(1997). Micro electro mechanical systems: Proceedings ; an investigation of micro structures, sensors, actuators, machines and robots. Inst. of Electrical and Electronics Engineers.
Chicago-Zitierstil (17. Ausg.)Micro Electro Mechanical Systems: Proceedings ; an Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. New York, NY: Inst. of Electrical and Electronics Engineers, 1997.
MLA-Zitierstil (9. Ausg.)Micro Electro Mechanical Systems: Proceedings ; an Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. Inst. of Electrical and Electronics Engineers, 1997.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.