IEEE SEMI International Semiconductor Manufacturing Science Symposium: 3 May 19 - 22, 1991, Burlingame, CA, USA
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Piscataway, NJ
IEEE Service Center
1991
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| Subjects: | |
| Physical Description: | X, 164 S. Ill., graph. Darst. |
| ISBN: | 0780300270 0780300289 0780300297 |
Staff View
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| language | English |
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| physical | X, 164 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
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| publisher | IEEE Service Center |
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| spelling | International Semiconductor Manufacturing Science Symposium Verfasser (DE-588)5017027-2 aut IEEE SEMI International Semiconductor Manufacturing Science Symposium 3 May 19 - 22, 1991, Burlingame, CA, USA Piscataway, NJ IEEE Service Center 1991 X, 164 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Computer integrated manufacturing systems Congresses Electronic industries Congresses Semiconductors Design and construction Congresses (DE-588)1071861417 Konferenzschrift gnd-content (DE-604)BV021848901 3 |
| spellingShingle | IEEE SEMI International Semiconductor Manufacturing Science Symposium Computer integrated manufacturing systems Congresses Electronic industries Congresses Semiconductors Design and construction Congresses |
| subject_GND | (DE-588)1071861417 |
| title | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_auth | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_exact_search | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_exact_search_txtP | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_full | IEEE SEMI International Semiconductor Manufacturing Science Symposium 3 May 19 - 22, 1991, Burlingame, CA, USA |
| title_fullStr | IEEE SEMI International Semiconductor Manufacturing Science Symposium 3 May 19 - 22, 1991, Burlingame, CA, USA |
| title_full_unstemmed | IEEE SEMI International Semiconductor Manufacturing Science Symposium 3 May 19 - 22, 1991, Burlingame, CA, USA |
| title_short | IEEE SEMI International Semiconductor Manufacturing Science Symposium |
| title_sort | ieee semi international semiconductor manufacturing science symposium may 19 22 1991 burlingame ca usa |
| topic | Computer integrated manufacturing systems Congresses Electronic industries Congresses Semiconductors Design and construction Congresses |
| topic_facet | Computer integrated manufacturing systems Congresses Electronic industries Congresses Semiconductors Design and construction Congresses Konferenzschrift |
| volume_link | (DE-604)BV021848901 |
| work_keys_str_mv | AT internationalsemiconductormanufacturingsciencesymposium ieeesemiinternationalsemiconductormanufacturingsciencesymposium3 |