Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology:
Gespeichert in:
1. Verfasser: | |
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Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Berlin
Mensch-&-Buch-Verl.
2005
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Schlagworte: | |
Beschreibung: | Zugl.: Neubiberg, Univ. der Bundeswehr München, Diss., 2005 |
Beschreibung: | 116 S. Ill., graph. Darst. |
ISBN: | 3866640676 9783866640672 |
Internformat
MARC
LEADER | 00000nam a2200000zc 4500 | ||
---|---|---|---|
001 | BV021996216 | ||
003 | DE-604 | ||
005 | 20090217 | ||
007 | t | ||
008 | 060614s2005 ad|| m||| 00||| eng d | ||
020 | |a 3866640676 |9 3-86664-067-6 | ||
020 | |a 9783866640672 |9 978-3-86664-067-2 | ||
035 | |a (OCoLC)181571598 | ||
035 | |a (DE-599)BVBBV021996216 | ||
040 | |a DE-604 |b ger | ||
041 | 0 | |a eng | |
049 | |a DE-706 | ||
100 | 1 | |a Capodieci, Vanessa |e Verfasser |0 (DE-588)131825763 |4 aut | |
245 | 1 | 0 | |a Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology |c von Vanessa Capodieci |
264 | 1 | |a Berlin |b Mensch-&-Buch-Verl. |c 2005 | |
300 | |a 116 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
500 | |a Zugl.: Neubiberg, Univ. der Bundeswehr München, Diss., 2005 | ||
650 | 0 | 7 | |a Praseodymoxide |0 (DE-588)4740848-0 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Molekularstrahlepitaxie |0 (DE-588)4170399-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Lanthanoxid |0 (DE-588)4441515-1 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Aluminiumoxide |0 (DE-588)4001590-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Gate-Oxid |0 (DE-588)4269383-4 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Dielektrische Schicht |0 (DE-588)4194257-7 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
689 | 0 | 0 | |a Dielektrische Schicht |0 (DE-588)4194257-7 |D s |
689 | 0 | 1 | |a Gate-Oxid |0 (DE-588)4269383-4 |D s |
689 | 0 | 2 | |a Aluminiumoxide |0 (DE-588)4001590-7 |D s |
689 | 0 | 3 | |a Praseodymoxide |0 (DE-588)4740848-0 |D s |
689 | 0 | 4 | |a Lanthanoxid |0 (DE-588)4441515-1 |D s |
689 | 0 | 5 | |a Molekularstrahlepitaxie |0 (DE-588)4170399-6 |D s |
689 | 0 | |5 DE-604 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-015210901 |
Datensatz im Suchindex
_version_ | 1804135971138043904 |
---|---|
adam_txt | |
any_adam_object | |
any_adam_object_boolean | |
author | Capodieci, Vanessa |
author_GND | (DE-588)131825763 |
author_facet | Capodieci, Vanessa |
author_role | aut |
author_sort | Capodieci, Vanessa |
author_variant | v c vc |
building | Verbundindex |
bvnumber | BV021996216 |
ctrlnum | (OCoLC)181571598 (DE-599)BVBBV021996216 |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01753nam a2200445zc 4500</leader><controlfield tag="001">BV021996216</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090217 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">060614s2005 ad|| m||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3866640676</subfield><subfield code="9">3-86664-067-6</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783866640672</subfield><subfield code="9">978-3-86664-067-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)181571598</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021996216</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Capodieci, Vanessa</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)131825763</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology</subfield><subfield code="c">von Vanessa Capodieci</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin</subfield><subfield code="b">Mensch-&-Buch-Verl.</subfield><subfield code="c">2005</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">116 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Zugl.: Neubiberg, Univ. der Bundeswehr München, Diss., 2005</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Praseodymoxide</subfield><subfield code="0">(DE-588)4740848-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Molekularstrahlepitaxie</subfield><subfield code="0">(DE-588)4170399-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Lanthanoxid</subfield><subfield code="0">(DE-588)4441515-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Aluminiumoxide</subfield><subfield