Giffin, J. W. (1977). Developments in semiconductor microlithography: April 4-5, 1977, San Jose, California. Society of Photo-Optical Instrumentation Engineers.
Chicago-Zitierstil (17. Ausg.)Giffin, James W. Developments in Semiconductor Microlithography: April 4-5, 1977, San Jose, California. Bellingham, Washington: Society of Photo-Optical Instrumentation Engineers, 1977.
MLA-Zitierstil (9. Ausg.)Giffin, James W. Developments in Semiconductor Microlithography: April 4-5, 1977, San Jose, California. Society of Photo-Optical Instrumentation Engineers, 1977.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.