APA (7th ed.) Citation

Giffin, J. W. (1977). Developments in semiconductor microlithography: April 4-5, 1977, San Jose, California. Society of Photo-Optical Instrumentation Engineers.

Chicago Style (17th ed.) Citation

Giffin, James W. Developments in Semiconductor Microlithography: April 4-5, 1977, San Jose, California. Bellingham, Washington: Society of Photo-Optical Instrumentation Engineers, 1977.

MLA (9th ed.) Citation

Giffin, James W. Developments in Semiconductor Microlithography: April 4-5, 1977, San Jose, California. Society of Photo-Optical Instrumentation Engineers, 1977.