrier Actuators Congresses Detectors Congresses Microelectromechanical systems Congresses Microelectronics Congresses (DE-588)1071861417 Konferenzschrift gnd-content Institute of Electrical and Electronics Engineers Sonstige (DE-588)1692-5 oth (DE-604)BV021849896 10 |
| spellingShingle | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots Actuators Congresses Detectors Congresses Microelectromechanical systems Congresses Microelectronics Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_auth | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_exact_search | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_exact_search_txtP | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_full | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 10 (1997) Nagoya, Japan, January 26 - 30, 1997 |
| title_fullStr | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 10 (1997) Nagoya, Japan, January 26 - 30, 1997 |
| title_full_unstemmed | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots 10 (1997) Nagoya, Japan, January 26 - 30, 1997 |
| title_short | Micro electro mechanical systems |
| title_sort | micro electro mechanical systems proceedings an investigation of micro structures sensors actuators machines and robots nagoya japan january 26 30 1997 |
| title_sub | proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| topic | Actuators Congresses Detectors Congresses Microelectromechanical systems Congresses Microelectronics Congresses |
| topic_facet | Actuators Congresses Detectors Congresses Microelectromechanical systems Congresses Microelectronics Congresses Konferenzschrift |
| volume_link | (DE-604)BV021849896 |
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