code="0">(DE-588)4001590-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Gate-Oxid</subfield><subfield code="0">(DE-588)4269383-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dielektrische Schicht</subfield><subfield code="0">(DE-588)4194257-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dielektrische Schicht</subfield><subfield code="0">(DE-588)4194257-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Gate-Oxid</subfield><subfield code="0">(DE-588)4269383-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Aluminiumoxide</subfield><subfield code="0">(DE-588)4001590-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Praseodymoxide</subfield><subfield code="0">(DE-588)4740848-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Lanthanoxid</subfield><subfield code="0">(DE-588)4441515-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="5"><subfield code="a">Molekularstrahlepitaxie</subfield><subfield code="0">(DE-588)4170399-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015210901</subfield></datafield></record></collection> |
genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
genre_facet | Hochschulschrift |
id | DE-604.BV021996216 |
illustrated | Illustrated |
index_date | 2024-07-02T16:10:50Z |
indexdate | 2024-07-09T20:48:58Z |
institution | BVB |
isbn | 3866640676 9783866640672 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015210901 |
oclc_num | 181571598 |
open_access_boolean | |
owner | DE-706 |
owner_facet | DE-706 |
physical | 116 S. Ill., graph. Darst. |
publishDate | 2005 |
publishDateSearch | 2005 |
publishDateSort | 2005 |
publisher | Mensch-&-Buch-Verl. |
record_format | marc |
spelling | Capodieci, Vanessa Verfasser (DE-588)131825763 aut Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology von Vanessa Capodieci Berlin Mensch-&-Buch-Verl. 2005 116 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zugl.: Neubiberg, Univ. der Bundeswehr München, Diss., 2005 Praseodymoxide (DE-588)4740848-0 gnd rswk-swf Molekularstrahlepitaxie (DE-588)4170399-6 gnd rswk-swf Lanthanoxid (DE-588)4441515-1 gnd rswk-swf Aluminiumoxide (DE-588)4001590-7 gnd rswk-swf Gate-Oxid (DE-588)4269383-4 gnd rswk-swf Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Dielektrische Schicht (DE-588)4194257-7 s Gate-Oxid (DE-588)4269383-4 s Aluminiumoxide (DE-588)4001590-7 s Praseodymoxide (DE-588)4740848-0 s Lanthanoxid (DE-588)4441515-1 s Molekularstrahlepitaxie (DE-588)4170399-6 s DE-604 |
spellingShingle | Capodieci, Vanessa Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology Praseodymoxide (DE-588)4740848-0 gnd Molekularstrahlepitaxie (DE-588)4170399-6 gnd Lanthanoxid (DE-588)4441515-1 gnd Aluminiumoxide (DE-588)4001590-7 gnd Gate-Oxid (DE-588)4269383-4 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
subject_GND | (DE-588)4740848-0 (DE-588)4170399-6 (DE-588)4441515-1 (DE-588)4001590-7 (DE-588)4269383-4 (DE-588)4194257-7 (DE-588)4113937-9 |
title | Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology |
title_auth | Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology |
title_exact_search | Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology |
title_exact_search_txtP | Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology |
title_full | Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology von Vanessa Capodieci |
title_fullStr | Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology von Vanessa Capodieci |
title_full_unstemmed | Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology von Vanessa Capodieci |
title_short | Molecular beam deposition (MBD) and characterisation of high-k material as alternative gate oxides for MOS-technology |
title_sort | molecular beam deposition mbd and characterisation of high k material as alternative gate oxides for mos technology |
topic | Praseodymoxide (DE-588)4740848-0 gnd Molekularstrahlepitaxie (DE-588)4170399-6 gnd Lanthanoxid (DE-588)4441515-1 gnd Aluminiumoxide (DE-588)4001590-7 gnd Gate-Oxid (DE-588)4269383-4 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
topic_facet | Praseodymoxide Molekularstrahlepitaxie Lanthanoxid Aluminiumoxide Gate-Oxid Dielektrische Schicht Hochschulschrift |
work_keys_str_mv | AT capodiecivanessa molecularbeamdepositionmbdandcharacterisationofhighkmaterialasalternativegateoxidesformostechnology |