Developments in semiconductor microlithography: April 4-5, 1977, San Jose, California
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington
Society of Photo-Optical Instrumentation Engineers
1977
|
| Series: | Proceedings of the Society of Photo-Optical Instrumentation Engineers
volume 100 |
| Subjects: | |
| Physical Description: | viii, 176 Seiten Ill. |
| ISBN: | 0892521279 |
Staff View
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| illustrated | Illustrated |
| index_date | 2024-07-02T16:12:37Z |
| indexdate | 2024-07-09T20:49:31Z |
| institution | BVB |
| isbn | 0892521279 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015246075 |
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| physical | viii, 176 Seiten Ill. |
| publishDate | 1977 |
| publishDateSearch | 1977 |
| publishDateSort | 1977 |
| publisher | Society of Photo-Optical Instrumentation Engineers |
| record_format | marc |
| series | Proceedings of the Society of Photo-Optical Instrumentation Engineers |
| series2 | Proceedings of the Society of Photo-Optical Instrumentation Engineers |
| spelling | Developments in semiconductor microlithography April 4-5, 1977, San Jose, California James W. Giffin, Bruce Ruff, editors Bellingham, Washington Society of Photo-Optical Instrumentation Engineers 1977 viii, 176 Seiten Ill. txt rdacontent n rdamedia nc rdacarrier Proceedings of the Society of Photo-Optical Instrumentation Engineers volume 100 Microlithography Congresses Semiconductors Congresses Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Lithografie Halbleitertechnologie (DE-588)4191584-7 s Giffin, James W. edt Proceedings of the Society of Photo-Optical Instrumentation Engineers volume 100 (DE-604)BV000010887 100 |
| spellingShingle | Developments in semiconductor microlithography April 4-5, 1977, San Jose, California Proceedings of the Society of Photo-Optical Instrumentation Engineers Microlithography Congresses Semiconductors Congresses Halbleitertechnologie (DE-588)4158814-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4191584-7 (DE-588)1071861417 |
| title | Developments in semiconductor microlithography April 4-5, 1977, San Jose, California |
| title_auth | Developments in semiconductor microlithography April 4-5, 1977, San Jose, California |
| title_exact_search | Developments in semiconductor microlithography April 4-5, 1977, San Jose, California |
| title_exact_search_txtP | Developments in semiconductor microlithography April 4-5, 1977, San Jose, California |
| title_full | Developments in semiconductor microlithography April 4-5, 1977, San Jose, California James W. Giffin, Bruce Ruff, editors |
| title_fullStr | Developments in semiconductor microlithography April 4-5, 1977, San Jose, California James W. Giffin, Bruce Ruff, editors |
| title_full_unstemmed | Developments in semiconductor microlithography April 4-5, 1977, San Jose, California James W. Giffin, Bruce Ruff, editors |
| title_short | Developments in semiconductor microlithography |
| title_sort | developments in semiconductor microlithography april 4 5 1977 san jose california |
| title_sub | April 4-5, 1977, San Jose, California |
| topic | Microlithography Congresses Semiconductors Congresses Halbleitertechnologie (DE-588)4158814-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Microlithography Congresses Semiconductors Congresses Halbleitertechnologie Lithografie Halbleitertechnologie Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT giffinjamesw developmentsinsemiconductormicrolithographyapril451977sanjosecalifornia |